JPS6468987A - Carbonic acid gas laser device - Google Patents

Carbonic acid gas laser device

Info

Publication number
JPS6468987A
JPS6468987A JP22520487A JP22520487A JPS6468987A JP S6468987 A JPS6468987 A JP S6468987A JP 22520487 A JP22520487 A JP 22520487A JP 22520487 A JP22520487 A JP 22520487A JP S6468987 A JPS6468987 A JP S6468987A
Authority
JP
Japan
Prior art keywords
dielectric
plasma
microwave
carbonic acid
acid gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22520487A
Other languages
Japanese (ja)
Inventor
Masakazu Taki
Junichi Nishimae
Kenji Yoshizawa
Tadashi Yanagi
Yoshihiro Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP22520487A priority Critical patent/JPS6468987A/en
Publication of JPS6468987A publication Critical patent/JPS6468987A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)

Abstract

PURPOSE:To produce microwave discharge plasma into spacially even one and to contrive the improvement of cooling efficiency by a method wherein carbonic acid gas laser gas is encapsulated between a conductor wall constituting part of a microwave circuit and a dielectric opposed to this conductor wall, the dielectric is used as a microwave incident window, a mode of a microwave having an electric field component vertical to the boundary between the dielectric and generated plasma is incided and a cooling water passage is provided in the conductor wall. CONSTITUTION:The discharge of carbonic acid gas laser gas encapsulated in a discharge space 26 is broken, plasma is generated and a laser medium is excited. A mode of a microwave having an electric field component vertical to the boundary between a dielectric 25 and the plasma is formed by a microwave circuit. As the dielectric 25 and a conductor wall 24 oppose to each other, an electric field to penetrate the plasma is formed and spacially even discharge plasma is generated. Moreover, cooling water is made to flow in cooling water passages 27 provided on a ridge 21 having the wall 24 and a ridge 22 to cool the wall 24 coming into direct contact with the carbonic acid gas laser gas in the space 26 and the dielectric 25.
JP22520487A 1987-09-10 1987-09-10 Carbonic acid gas laser device Pending JPS6468987A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22520487A JPS6468987A (en) 1987-09-10 1987-09-10 Carbonic acid gas laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22520487A JPS6468987A (en) 1987-09-10 1987-09-10 Carbonic acid gas laser device

Publications (1)

Publication Number Publication Date
JPS6468987A true JPS6468987A (en) 1989-03-15

Family

ID=16825610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22520487A Pending JPS6468987A (en) 1987-09-10 1987-09-10 Carbonic acid gas laser device

Country Status (1)

Country Link
JP (1) JPS6468987A (en)

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