JPS646837A - Vibration type differential pressure sensor - Google Patents

Vibration type differential pressure sensor

Info

Publication number
JPS646837A
JPS646837A JP16338487A JP16338487A JPS646837A JP S646837 A JPS646837 A JP S646837A JP 16338487 A JP16338487 A JP 16338487A JP 16338487 A JP16338487 A JP 16338487A JP S646837 A JPS646837 A JP S646837A
Authority
JP
Japan
Prior art keywords
differential pressure
vibration
measuring means
pressure sensor
vibration type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16338487A
Other languages
English (en)
Other versions
JPH0810169B2 (ja
Inventor
Kyoichi Ikeda
Kinji Harada
Sunao Nishikawa
Takashi Yoshida
Hideki Kuwayama
Takashi Kobayashi
Tetsuya Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP62163384A priority Critical patent/JPH0810169B2/ja
Publication of JPS646837A publication Critical patent/JPS646837A/ja
Publication of JPH0810169B2 publication Critical patent/JPH0810169B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP62163384A 1987-06-30 1987-06-30 振動形差圧センサ Expired - Lifetime JPH0810169B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62163384A JPH0810169B2 (ja) 1987-06-30 1987-06-30 振動形差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62163384A JPH0810169B2 (ja) 1987-06-30 1987-06-30 振動形差圧センサ

Publications (2)

Publication Number Publication Date
JPS646837A true JPS646837A (en) 1989-01-11
JPH0810169B2 JPH0810169B2 (ja) 1996-01-31

Family

ID=15772863

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62163384A Expired - Lifetime JPH0810169B2 (ja) 1987-06-30 1987-06-30 振動形差圧センサ

Country Status (1)

Country Link
JP (1) JPH0810169B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02269928A (ja) * 1989-04-12 1990-11-05 Yokogawa Electric Corp 真空計
JP2006170984A (ja) * 2004-12-15 2006-06-29 General Electric Co <Ge> 圧力を検知するためのシステム及び方法
US7584063B2 (en) 2003-12-05 2009-09-01 Yokagawa Electric Corporation Multivariable transmitter and computation processing method of the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5365665B2 (ja) 2011-06-23 2013-12-11 横河電機株式会社 センサユニット

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188138U (ja) * 1981-05-26 1982-11-29
JPS60186725A (ja) * 1984-03-06 1985-09-24 Yokogawa Hokushin Electric Corp 圧力センサ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188138U (ja) * 1981-05-26 1982-11-29
JPS60186725A (ja) * 1984-03-06 1985-09-24 Yokogawa Hokushin Electric Corp 圧力センサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02269928A (ja) * 1989-04-12 1990-11-05 Yokogawa Electric Corp 真空計
US7584063B2 (en) 2003-12-05 2009-09-01 Yokagawa Electric Corporation Multivariable transmitter and computation processing method of the same
JP2006170984A (ja) * 2004-12-15 2006-06-29 General Electric Co <Ge> 圧力を検知するためのシステム及び方法

Also Published As

Publication number Publication date
JPH0810169B2 (ja) 1996-01-31

Similar Documents

Publication Publication Date Title
GB1488155A (en) Acoustic surface wave oscillator force-sensing devices
JPS5594127A (en) Pressure gauge
SE8307226D0 (sv) Forfarande for att bestemma acceleration
EP0083067A3 (en) Digital pressure transducer
DE3474064D1 (en) Gas density transducer apparatus
JPH05273229A (ja) 半導体加速度センサ
US4317372A (en) Surface acoustic wave pressure gauge
JPS646837A (en) Vibration type differential pressure sensor
US4621530A (en) Surface acoustic wave accelerometer
JPS60186725A (ja) 圧力センサ
JPS5560832A (en) Pressure sensor
JPH0331207B2 (ja)
JPS5594122A (en) Thermometer
JPS6410141A (en) Pressure sensor
JPS6459132A (en) Weight detector
SU576518A1 (ru) Вибрационно-частотный преобразователь усилий
SU619782A1 (ru) Способ измерени толщины крупногабаритных неферромагнитных изделий
JPS6459075A (en) Semiconductor acceleration sensor
JPS5737234A (en) Pressure gage
JPS6491029A (en) Force transducer
JPS60177234A (ja) 圧力測定装置
SU779885A1 (ru) Частотный датчик виброускорений
SU453595A1 (ru) Устройство для измерения натяжения магнитнойленты
SU1029085A1 (ru) Датчик линейных ускорений
JPS5381284A (en) Pressure tester for container

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term
FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080131

Year of fee payment: 12