JPS5737234A - Pressure gage - Google Patents

Pressure gage

Info

Publication number
JPS5737234A
JPS5737234A JP11369580A JP11369580A JPS5737234A JP S5737234 A JPS5737234 A JP S5737234A JP 11369580 A JP11369580 A JP 11369580A JP 11369580 A JP11369580 A JP 11369580A JP S5737234 A JPS5737234 A JP S5737234A
Authority
JP
Japan
Prior art keywords
vibrator
pressure
vibration modes
driving
restricted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11369580A
Other languages
Japanese (ja)
Inventor
Kyoichi Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP11369580A priority Critical patent/JPS5737234A/en
Publication of JPS5737234A publication Critical patent/JPS5737234A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To realize a pressure gage not restricted by working temperature and not affected by static pressure by a method wherein pressure to be measured is applied to a cylindrical vibrator, and the vibrator is vibrated is a plurality of vibration modes simultaneously for detecting the pressure to be measured applied to said vibrator. CONSTITUTION:For a vibrator 1, thin cylinder part 13 and a thick cylinder part 14 continued therefrom are formed by a hole 12 bored along the central axis. Further, in a cylindrical part 14 near a step part 11 of the vibrator 1, four counterbore holes 15-18 are formed at 90 deg. intervals. Piezoelectric elements 2-5, charge amplifiers 60, 70, coefficient circuits 80, 90 and others form a driving part for driving the vibrator 1, and said driving part not only performs detection of vibration of the vibrator 1 about signals due to the second and the fourth vibration modes, but is constituted such that enforced force with which the vibrator 1 deformes with the second vibration modes is applied to said vibrator 1. Hereby, a pressure gas without being restricted in working temperature and being affected by static pressure is realized.
JP11369580A 1980-08-19 1980-08-19 Pressure gage Pending JPS5737234A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11369580A JPS5737234A (en) 1980-08-19 1980-08-19 Pressure gage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11369580A JPS5737234A (en) 1980-08-19 1980-08-19 Pressure gage

Publications (1)

Publication Number Publication Date
JPS5737234A true JPS5737234A (en) 1982-03-01

Family

ID=14618829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11369580A Pending JPS5737234A (en) 1980-08-19 1980-08-19 Pressure gage

Country Status (1)

Country Link
JP (1) JPS5737234A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6056232A (en) * 1983-09-07 1985-04-01 Yokogawa Hokushin Electric Corp Manometer
JP2010151599A (en) * 2008-12-25 2010-07-08 Yokogawa Denshikiki Co Ltd Method for manufacturing pressure sensor and pressure sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6056232A (en) * 1983-09-07 1985-04-01 Yokogawa Hokushin Electric Corp Manometer
JP2010151599A (en) * 2008-12-25 2010-07-08 Yokogawa Denshikiki Co Ltd Method for manufacturing pressure sensor and pressure sensor

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