JPS6467824A - Forming device for oxide superconducting material - Google Patents
Forming device for oxide superconducting materialInfo
- Publication number
- JPS6467824A JPS6467824A JP62223674A JP22367487A JPS6467824A JP S6467824 A JPS6467824 A JP S6467824A JP 62223674 A JP62223674 A JP 62223674A JP 22367487 A JP22367487 A JP 22367487A JP S6467824 A JPS6467824 A JP S6467824A
- Authority
- JP
- Japan
- Prior art keywords
- space
- thin film
- oxide superconducting
- gas
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 3
- 239000010409 thin film Substances 0.000 abstract 3
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 1
- 230000006837 decompression Effects 0.000 abstract 1
- 230000005684 electric field Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 229910052736 halogen Inorganic materials 0.000 abstract 1
- 150000002367 halogens Chemical class 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000003993 interaction Effects 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62223674A JPS6467824A (en) | 1987-09-07 | 1987-09-07 | Forming device for oxide superconducting material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62223674A JPS6467824A (en) | 1987-09-07 | 1987-09-07 | Forming device for oxide superconducting material |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6467824A true JPS6467824A (en) | 1989-03-14 |
JPH0556282B2 JPH0556282B2 (enrdf_load_html_response) | 1993-08-19 |
Family
ID=16801869
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62223674A Granted JPS6467824A (en) | 1987-09-07 | 1987-09-07 | Forming device for oxide superconducting material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6467824A (enrdf_load_html_response) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0288408A (ja) * | 1988-05-31 | 1990-03-28 | Mitsubishi Metal Corp | 超電導セラミックス膜の製造法 |
JPH0288763A (ja) * | 1988-09-26 | 1990-03-28 | Matsushita Electric Ind Co Ltd | 薄膜超電導体およびその製造方法および製造装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI438953B (zh) * | 2008-01-30 | 2014-05-21 | Osram Opto Semiconductors Gmbh | 電子組件之製造方法及電子組件 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56109824A (en) * | 1980-02-05 | 1981-08-31 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of oxide superconductive thin film |
JPS5963732A (ja) * | 1982-10-04 | 1984-04-11 | Hitachi Ltd | 薄膜形成装置 |
JPS59219461A (ja) * | 1983-05-24 | 1984-12-10 | Toshiba Corp | アモルフアスシリコン成膜装置 |
JPS60117711A (ja) * | 1983-11-30 | 1985-06-25 | Toshiba Corp | 薄膜形成装置 |
JPS61109036A (ja) * | 1984-11-01 | 1986-05-27 | Canon Inc | テレビレンズの表示装置 |
JPS61125133A (ja) * | 1984-11-22 | 1986-06-12 | Hitachi Ltd | 低温プラズマ電磁界制御機構 |
JPS61267324A (ja) * | 1985-05-21 | 1986-11-26 | Fuji Electric Co Ltd | 乾式薄膜加工装置 |
JPS62150726A (ja) * | 1985-12-24 | 1987-07-04 | Fuji Electric Co Ltd | 半導体装置の製造方法 |
-
1987
- 1987-09-07 JP JP62223674A patent/JPS6467824A/ja active Granted
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56109824A (en) * | 1980-02-05 | 1981-08-31 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of oxide superconductive thin film |
JPS5963732A (ja) * | 1982-10-04 | 1984-04-11 | Hitachi Ltd | 薄膜形成装置 |
JPS59219461A (ja) * | 1983-05-24 | 1984-12-10 | Toshiba Corp | アモルフアスシリコン成膜装置 |
JPS60117711A (ja) * | 1983-11-30 | 1985-06-25 | Toshiba Corp | 薄膜形成装置 |
JPS61109036A (ja) * | 1984-11-01 | 1986-05-27 | Canon Inc | テレビレンズの表示装置 |
JPS61125133A (ja) * | 1984-11-22 | 1986-06-12 | Hitachi Ltd | 低温プラズマ電磁界制御機構 |
JPS61267324A (ja) * | 1985-05-21 | 1986-11-26 | Fuji Electric Co Ltd | 乾式薄膜加工装置 |
JPS62150726A (ja) * | 1985-12-24 | 1987-07-04 | Fuji Electric Co Ltd | 半導体装置の製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0288408A (ja) * | 1988-05-31 | 1990-03-28 | Mitsubishi Metal Corp | 超電導セラミックス膜の製造法 |
JPH0288763A (ja) * | 1988-09-26 | 1990-03-28 | Matsushita Electric Ind Co Ltd | 薄膜超電導体およびその製造方法および製造装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0556282B2 (enrdf_load_html_response) | 1993-08-19 |
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