JPS6467272A - Spray nozzle, sprayer and method for use thereof - Google Patents

Spray nozzle, sprayer and method for use thereof

Info

Publication number
JPS6467272A
JPS6467272A JP63064764A JP6476488A JPS6467272A JP S6467272 A JPS6467272 A JP S6467272A JP 63064764 A JP63064764 A JP 63064764A JP 6476488 A JP6476488 A JP 6476488A JP S6467272 A JPS6467272 A JP S6467272A
Authority
JP
Japan
Prior art keywords
pipe
gas
velocity
droplets
accelerated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63064764A
Other languages
English (en)
Other versions
JPH0622712B2 (ja
Inventor
Henrii Kurasutaaman Donarudo
Mirunaa Rasukofusukii Sofuia
Buaanan Niii Sukotsuto
Shiii Shieiikungu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS6467272A publication Critical patent/JPS6467272A/ja
Publication of JPH0622712B2 publication Critical patent/JPH0622712B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
    • B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
    • B05B7/0441—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid with one inner conduit of liquid surrounded by an external conduit of gas upstream the mixing chamber
    • B05B7/045—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid with one inner conduit of liquid surrounded by an external conduit of gas upstream the mixing chamber the gas and liquid flows being parallel just upstream the mixing chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S261/00—Gas and liquid contact apparatus
    • Y10S261/78—Sonic flow
JP63064764A 1987-06-12 1988-03-19 噴霧器装置 Expired - Lifetime JPH0622712B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/061,840 US4787404A (en) 1987-06-12 1987-06-12 Low flow rate-low pressure atomizer device
US61840 1987-06-12

Publications (2)

Publication Number Publication Date
JPS6467272A true JPS6467272A (en) 1989-03-13
JPH0622712B2 JPH0622712B2 (ja) 1994-03-30

Family

ID=22038474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63064764A Expired - Lifetime JPH0622712B2 (ja) 1987-06-12 1988-03-19 噴霧器装置

Country Status (4)

Country Link
US (1) US4787404A (ja)
EP (1) EP0294690B1 (ja)
JP (1) JPH0622712B2 (ja)
DE (1) DE3867321D1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004298694A (ja) * 2003-03-28 2004-10-28 Tsuneishi Shipbuilding Co Ltd 液滴噴射ノズル及びそれを用いた構造体の表面改質方法

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CA2010656C (en) * 1989-05-01 1994-04-19 Roger Cann Method and apparatus for flushing residual paint from the internal flow passages in a paint distribution system
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US5072881A (en) * 1990-06-04 1991-12-17 Systems Specialties Method of cleaning automated paint spraying equipment
JP3283308B2 (ja) * 1992-10-20 2002-05-20 株式会社福原精機製作所 編機の編成部における除塵・給油用噴出ノズル装置
US5730806A (en) * 1993-08-30 1998-03-24 The United States Of America As Represented By The Administrator Of The National Aeronautics & Space Administration Gas-liquid supersonic cleaning and cleaning verification spray system
JP3415670B2 (ja) * 1994-03-03 2003-06-09 三菱電機株式会社 ウエハ洗浄装置
US5706842A (en) * 1995-03-29 1998-01-13 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Balanced rotating spray tank and pipe cleaning and cleanliness verification system
JP3504023B2 (ja) * 1995-05-26 2004-03-08 株式会社ルネサステクノロジ 洗浄装置および洗浄方法
DE19549628B4 (de) * 1995-05-26 2006-08-17 Ryoden Semiconductor System Engineering Corp., Itami Waschverfahren eines Halbleitersubstrats
DE19544074C2 (de) * 1995-11-25 1999-01-14 Duerr Systems Gmbh Automatisch arbeitende Reinigungsanlage für Werkstücke
ES2140998B1 (es) * 1996-05-13 2000-10-16 Univ Sevilla Procedimiento de atomizacion de liquidos.
ES2158741B1 (es) * 1997-12-17 2002-03-16 Univ Sevilla Dispositivo de sipersion de un fluido en otro inmiscible en forma de microgotas o microburbujas de tamaño uniforme.
NL1006604C1 (nl) * 1996-10-24 1998-04-27 H T Research B V Inrichting en werkwijze voor het reinigen van oppervlakken.
JP3315611B2 (ja) * 1996-12-02 2002-08-19 三菱電機株式会社 洗浄用２流体ジェットノズル及び洗浄装置ならびに半導体装置
US20040007255A1 (en) * 1997-06-20 2004-01-15 Labib Mohamed Emam Apparatus and method for cleaning pipelines, tubing and membranes using two-phase flow
JP2959763B1 (ja) * 1998-01-13 1999-10-06 島田理化工業株式会社 ウェーハ洗浄装置
GB2333805B (en) * 1998-01-30 2001-09-19 Speciality Chemical Holdings L Cleaning method and apparatus
JP3410385B2 (ja) * 1999-04-19 2003-05-26 株式会社ディスコ 洗浄装置及び切削装置
AU2001250358A1 (en) * 2000-04-04 2001-10-15 Johnsondiversey, Inc. Method and apparatus for generating water sprays, and methods of cleaning using water sprays
EP1470865A3 (en) * 2000-06-30 2009-02-18 Shibuya Kogyo Co., Ltd. Cleaning nozzle and cleaning apparatus
US6951221B2 (en) * 2000-09-22 2005-10-04 Dainippon Screen Mfg. Co., Ltd. Substrate processing apparatus
US6705331B2 (en) * 2000-11-20 2004-03-16 Dainippon Screen Mfg., Co., Ltd. Substrate cleaning apparatus
US6979362B2 (en) * 2001-04-24 2005-12-27 Jackson David P Apparatus and process for the treatment, delivery and recycle of process fluids used in dense phase carbon dioxide applications
JP2003145062A (ja) * 2001-11-14 2003-05-20 Mitsubishi Electric Corp 洗浄用２流体ジェットノズル、洗浄装置およびこれらを用いた半導体装置の製造方法
JP4074814B2 (ja) * 2002-01-30 2008-04-16 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
KR100586239B1 (ko) * 2002-04-19 2006-06-02 주식회사 디엠에스 평판 디스플레이 세정용 유체 혼합 분사 장치
EA017096B1 (ru) * 2008-02-21 2012-09-28 Юнилевер Н.В. Способ очистки поверхностей и устройство для его осуществления
US8114221B2 (en) 2008-09-30 2012-02-14 Princeton Trade & Technology, Inc. Method and composition for cleaning tubular systems employing moving three-phase contact lines
US8226774B2 (en) 2008-09-30 2012-07-24 Princeton Trade & Technology, Inc. Method for cleaning passageways such an endoscope channels using flow of liquid and gas
WO2011020734A2 (en) 2009-08-19 2011-02-24 Unilever Nv A process and a device to clean substrates
EP2467216B1 (en) 2009-08-19 2013-04-17 Unilever N.V. System for cleaning substrates
EA021742B1 (ru) 2009-08-19 2015-08-31 Юнилевер Н.В. Способ очистки твердых поверхностей
US8800089B2 (en) 2009-08-19 2014-08-12 Conopco, Inc. Process for cleaning teeth
CN102554782A (zh) * 2010-12-20 2012-07-11 中芯国际集成电路制造(上海)有限公司 研磨垫清洗装置及研磨垫修整器
US8882085B1 (en) * 2012-07-25 2014-11-11 The United States Of America As Represented By The Secretary Of The Army Micro atomizer
FR3037327B1 (fr) 2015-06-09 2017-06-23 Supratec Installation de traitement d'une bande convoyeuse de produits agroalimentaires
CN105465455B (zh) * 2015-12-25 2021-09-07 深圳荣钜源科技有限公司 出水单元、喷头以及花洒
JP6423495B1 (ja) * 2017-07-21 2018-11-14 株式会社メンテック ノズルキャップ、それを備えたノズル装置及び薬液の散布方法
US10898909B2 (en) * 2017-10-25 2021-01-26 Pioneer Industries, Inc. Water pressure boosting device
CN108469342A (zh) * 2018-03-28 2018-08-31 天津大学 模拟高速液滴喷射撞壁的实验系统
CN115784167A (zh) * 2022-12-20 2023-03-14 江苏嘉宏新材料有限公司 蒽醌法制备双氧水的氧化萃取工艺

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DE1403149B2 (de) * 1959-09-11 1971-03-25 Purex Corp , Ltd , Wilmington, Cahf (V St A) Injektorartige Vorrichtung zum Erzeu gen eines Heißwasserstrahles hoher Ge schwindigkeit fur Reinigungszwecke
US3071540A (en) * 1959-10-27 1963-01-01 Kellogg M W Co Oil feed system for fluid catalytic cracking unit
US3059860A (en) * 1959-11-17 1962-10-23 Hugo Boskamp Atomizing nozzle assembly
US3314611A (en) * 1962-09-13 1967-04-18 Rosemount Eng Co Ltd Spray nozzle
US3430864A (en) * 1967-05-26 1969-03-04 American Instr Co Inc Hydrogen-entrained air total consumption aspirator burner
US3510061A (en) * 1969-06-02 1970-05-05 Gulf Oil Canada Ltd Two-stage sonic atomizing device
DE2445689A1 (de) * 1974-09-25 1976-04-01 Fink Chemie Geraet zum aufschaeumen von fluessigkeiten, insbesondere von wasser mit chemikalien zu reinigungszwecken
DE2634494C2 (de) * 1976-07-31 1983-04-14 Bayer Ag, 5090 Leverkusen Neue Injektoren zur Flüssigkeitsbegasung
AU530096B2 (en) * 1978-11-06 1983-06-30 Varian Techtron Pty. Ltd. Nebulizer
DE3604715A1 (de) * 1986-02-14 1987-08-20 Joseph Plannerer Vergaser fuer verbrennungsmotoren sowie leerlaufeinbauteil hierfuer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004298694A (ja) * 2003-03-28 2004-10-28 Tsuneishi Shipbuilding Co Ltd 液滴噴射ノズル及びそれを用いた構造体の表面改質方法

Also Published As

Publication number Publication date
EP0294690A2 (en) 1988-12-14
EP0294690B1 (en) 1992-01-02
US4787404A (en) 1988-11-29
JPH0622712B2 (ja) 1994-03-30
DE3867321D1 (de) 1992-02-13
EP0294690A3 (en) 1989-07-26

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