DE3867321D1 - Zerstaeuber fuer reinigungsfluessigkeit und dessen verwendungsverfahren. - Google Patents

Zerstaeuber fuer reinigungsfluessigkeit und dessen verwendungsverfahren.

Info

Publication number
DE3867321D1
DE3867321D1 DE8888108681T DE3867321T DE3867321D1 DE 3867321 D1 DE3867321 D1 DE 3867321D1 DE 8888108681 T DE8888108681 T DE 8888108681T DE 3867321 T DE3867321 T DE 3867321T DE 3867321 D1 DE3867321 D1 DE 3867321D1
Authority
DE
Germany
Prior art keywords
sprayer
cleaning liquid
use method
cleaning
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888108681T
Other languages
English (en)
Inventor
Donald Henry Klosterman
Sofia Milner Laskowski
Scott Vernon Knee
Shei-Kung Shi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3867321D1 publication Critical patent/DE3867321D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
    • B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
    • B05B7/0441—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid with one inner conduit of liquid surrounded by an external conduit of gas upstream the mixing chamber
    • B05B7/045—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid with one inner conduit of liquid surrounded by an external conduit of gas upstream the mixing chamber the gas and liquid flows being parallel just upstream the mixing chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S261/00—Gas and liquid contact apparatus
    • Y10S261/78—Sonic flow
DE8888108681T 1987-06-12 1988-05-31 Zerstaeuber fuer reinigungsfluessigkeit und dessen verwendungsverfahren. Expired - Fee Related DE3867321D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/061,840 US4787404A (en) 1987-06-12 1987-06-12 Low flow rate-low pressure atomizer device

Publications (1)

Publication Number Publication Date
DE3867321D1 true DE3867321D1 (de) 1992-02-13

Family

ID=22038474

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888108681T Expired - Fee Related DE3867321D1 (de) 1987-06-12 1988-05-31 Zerstaeuber fuer reinigungsfluessigkeit und dessen verwendungsverfahren.

Country Status (4)

Country Link
US (1) US4787404A (de)
EP (1) EP0294690B1 (de)
JP (1) JPH0622712B2 (de)
DE (1) DE3867321D1 (de)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4902352A (en) * 1986-09-05 1990-02-20 General Motors Corporation Paint color change system
CA2010656C (en) * 1989-05-01 1994-04-19 Roger Cann Method and apparatus for flushing residual paint from the internal flow passages in a paint distribution system
FR2658748B1 (fr) * 1990-02-23 1994-12-23 Soudure Autogene Francaise Procede et dispositif de coupe par jet de liquide.
US5072881A (en) * 1990-06-04 1991-12-17 Systems Specialties Method of cleaning automated paint spraying equipment
JP3283308B2 (ja) * 1992-10-20 2002-05-20 株式会社福原精機製作所 編機の編成部における除塵・給油用噴出ノズル装置
US5730806A (en) * 1993-08-30 1998-03-24 The United States Of America As Represented By The Administrator Of The National Aeronautics & Space Administration Gas-liquid supersonic cleaning and cleaning verification spray system
JP3415670B2 (ja) * 1994-03-03 2003-06-09 三菱電機株式会社 ウエハ洗浄装置
US5706842A (en) * 1995-03-29 1998-01-13 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Balanced rotating spray tank and pipe cleaning and cleanliness verification system
DE19549628B4 (de) * 1995-05-26 2006-08-17 Ryoden Semiconductor System Engineering Corp., Itami Waschverfahren eines Halbleitersubstrats
JP3504023B2 (ja) * 1995-05-26 2004-03-08 株式会社ルネサステクノロジ 洗浄装置および洗浄方法
DE19544074C2 (de) * 1995-11-25 1999-01-14 Duerr Systems Gmbh Automatisch arbeitende Reinigungsanlage für Werkstücke
ES2140998B1 (es) * 1996-05-13 2000-10-16 Univ Sevilla Procedimiento de atomizacion de liquidos.
ES2158741B1 (es) * 1997-12-17 2002-03-16 Univ Sevilla Dispositivo de sipersion de un fluido en otro inmiscible en forma de microgotas o microburbujas de tamaño uniforme.
NL1006604C1 (nl) * 1996-10-24 1998-04-27 H T Research B V Inrichting en werkwijze voor het reinigen van oppervlakken.
JP3315611B2 (ja) * 1996-12-02 2002-08-19 三菱電機株式会社 洗浄用２流体ジェットノズル及び洗浄装置ならびに半導体装置
US20040007255A1 (en) * 1997-06-20 2004-01-15 Labib Mohamed Emam Apparatus and method for cleaning pipelines, tubing and membranes using two-phase flow
JP2959763B1 (ja) * 1998-01-13 1999-10-06 島田理化工業株式会社 ウェーハ洗浄装置
GB2333805B (en) * 1998-01-30 2001-09-19 Speciality Chemical Holdings L Cleaning method and apparatus
JP3410385B2 (ja) * 1999-04-19 2003-05-26 株式会社ディスコ 洗浄装置及び切削装置
WO2001074495A1 (en) * 2000-04-04 2001-10-11 Johnsondiversey, Inc. Method and apparatus for generating water sprays, and methods of cleaning using water sprays
KR100553781B1 (ko) * 2000-06-30 2006-02-20 시부야 코교 가부시키가이샤 세정 노즐 및 세정 장치
US6951221B2 (en) * 2000-09-22 2005-10-04 Dainippon Screen Mfg. Co., Ltd. Substrate processing apparatus
US6705331B2 (en) * 2000-11-20 2004-03-16 Dainippon Screen Mfg., Co., Ltd. Substrate cleaning apparatus
AU2002308473A1 (en) * 2001-04-24 2002-11-05 Deflex Llc Apparatus and process for treatment, delivery and recycle ofprocess fluids for dense phase carbon dioxide applications
JP2003145062A (ja) * 2001-11-14 2003-05-20 Mitsubishi Electric Corp 洗浄用２流体ジェットノズル、洗浄装置およびこれらを用いた半導体装置の製造方法
JP4074814B2 (ja) * 2002-01-30 2008-04-16 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
KR100586239B1 (ko) * 2002-04-19 2006-06-02 주식회사 디엠에스 평판 디스플레이 세정용 유체 혼합 분사 장치
JP3987815B2 (ja) * 2003-03-28 2007-10-10 ツネイシホールディングス株式会社 構造体の表面改質方法
WO2009103595A1 (en) * 2008-02-21 2009-08-27 Unilever Nv A process and a device to clean substrates
US8114221B2 (en) 2008-09-30 2012-02-14 Princeton Trade & Technology, Inc. Method and composition for cleaning tubular systems employing moving three-phase contact lines
US8226774B2 (en) 2008-09-30 2012-07-24 Princeton Trade & Technology, Inc. Method for cleaning passageways such an endoscope channels using flow of liquid and gas
ES2543387T3 (es) 2009-08-19 2015-08-18 Unilever N.V. Un proceso para limpiar superficies duras
WO2011020734A2 (en) 2009-08-19 2011-02-24 Unilever Nv A process and a device to clean substrates
MX2012002122A (es) 2009-08-19 2012-03-07 Unilever Nv Un proceso para limpiar dientes.
MY159833A (en) 2009-08-19 2017-02-15 Unilever Plc A process and a device to clean substrates
CN102554782A (zh) * 2010-12-20 2012-07-11 中芯国际集成电路制造(上海)有限公司 研磨垫清洗装置及研磨垫修整器
US8882085B1 (en) * 2012-07-25 2014-11-11 The United States Of America As Represented By The Secretary Of The Army Micro atomizer
FR3037327B1 (fr) 2015-06-09 2017-06-23 Supratec Installation de traitement d'une bande convoyeuse de produits agroalimentaires
CN105465455B (zh) * 2015-12-25 2021-09-07 深圳荣钜源科技有限公司 出水单元、喷头以及花洒
JP6423495B1 (ja) * 2017-07-21 2018-11-14 株式会社メンテック ノズルキャップ、それを備えたノズル装置及び薬液の散布方法
US10898909B2 (en) * 2017-10-25 2021-01-26 Pioneer Industries, Inc. Water pressure boosting device
CN108469342A (zh) * 2018-03-28 2018-08-31 天津大学 模拟高速液滴喷射撞壁的实验系统
CN115784167B (zh) * 2022-12-20 2024-05-07 江苏嘉宏新材料有限公司 蒽醌法制备双氧水的氧化萃取工艺

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2713510A (en) * 1955-07-19 Coanda
US2912064A (en) * 1956-01-13 1959-11-10 C A Norgren Company Methods and apparatus for reclassifying aerosols
DE1403149B2 (de) * 1959-09-11 1971-03-25 Purex Corp , Ltd , Wilmington, Cahf (V St A) Injektorartige Vorrichtung zum Erzeu gen eines Heißwasserstrahles hoher Ge schwindigkeit fur Reinigungszwecke
US3071540A (en) * 1959-10-27 1963-01-01 Kellogg M W Co Oil feed system for fluid catalytic cracking unit
US3059860A (en) * 1959-11-17 1962-10-23 Hugo Boskamp Atomizing nozzle assembly
US3314611A (en) * 1962-09-13 1967-04-18 Rosemount Eng Co Ltd Spray nozzle
US3430864A (en) * 1967-05-26 1969-03-04 American Instr Co Inc Hydrogen-entrained air total consumption aspirator burner
US3510061A (en) * 1969-06-02 1970-05-05 Gulf Oil Canada Ltd Two-stage sonic atomizing device
DE2445689A1 (de) * 1974-09-25 1976-04-01 Fink Chemie Geraet zum aufschaeumen von fluessigkeiten, insbesondere von wasser mit chemikalien zu reinigungszwecken
DE2634494C2 (de) * 1976-07-31 1983-04-14 Bayer Ag, 5090 Leverkusen Neue Injektoren zur Flüssigkeitsbegasung
AU530096B2 (en) * 1978-11-06 1983-06-30 Varian Techtron Pty. Ltd. Nebulizer
DE3604715A1 (de) * 1986-02-14 1987-08-20 Joseph Plannerer Vergaser fuer verbrennungsmotoren sowie leerlaufeinbauteil hierfuer

Also Published As

Publication number Publication date
EP0294690A2 (de) 1988-12-14
US4787404A (en) 1988-11-29
JPH0622712B2 (ja) 1994-03-30
EP0294690B1 (de) 1992-01-02
JPS6467272A (en) 1989-03-13
EP0294690A3 (en) 1989-07-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee