JPS646564U - - Google Patents

Info

Publication number
JPS646564U
JPS646564U JP10210487U JP10210487U JPS646564U JP S646564 U JPS646564 U JP S646564U JP 10210487 U JP10210487 U JP 10210487U JP 10210487 U JP10210487 U JP 10210487U JP S646564 U JPS646564 U JP S646564U
Authority
JP
Japan
Prior art keywords
coaxial
measured
contact probes
probe card
connector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10210487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10210487U priority Critical patent/JPS646564U/ja
Publication of JPS646564U publication Critical patent/JPS646564U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10210487U 1987-07-02 1987-07-02 Pending JPS646564U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10210487U JPS646564U (enrdf_load_stackoverflow) 1987-07-02 1987-07-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10210487U JPS646564U (enrdf_load_stackoverflow) 1987-07-02 1987-07-02

Publications (1)

Publication Number Publication Date
JPS646564U true JPS646564U (enrdf_load_stackoverflow) 1989-01-13

Family

ID=31331701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10210487U Pending JPS646564U (enrdf_load_stackoverflow) 1987-07-02 1987-07-02

Country Status (1)

Country Link
JP (1) JPS646564U (enrdf_load_stackoverflow)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56105647A (en) * 1980-01-25 1981-08-22 Yoshie Hasegawa Probeboard
JPS60220943A (ja) * 1984-04-17 1985-11-05 Sanyo Electric Co Ltd 半導体装置の検査方法
JPS6156981A (ja) * 1984-08-27 1986-03-22 Nec Corp 半導体検査装置
JPS63122141A (ja) * 1986-11-12 1988-05-26 Hitachi Ltd 半導体素子検査装置
JPS647632A (en) * 1987-06-30 1989-01-11 Hitachi Ltd Inspection device for semiconductor element

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56105647A (en) * 1980-01-25 1981-08-22 Yoshie Hasegawa Probeboard
JPS60220943A (ja) * 1984-04-17 1985-11-05 Sanyo Electric Co Ltd 半導体装置の検査方法
JPS6156981A (ja) * 1984-08-27 1986-03-22 Nec Corp 半導体検査装置
JPS63122141A (ja) * 1986-11-12 1988-05-26 Hitachi Ltd 半導体素子検査装置
JPS647632A (en) * 1987-06-30 1989-01-11 Hitachi Ltd Inspection device for semiconductor element

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