JPS647632A - Inspection device for semiconductor element - Google Patents
Inspection device for semiconductor elementInfo
- Publication number
- JPS647632A JPS647632A JP62161332A JP16133287A JPS647632A JP S647632 A JPS647632 A JP S647632A JP 62161332 A JP62161332 A JP 62161332A JP 16133287 A JP16133287 A JP 16133287A JP S647632 A JPS647632 A JP S647632A
- Authority
- JP
- Japan
- Prior art keywords
- conductive
- coaxial
- coaxial cables
- probe
- probes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To obtain a device capable of efficiently inspecting a semiconductor element with high reliability by installing a conductive probe, a coaxial cable using the conductive probe as a conductor, a conductive substrate positioning the coaxial cable, a support section for the coaxial cable adjusting the protruding length of a nose probe by a spring mechanism, a coaxial-cable connector group, etc. CONSTITUTION:A probe, which consists of conductive probes 14, coaxial cables 30 employing the probes 14 as conductors, a first conductive substrate 18 having though- hole patterns for slidably positioning the coaxial cables, second conductive substrates 23, to which second though-hole patterns are formed while being made wider than spaces among each through-hole in the first conductive substrate 18, support sections 19-22 for the coaxial cables 30, which penetrate and support said coaxial cables 30 into respective though-hole and can adjust protruding length from the first conductive substrate 18 of nose probes 14 for the coaxial cables 30 within the range of the stroke length of the expansion and contraction of springs 19 by spring mechanisms, and a coaxial-cable connector 24 group and in which the first and second conductive substrates 18, 23 and conductive materials 16 for the coaxial cables 30 are coupled electrically at the same potential, is mounted.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62161332A JPS647632A (en) | 1987-06-30 | 1987-06-30 | Inspection device for semiconductor element |
US07/209,637 US4931726A (en) | 1987-06-22 | 1988-06-21 | Apparatus for testing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62161332A JPS647632A (en) | 1987-06-30 | 1987-06-30 | Inspection device for semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS647632A true JPS647632A (en) | 1989-01-11 |
Family
ID=15733070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62161332A Pending JPS647632A (en) | 1987-06-22 | 1987-06-30 | Inspection device for semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS647632A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS646564U (en) * | 1987-07-02 | 1989-01-13 | ||
JPH0845996A (en) * | 1994-07-29 | 1996-02-16 | Nec Corp | Tester for semiconductor device |
CN100387571C (en) * | 2005-11-24 | 2008-05-14 | 东华大学 | Process for synthesizing 2-(4'-amino benzoyl) benzoic acid |
WO2011129244A1 (en) * | 2010-04-15 | 2011-10-20 | 東京エレクトロン株式会社 | Contact structure and method for manufacturing contact structure |
TWI410637B (en) * | 2009-09-17 | 2013-10-01 | Mpi Corp | Area array probe card |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6023315A (en) * | 1983-06-29 | 1985-02-05 | ピエ−ル−リヒヤ−ル・デイツク | Lasting skin drug composition based on essential fatty acids |
JPS6257177B2 (en) * | 1980-02-05 | 1987-11-30 | Bayer Ag |
-
1987
- 1987-06-30 JP JP62161332A patent/JPS647632A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6257177B2 (en) * | 1980-02-05 | 1987-11-30 | Bayer Ag | |
JPS6023315A (en) * | 1983-06-29 | 1985-02-05 | ピエ−ル−リヒヤ−ル・デイツク | Lasting skin drug composition based on essential fatty acids |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS646564U (en) * | 1987-07-02 | 1989-01-13 | ||
JPH0845996A (en) * | 1994-07-29 | 1996-02-16 | Nec Corp | Tester for semiconductor device |
CN100387571C (en) * | 2005-11-24 | 2008-05-14 | 东华大学 | Process for synthesizing 2-(4'-amino benzoyl) benzoic acid |
TWI410637B (en) * | 2009-09-17 | 2013-10-01 | Mpi Corp | Area array probe card |
WO2011129244A1 (en) * | 2010-04-15 | 2011-10-20 | 東京エレクトロン株式会社 | Contact structure and method for manufacturing contact structure |
CN102713643A (en) * | 2010-04-15 | 2012-10-03 | 东京毅力科创株式会社 | Contact structure and method for manufacturing contact structure |
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