JPS647632A - Inspection device for semiconductor element - Google Patents

Inspection device for semiconductor element

Info

Publication number
JPS647632A
JPS647632A JP62161332A JP16133287A JPS647632A JP S647632 A JPS647632 A JP S647632A JP 62161332 A JP62161332 A JP 62161332A JP 16133287 A JP16133287 A JP 16133287A JP S647632 A JPS647632 A JP S647632A
Authority
JP
Japan
Prior art keywords
conductive
coaxial
coaxial cables
probe
probes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62161332A
Other languages
Japanese (ja)
Inventor
Susumu Kasukabe
Masafumi Okubo
Yutaka Akiba
Minoru Tanaka
Ataru Yokono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62161332A priority Critical patent/JPS647632A/en
Priority to US07/209,637 priority patent/US4931726A/en
Publication of JPS647632A publication Critical patent/JPS647632A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a device capable of efficiently inspecting a semiconductor element with high reliability by installing a conductive probe, a coaxial cable using the conductive probe as a conductor, a conductive substrate positioning the coaxial cable, a support section for the coaxial cable adjusting the protruding length of a nose probe by a spring mechanism, a coaxial-cable connector group, etc. CONSTITUTION:A probe, which consists of conductive probes 14, coaxial cables 30 employing the probes 14 as conductors, a first conductive substrate 18 having though- hole patterns for slidably positioning the coaxial cables, second conductive substrates 23, to which second though-hole patterns are formed while being made wider than spaces among each through-hole in the first conductive substrate 18, support sections 19-22 for the coaxial cables 30, which penetrate and support said coaxial cables 30 into respective though-hole and can adjust protruding length from the first conductive substrate 18 of nose probes 14 for the coaxial cables 30 within the range of the stroke length of the expansion and contraction of springs 19 by spring mechanisms, and a coaxial-cable connector 24 group and in which the first and second conductive substrates 18, 23 and conductive materials 16 for the coaxial cables 30 are coupled electrically at the same potential, is mounted.
JP62161332A 1987-06-22 1987-06-30 Inspection device for semiconductor element Pending JPS647632A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP62161332A JPS647632A (en) 1987-06-30 1987-06-30 Inspection device for semiconductor element
US07/209,637 US4931726A (en) 1987-06-22 1988-06-21 Apparatus for testing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62161332A JPS647632A (en) 1987-06-30 1987-06-30 Inspection device for semiconductor element

Publications (1)

Publication Number Publication Date
JPS647632A true JPS647632A (en) 1989-01-11

Family

ID=15733070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62161332A Pending JPS647632A (en) 1987-06-22 1987-06-30 Inspection device for semiconductor element

Country Status (1)

Country Link
JP (1) JPS647632A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS646564U (en) * 1987-07-02 1989-01-13
JPH0845996A (en) * 1994-07-29 1996-02-16 Nec Corp Tester for semiconductor device
CN100387571C (en) * 2005-11-24 2008-05-14 东华大学 Process for synthesizing 2-(4'-amino benzoyl) benzoic acid
WO2011129244A1 (en) * 2010-04-15 2011-10-20 東京エレクトロン株式会社 Contact structure and method for manufacturing contact structure
TWI410637B (en) * 2009-09-17 2013-10-01 Mpi Corp Area array probe card

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6023315A (en) * 1983-06-29 1985-02-05 ピエ−ル−リヒヤ−ル・デイツク Lasting skin drug composition based on essential fatty acids
JPS6257177B2 (en) * 1980-02-05 1987-11-30 Bayer Ag

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6257177B2 (en) * 1980-02-05 1987-11-30 Bayer Ag
JPS6023315A (en) * 1983-06-29 1985-02-05 ピエ−ル−リヒヤ−ル・デイツク Lasting skin drug composition based on essential fatty acids

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS646564U (en) * 1987-07-02 1989-01-13
JPH0845996A (en) * 1994-07-29 1996-02-16 Nec Corp Tester for semiconductor device
CN100387571C (en) * 2005-11-24 2008-05-14 东华大学 Process for synthesizing 2-(4'-amino benzoyl) benzoic acid
TWI410637B (en) * 2009-09-17 2013-10-01 Mpi Corp Area array probe card
WO2011129244A1 (en) * 2010-04-15 2011-10-20 東京エレクトロン株式会社 Contact structure and method for manufacturing contact structure
CN102713643A (en) * 2010-04-15 2012-10-03 东京毅力科创株式会社 Contact structure and method for manufacturing contact structure

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