JPS646564U - - Google Patents
Info
- Publication number
- JPS646564U JPS646564U JP10210487U JP10210487U JPS646564U JP S646564 U JPS646564 U JP S646564U JP 10210487 U JP10210487 U JP 10210487U JP 10210487 U JP10210487 U JP 10210487U JP S646564 U JPS646564 U JP S646564U
- Authority
- JP
- Japan
- Prior art keywords
- coaxial
- measured
- contact probes
- probe card
- connector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 9
- 238000007689 inspection Methods 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10210487U JPS646564U (cs) | 1987-07-02 | 1987-07-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10210487U JPS646564U (cs) | 1987-07-02 | 1987-07-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS646564U true JPS646564U (cs) | 1989-01-13 |
Family
ID=31331701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10210487U Pending JPS646564U (cs) | 1987-07-02 | 1987-07-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS646564U (cs) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56105647A (en) * | 1980-01-25 | 1981-08-22 | Yoshie Hasegawa | Probeboard |
| JPS60220943A (ja) * | 1984-04-17 | 1985-11-05 | Sanyo Electric Co Ltd | 半導体装置の検査方法 |
| JPS6156981A (ja) * | 1984-08-27 | 1986-03-22 | Nec Corp | 半導体検査装置 |
| JPS63122141A (ja) * | 1986-11-12 | 1988-05-26 | Hitachi Ltd | 半導体素子検査装置 |
| JPS647632A (en) * | 1987-06-30 | 1989-01-11 | Hitachi Ltd | Inspection device for semiconductor element |
-
1987
- 1987-07-02 JP JP10210487U patent/JPS646564U/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56105647A (en) * | 1980-01-25 | 1981-08-22 | Yoshie Hasegawa | Probeboard |
| JPS60220943A (ja) * | 1984-04-17 | 1985-11-05 | Sanyo Electric Co Ltd | 半導体装置の検査方法 |
| JPS6156981A (ja) * | 1984-08-27 | 1986-03-22 | Nec Corp | 半導体検査装置 |
| JPS63122141A (ja) * | 1986-11-12 | 1988-05-26 | Hitachi Ltd | 半導体素子検査装置 |
| JPS647632A (en) * | 1987-06-30 | 1989-01-11 | Hitachi Ltd | Inspection device for semiconductor element |
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