JPS64641B2 - - Google Patents

Info

Publication number
JPS64641B2
JPS64641B2 JP89980A JP89980A JPS64641B2 JP S64641 B2 JPS64641 B2 JP S64641B2 JP 89980 A JP89980 A JP 89980A JP 89980 A JP89980 A JP 89980A JP S64641 B2 JPS64641 B2 JP S64641B2
Authority
JP
Japan
Prior art keywords
imaging
light
measurement object
slit
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP89980A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5698601A (en
Inventor
Yoshitada Oshida
Hiroshi Makihira
Yasuo Nakagawa
Nobuyuki Akyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP89980A priority Critical patent/JPS5698601A/ja
Publication of JPS5698601A publication Critical patent/JPS5698601A/ja
Publication of JPS64641B2 publication Critical patent/JPS64641B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP89980A 1980-01-10 1980-01-10 Cubic form detection device Granted JPS5698601A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP89980A JPS5698601A (en) 1980-01-10 1980-01-10 Cubic form detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP89980A JPS5698601A (en) 1980-01-10 1980-01-10 Cubic form detection device

Publications (2)

Publication Number Publication Date
JPS5698601A JPS5698601A (en) 1981-08-08
JPS64641B2 true JPS64641B2 (enExample) 1989-01-09

Family

ID=11486524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP89980A Granted JPS5698601A (en) 1980-01-10 1980-01-10 Cubic form detection device

Country Status (1)

Country Link
JP (1) JPS5698601A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5032943B2 (ja) * 2007-11-06 2012-09-26 パナソニック株式会社 3次元形状計測装置及び3次元形状計測方法

Also Published As

Publication number Publication date
JPS5698601A (en) 1981-08-08

Similar Documents

Publication Publication Date Title
JPH0585845B2 (enExample)
US4183672A (en) Optical inspection system employing spherical mirror
JP4090860B2 (ja) 3次元形状測定装置
KR102655817B1 (ko) 공간 변조 스캔을 이용한 플라잉 오버 빔 패턴 스캐닝 홀로그램 현미경 장치
JPH07335706A (ja) ワイヤの高さ測定装置
US5018803A (en) Three-dimensional volumetric sensor
JPH0666241B2 (ja) 位置検出方法
JPH0329806A (ja) 物体形状測定方法
US4266876A (en) Automatic alignment apparatus
JP3072909B2 (ja) ホログラムの回折効率測定方法およびその装置
JPS64641B2 (enExample)
US4902135A (en) Object movement measuring apparatus
JPH04212120A (ja) 線に沿って面を光学的に走査する走査装置
JPH0156682B2 (enExample)
CN120426905B (zh) 一种微观三维形貌的检测装置
JPH0560529A (ja) 高さ測定装置
JP2673196B2 (ja) 三次元形状センサ
KR20220145585A (ko) 공간 변조 스캐너와 트랜슬레이션 스테이지를 사용한 플라잉 오버 빔 패턴 스캐닝 홀로그램 현미경 장치
JPS61117831A (ja) 焦点合せ装置
JP2949179B2 (ja) 非接触式形状測定装置及び形状測定法
JPS62503049A (ja) 二次元的な対象物を整向、検査及び/または測定するための方法及び装置
JPS6288906A (ja) 立体形状の測定方法
JP2000097633A (ja) マーク位置検出装置およびこれを用いたマーク位置検出方法
JPH1138298A (ja) 光学系調整方法
JP2992075B2 (ja) 光ビームの走査装置