JPS64641B2 - - Google Patents
Info
- Publication number
- JPS64641B2 JPS64641B2 JP89980A JP89980A JPS64641B2 JP S64641 B2 JPS64641 B2 JP S64641B2 JP 89980 A JP89980 A JP 89980A JP 89980 A JP89980 A JP 89980A JP S64641 B2 JPS64641 B2 JP S64641B2
- Authority
- JP
- Japan
- Prior art keywords
- imaging
- light
- measurement object
- slit
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003384 imaging method Methods 0.000 claims description 113
- 230000003287 optical effect Effects 0.000 claims description 57
- 238000005259 measurement Methods 0.000 claims description 39
- 238000000034 method Methods 0.000 claims description 20
- 230000001678 irradiating effect Effects 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP89980A JPS5698601A (en) | 1980-01-10 | 1980-01-10 | Cubic form detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP89980A JPS5698601A (en) | 1980-01-10 | 1980-01-10 | Cubic form detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5698601A JPS5698601A (en) | 1981-08-08 |
| JPS64641B2 true JPS64641B2 (enExample) | 1989-01-09 |
Family
ID=11486524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP89980A Granted JPS5698601A (en) | 1980-01-10 | 1980-01-10 | Cubic form detection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5698601A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5032943B2 (ja) * | 2007-11-06 | 2012-09-26 | パナソニック株式会社 | 3次元形状計測装置及び3次元形状計測方法 |
-
1980
- 1980-01-10 JP JP89980A patent/JPS5698601A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5698601A (en) | 1981-08-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0585845B2 (enExample) | ||
| US4183672A (en) | Optical inspection system employing spherical mirror | |
| JP4090860B2 (ja) | 3次元形状測定装置 | |
| KR102655817B1 (ko) | 공간 변조 스캔을 이용한 플라잉 오버 빔 패턴 스캐닝 홀로그램 현미경 장치 | |
| JPH07335706A (ja) | ワイヤの高さ測定装置 | |
| US5018803A (en) | Three-dimensional volumetric sensor | |
| JPH0666241B2 (ja) | 位置検出方法 | |
| JPH0329806A (ja) | 物体形状測定方法 | |
| US4266876A (en) | Automatic alignment apparatus | |
| JP3072909B2 (ja) | ホログラムの回折効率測定方法およびその装置 | |
| JPS64641B2 (enExample) | ||
| US4902135A (en) | Object movement measuring apparatus | |
| JPH04212120A (ja) | 線に沿って面を光学的に走査する走査装置 | |
| JPH0156682B2 (enExample) | ||
| CN120426905B (zh) | 一种微观三维形貌的检测装置 | |
| JPH0560529A (ja) | 高さ測定装置 | |
| JP2673196B2 (ja) | 三次元形状センサ | |
| KR20220145585A (ko) | 공간 변조 스캐너와 트랜슬레이션 스테이지를 사용한 플라잉 오버 빔 패턴 스캐닝 홀로그램 현미경 장치 | |
| JPS61117831A (ja) | 焦点合せ装置 | |
| JP2949179B2 (ja) | 非接触式形状測定装置及び形状測定法 | |
| JPS62503049A (ja) | 二次元的な対象物を整向、検査及び/または測定するための方法及び装置 | |
| JPS6288906A (ja) | 立体形状の測定方法 | |
| JP2000097633A (ja) | マーク位置検出装置およびこれを用いたマーク位置検出方法 | |
| JPH1138298A (ja) | 光学系調整方法 | |
| JP2992075B2 (ja) | 光ビームの走査装置 |