JPS6462471A - Vapor phase synthesis method for high pressure-phase boron nitride - Google Patents
Vapor phase synthesis method for high pressure-phase boron nitrideInfo
- Publication number
- JPS6462471A JPS6462471A JP21924187A JP21924187A JPS6462471A JP S6462471 A JPS6462471 A JP S6462471A JP 21924187 A JP21924187 A JP 21924187A JP 21924187 A JP21924187 A JP 21924187A JP S6462471 A JPS6462471 A JP S6462471A
- Authority
- JP
- Japan
- Prior art keywords
- high pressure
- boron nitride
- plasma
- substrate
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To obtain high-quality high pressure-phase boron nitride at high film- forming speed, by irradiating a substrate with heat plasma produced from a gaseous raw material containing boron and nitrogen in the form of a plasma jet and then applying rapid cooling to the above. CONSTITUTION:A gaseous raw material containing boron atoms and nitrogen atoms is prepared. This gaseous starting material is introduced through a gas- introducing hole 3, which is formed into heat-plasma state by means of arc discharge due to the inductive coupling of microwaves. Subsequently, this heat plasma is applied in the form of a plasma jet 9 to a substrate 10, followed by rapid cooling, by which vapor growth of high pressure-phase boron nitride can be applied to the substrate 10.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21924187A JPH0814024B2 (en) | 1987-09-03 | 1987-09-03 | High-pressure phase boron nitride vapor phase synthesis method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21924187A JPH0814024B2 (en) | 1987-09-03 | 1987-09-03 | High-pressure phase boron nitride vapor phase synthesis method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6462471A true JPS6462471A (en) | 1989-03-08 |
JPH0814024B2 JPH0814024B2 (en) | 1996-02-14 |
Family
ID=16732426
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21924187A Expired - Lifetime JPH0814024B2 (en) | 1987-09-03 | 1987-09-03 | High-pressure phase boron nitride vapor phase synthesis method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0814024B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02250969A (en) * | 1989-03-24 | 1990-10-08 | Yukio Ichinose | Production of boron nitride |
WO1998051632A1 (en) * | 1997-05-14 | 1998-11-19 | France Telecom | Method for depositing a coating layer on an optical fibre while it is being drawn and device for its implementation |
-
1987
- 1987-09-03 JP JP21924187A patent/JPH0814024B2/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02250969A (en) * | 1989-03-24 | 1990-10-08 | Yukio Ichinose | Production of boron nitride |
WO1998051632A1 (en) * | 1997-05-14 | 1998-11-19 | France Telecom | Method for depositing a coating layer on an optical fibre while it is being drawn and device for its implementation |
FR2763327A1 (en) * | 1997-05-14 | 1998-11-20 | France Telecom | METHOD FOR DEPOSITING A COATING LAYER ON AN OPTICAL FIBER DURING ITS FIBRATION AND DEVICE FOR IMPLEMENTING IT |
Also Published As
Publication number | Publication date |
---|---|
JPH0814024B2 (en) | 1996-02-14 |
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