JPS6457599A - Plasma x-ray source - Google Patents

Plasma x-ray source

Info

Publication number
JPS6457599A
JPS6457599A JP62212810A JP21281087A JPS6457599A JP S6457599 A JPS6457599 A JP S6457599A JP 62212810 A JP62212810 A JP 62212810A JP 21281087 A JP21281087 A JP 21281087A JP S6457599 A JPS6457599 A JP S6457599A
Authority
JP
Japan
Prior art keywords
conductor plates
charges
electrodes
strong
capacitors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62212810A
Other languages
Japanese (ja)
Inventor
Hiroshi Arita
Koji Suzuki
Yukio Kurosawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62212810A priority Critical patent/JPS6457599A/en
Publication of JPS6457599A publication Critical patent/JPS6457599A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
  • Ceramic Capacitors (AREA)

Abstract

PURPOSE:To increase the rising steepness or the discharge current and obtain strong X-ray emission by laminating a bank of capacitors, with multiple ceramic capacitors sandwiched by parallel conductor plates and flat faces of the conductor plates aligned in the nearly vertical direction to the ground. CONSTITUTION:Ceramic capacitors 20 are sandwiched between low-voltage conductor plates 21 and high-voltage conductor plates 22. After the ceramic capacitor 20 is charged, if a discharge switch 4 is turned on, charges of the ceramic capacitor 20 are quickly discharged between electrodes 11, 12. This circuit serves as a distributed constant circuit at this time, charges of the ceramic capacitor 20a at the position with the shortest electric path to a discharge tube reach between the electrodes 11, 12 first, and charges of ceramic capacitors 20b, 20c...20h flow in sequence after the fixed delay time. Since the electric path is practically shortened, the discharge current wave-form with a short rising time is obtained. As a result, the magnetic force necessary to pinch the plasma between the electrodes 11, 12 is strong, the heating temperature is increased, thus a strong X-ray output can be obtained.
JP62212810A 1987-08-28 1987-08-28 Plasma x-ray source Pending JPS6457599A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62212810A JPS6457599A (en) 1987-08-28 1987-08-28 Plasma x-ray source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62212810A JPS6457599A (en) 1987-08-28 1987-08-28 Plasma x-ray source

Publications (1)

Publication Number Publication Date
JPS6457599A true JPS6457599A (en) 1989-03-03

Family

ID=16628740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62212810A Pending JPS6457599A (en) 1987-08-28 1987-08-28 Plasma x-ray source

Country Status (1)

Country Link
JP (1) JPS6457599A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6202293B1 (en) * 2000-01-28 2001-03-20 Visteon Global Technologies, Inc. Work holder assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6202293B1 (en) * 2000-01-28 2001-03-20 Visteon Global Technologies, Inc. Work holder assembly

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