JPS645439U - - Google Patents
Info
- Publication number
- JPS645439U JPS645439U JP9977387U JP9977387U JPS645439U JP S645439 U JPS645439 U JP S645439U JP 9977387 U JP9977387 U JP 9977387U JP 9977387 U JP9977387 U JP 9977387U JP S645439 U JPS645439 U JP S645439U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- semiconductor wafer
- cleaning
- nozzle
- cutout
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims 4
- 239000007921 spray Substances 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987099773U JPH069493Y2 (ja) | 1987-06-29 | 1987-06-29 | 半導体ウエハ−の洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987099773U JPH069493Y2 (ja) | 1987-06-29 | 1987-06-29 | 半導体ウエハ−の洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS645439U true JPS645439U (enExample) | 1989-01-12 |
| JPH069493Y2 JPH069493Y2 (ja) | 1994-03-09 |
Family
ID=31327241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987099773U Expired - Lifetime JPH069493Y2 (ja) | 1987-06-29 | 1987-06-29 | 半導体ウエハ−の洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069493Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6126226A (ja) * | 1984-07-16 | 1986-02-05 | Shioya Seisakusho:Kk | スクラビング装置 |
-
1987
- 1987-06-29 JP JP1987099773U patent/JPH069493Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6126226A (ja) * | 1984-07-16 | 1986-02-05 | Shioya Seisakusho:Kk | スクラビング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069493Y2 (ja) | 1994-03-09 |
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