JPH069493Y2 - 半導体ウエハ−の洗浄装置 - Google Patents

半導体ウエハ−の洗浄装置

Info

Publication number
JPH069493Y2
JPH069493Y2 JP1987099773U JP9977387U JPH069493Y2 JP H069493 Y2 JPH069493 Y2 JP H069493Y2 JP 1987099773 U JP1987099773 U JP 1987099773U JP 9977387 U JP9977387 U JP 9977387U JP H069493 Y2 JPH069493 Y2 JP H069493Y2
Authority
JP
Japan
Prior art keywords
stage
wafer
cleaning
lower stage
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987099773U
Other languages
English (en)
Japanese (ja)
Other versions
JPS645439U (enExample
Inventor
潔 山田
登 仙北屋
達也 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dowa Holdings Co Ltd
Original Assignee
Dowa Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dowa Mining Co Ltd filed Critical Dowa Mining Co Ltd
Priority to JP1987099773U priority Critical patent/JPH069493Y2/ja
Publication of JPS645439U publication Critical patent/JPS645439U/ja
Application granted granted Critical
Publication of JPH069493Y2 publication Critical patent/JPH069493Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1987099773U 1987-06-29 1987-06-29 半導体ウエハ−の洗浄装置 Expired - Lifetime JPH069493Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987099773U JPH069493Y2 (ja) 1987-06-29 1987-06-29 半導体ウエハ−の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987099773U JPH069493Y2 (ja) 1987-06-29 1987-06-29 半導体ウエハ−の洗浄装置

Publications (2)

Publication Number Publication Date
JPS645439U JPS645439U (enExample) 1989-01-12
JPH069493Y2 true JPH069493Y2 (ja) 1994-03-09

Family

ID=31327241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987099773U Expired - Lifetime JPH069493Y2 (ja) 1987-06-29 1987-06-29 半導体ウエハ−の洗浄装置

Country Status (1)

Country Link
JP (1) JPH069493Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6126226A (ja) * 1984-07-16 1986-02-05 Shioya Seisakusho:Kk スクラビング装置

Also Published As

Publication number Publication date
JPS645439U (enExample) 1989-01-12

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