JPS6455835A - Probe device - Google Patents

Probe device

Info

Publication number
JPS6455835A
JPS6455835A JP21361587A JP21361587A JPS6455835A JP S6455835 A JPS6455835 A JP S6455835A JP 21361587 A JP21361587 A JP 21361587A JP 21361587 A JP21361587 A JP 21361587A JP S6455835 A JPS6455835 A JP S6455835A
Authority
JP
Japan
Prior art keywords
base
polisher
piece
card
vacuum sucking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21361587A
Other languages
Japanese (ja)
Other versions
JP2516377B2 (en
Inventor
Yuichi Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP62213615A priority Critical patent/JP2516377B2/en
Publication of JPS6455835A publication Critical patent/JPS6455835A/en
Application granted granted Critical
Publication of JP2516377B2 publication Critical patent/JP2516377B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To effectively sharpen a probe stylus by so providing that the polishing surface of a polisher perpendicularly cross the contacting face of the stylus. CONSTITUTION:After a vacuum sucking base 5 arrives at the lower side of a probe card 2 by a vacuum sucking base moving unit 6, the base 5 is elevationally moved by a vacuum attraction elevational moving unit 7. A polisher 8 for polishing the sidewall 1b of the end 1a of a probe stylus 1 of a probe card 2 is sucked fixedly to the base 5. The polisher 8 has a ceramic polishing piece 8a formed in a trapezoidal sectional and a disk 8b provided in the vacuum sucking direction of the base 5 on the bottom of the piece 8a to obliquely cross the inner wall 1b surrounded by the ends 1a of a plurality of styluses 1 of the card 2. Other polisher 9 has a ceramic polishing piece 8a formed in an inverted trapezoidal sectional recess and a disc 9b provided in the vacuum sucking direction of the base 5 on the bottom of the piece 9a to obliquely cross the outer wall 1c surrounded by the ends 1a of the styluses 1 of the card 2.
JP62213615A 1987-08-27 1987-08-27 Probe device Expired - Lifetime JP2516377B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62213615A JP2516377B2 (en) 1987-08-27 1987-08-27 Probe device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62213615A JP2516377B2 (en) 1987-08-27 1987-08-27 Probe device

Publications (2)

Publication Number Publication Date
JPS6455835A true JPS6455835A (en) 1989-03-02
JP2516377B2 JP2516377B2 (en) 1996-07-24

Family

ID=16642109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62213615A Expired - Lifetime JP2516377B2 (en) 1987-08-27 1987-08-27 Probe device

Country Status (1)

Country Link
JP (1) JP2516377B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5220279A (en) * 1991-06-12 1993-06-15 Tokyo Electron Yamanashi Limited Probe apparatus
US6306187B1 (en) 1997-04-22 2001-10-23 3M Innovative Properties Company Abrasive material for the needle point of a probe card

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5220279A (en) * 1991-06-12 1993-06-15 Tokyo Electron Yamanashi Limited Probe apparatus
US6306187B1 (en) 1997-04-22 2001-10-23 3M Innovative Properties Company Abrasive material for the needle point of a probe card

Also Published As

Publication number Publication date
JP2516377B2 (en) 1996-07-24

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