JPS6455835A - Probe device - Google Patents
Probe deviceInfo
- Publication number
- JPS6455835A JPS6455835A JP21361587A JP21361587A JPS6455835A JP S6455835 A JPS6455835 A JP S6455835A JP 21361587 A JP21361587 A JP 21361587A JP 21361587 A JP21361587 A JP 21361587A JP S6455835 A JPS6455835 A JP S6455835A
- Authority
- JP
- Japan
- Prior art keywords
- base
- polisher
- piece
- card
- vacuum sucking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To effectively sharpen a probe stylus by so providing that the polishing surface of a polisher perpendicularly cross the contacting face of the stylus. CONSTITUTION:After a vacuum sucking base 5 arrives at the lower side of a probe card 2 by a vacuum sucking base moving unit 6, the base 5 is elevationally moved by a vacuum attraction elevational moving unit 7. A polisher 8 for polishing the sidewall 1b of the end 1a of a probe stylus 1 of a probe card 2 is sucked fixedly to the base 5. The polisher 8 has a ceramic polishing piece 8a formed in a trapezoidal sectional and a disk 8b provided in the vacuum sucking direction of the base 5 on the bottom of the piece 8a to obliquely cross the inner wall 1b surrounded by the ends 1a of a plurality of styluses 1 of the card 2. Other polisher 9 has a ceramic polishing piece 8a formed in an inverted trapezoidal sectional recess and a disc 9b provided in the vacuum sucking direction of the base 5 on the bottom of the piece 9a to obliquely cross the outer wall 1c surrounded by the ends 1a of the styluses 1 of the card 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62213615A JP2516377B2 (en) | 1987-08-27 | 1987-08-27 | Probe device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62213615A JP2516377B2 (en) | 1987-08-27 | 1987-08-27 | Probe device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6455835A true JPS6455835A (en) | 1989-03-02 |
JP2516377B2 JP2516377B2 (en) | 1996-07-24 |
Family
ID=16642109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62213615A Expired - Lifetime JP2516377B2 (en) | 1987-08-27 | 1987-08-27 | Probe device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2516377B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5220279A (en) * | 1991-06-12 | 1993-06-15 | Tokyo Electron Yamanashi Limited | Probe apparatus |
US6306187B1 (en) | 1997-04-22 | 2001-10-23 | 3M Innovative Properties Company | Abrasive material for the needle point of a probe card |
-
1987
- 1987-08-27 JP JP62213615A patent/JP2516377B2/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5220279A (en) * | 1991-06-12 | 1993-06-15 | Tokyo Electron Yamanashi Limited | Probe apparatus |
US6306187B1 (en) | 1997-04-22 | 2001-10-23 | 3M Innovative Properties Company | Abrasive material for the needle point of a probe card |
Also Published As
Publication number | Publication date |
---|---|
JP2516377B2 (en) | 1996-07-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080430 Year of fee payment: 12 |