JPS645439U - - Google Patents

Info

Publication number
JPS645439U
JPS645439U JP9977387U JP9977387U JPS645439U JP S645439 U JPS645439 U JP S645439U JP 9977387 U JP9977387 U JP 9977387U JP 9977387 U JP9977387 U JP 9977387U JP S645439 U JPS645439 U JP S645439U
Authority
JP
Japan
Prior art keywords
stage
semiconductor wafer
cleaning
nozzle
cutout
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9977387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH069493Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987099773U priority Critical patent/JPH069493Y2/ja
Publication of JPS645439U publication Critical patent/JPS645439U/ja
Application granted granted Critical
Publication of JPH069493Y2 publication Critical patent/JPH069493Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1987099773U 1987-06-29 1987-06-29 半導体ウエハ−の洗浄装置 Expired - Lifetime JPH069493Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987099773U JPH069493Y2 (ja) 1987-06-29 1987-06-29 半導体ウエハ−の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987099773U JPH069493Y2 (ja) 1987-06-29 1987-06-29 半導体ウエハ−の洗浄装置

Publications (2)

Publication Number Publication Date
JPS645439U true JPS645439U (enrdf_load_stackoverflow) 1989-01-12
JPH069493Y2 JPH069493Y2 (ja) 1994-03-09

Family

ID=31327241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987099773U Expired - Lifetime JPH069493Y2 (ja) 1987-06-29 1987-06-29 半導体ウエハ−の洗浄装置

Country Status (1)

Country Link
JP (1) JPH069493Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6126226A (ja) * 1984-07-16 1986-02-05 Shioya Seisakusho:Kk スクラビング装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6126226A (ja) * 1984-07-16 1986-02-05 Shioya Seisakusho:Kk スクラビング装置

Also Published As

Publication number Publication date
JPH069493Y2 (ja) 1994-03-09

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