JPS63201327U - - Google Patents

Info

Publication number
JPS63201327U
JPS63201327U JP9276387U JP9276387U JPS63201327U JP S63201327 U JPS63201327 U JP S63201327U JP 9276387 U JP9276387 U JP 9276387U JP 9276387 U JP9276387 U JP 9276387U JP S63201327 U JPS63201327 U JP S63201327U
Authority
JP
Japan
Prior art keywords
developing
cup
wafer
spin chuck
pure water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9276387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0539623Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9276387U priority Critical patent/JPH0539623Y2/ja
Publication of JPS63201327U publication Critical patent/JPS63201327U/ja
Application granted granted Critical
Publication of JPH0539623Y2 publication Critical patent/JPH0539623Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP9276387U 1987-06-18 1987-06-18 Expired - Lifetime JPH0539623Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9276387U JPH0539623Y2 (enrdf_load_stackoverflow) 1987-06-18 1987-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9276387U JPH0539623Y2 (enrdf_load_stackoverflow) 1987-06-18 1987-06-18

Publications (2)

Publication Number Publication Date
JPS63201327U true JPS63201327U (enrdf_load_stackoverflow) 1988-12-26
JPH0539623Y2 JPH0539623Y2 (enrdf_load_stackoverflow) 1993-10-07

Family

ID=30954760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9276387U Expired - Lifetime JPH0539623Y2 (enrdf_load_stackoverflow) 1987-06-18 1987-06-18

Country Status (1)

Country Link
JP (1) JPH0539623Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0539623Y2 (enrdf_load_stackoverflow) 1993-10-07

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