JPS6151733U - - Google Patents

Info

Publication number
JPS6151733U
JPS6151733U JP13748684U JP13748684U JPS6151733U JP S6151733 U JPS6151733 U JP S6151733U JP 13748684 U JP13748684 U JP 13748684U JP 13748684 U JP13748684 U JP 13748684U JP S6151733 U JPS6151733 U JP S6151733U
Authority
JP
Japan
Prior art keywords
outlet
rotary table
drive motor
inner container
outer container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13748684U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6350847Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13748684U priority Critical patent/JPS6350847Y2/ja
Publication of JPS6151733U publication Critical patent/JPS6151733U/ja
Application granted granted Critical
Publication of JPS6350847Y2 publication Critical patent/JPS6350847Y2/ja
Expired legal-status Critical Current

Links

JP13748684U 1984-09-10 1984-09-10 Expired JPS6350847Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13748684U JPS6350847Y2 (enrdf_load_stackoverflow) 1984-09-10 1984-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13748684U JPS6350847Y2 (enrdf_load_stackoverflow) 1984-09-10 1984-09-10

Publications (2)

Publication Number Publication Date
JPS6151733U true JPS6151733U (enrdf_load_stackoverflow) 1986-04-07
JPS6350847Y2 JPS6350847Y2 (enrdf_load_stackoverflow) 1988-12-27

Family

ID=30695901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13748684U Expired JPS6350847Y2 (enrdf_load_stackoverflow) 1984-09-10 1984-09-10

Country Status (1)

Country Link
JP (1) JPS6350847Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01228129A (ja) * 1988-03-09 1989-09-12 Tokyo Electron Ltd 液処理方法
JP2002329705A (ja) * 2001-04-26 2002-11-15 Shibaura Mechatronics Corp スピン処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01228129A (ja) * 1988-03-09 1989-09-12 Tokyo Electron Ltd 液処理方法
JP2002329705A (ja) * 2001-04-26 2002-11-15 Shibaura Mechatronics Corp スピン処理装置

Also Published As

Publication number Publication date
JPS6350847Y2 (enrdf_load_stackoverflow) 1988-12-27

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