JPS6453075A - Vacuum exhaust device - Google Patents

Vacuum exhaust device

Info

Publication number
JPS6453075A
JPS6453075A JP20814787A JP20814787A JPS6453075A JP S6453075 A JPS6453075 A JP S6453075A JP 20814787 A JP20814787 A JP 20814787A JP 20814787 A JP20814787 A JP 20814787A JP S6453075 A JPS6453075 A JP S6453075A
Authority
JP
Japan
Prior art keywords
exhaust gas
heater
exhaust
piping
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20814787A
Other languages
Japanese (ja)
Inventor
Kimio Muramatsu
Keiji Ueyama
Kazuaki Fujiwara
Kaichiro Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Renesas Eastern Japan Semiconductor Inc
Original Assignee
Hitachi Tokyo Electronics Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tokyo Electronics Co Ltd, Hitachi Ltd filed Critical Hitachi Tokyo Electronics Co Ltd
Priority to JP20814787A priority Critical patent/JPS6453075A/en
Publication of JPS6453075A publication Critical patent/JPS6453075A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE:To properly clean exhaust gas by installing a heater for heating the exhaust gas into a piping connected to the exhaust port of an oil-free vacuum pump and installing a gas cooling trap in the posterior stage of the heater. CONSTITUTION:A vacuum exhaust device is used as a dry etching device in the production process for a semiconductor device. A heater 33 is installed into a piping 52 connected to the exhaust port 21B of an oil-free vacuum pump 20 so that exhaust gas is heated. A gas cooling trap 34 is installed in the posterior stage of the heater 33. Thus, the adhesion of the reaction products in the exhaust gas onto the piping can be prevented. Further, the exhaust gas can be properly cleaned by allowing the collection action of a scrubber to be effectively developed.
JP20814787A 1987-08-24 1987-08-24 Vacuum exhaust device Pending JPS6453075A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20814787A JPS6453075A (en) 1987-08-24 1987-08-24 Vacuum exhaust device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20814787A JPS6453075A (en) 1987-08-24 1987-08-24 Vacuum exhaust device

Publications (1)

Publication Number Publication Date
JPS6453075A true JPS6453075A (en) 1989-03-01

Family

ID=16551415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20814787A Pending JPS6453075A (en) 1987-08-24 1987-08-24 Vacuum exhaust device

Country Status (1)

Country Link
JP (1) JPS6453075A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0480595U (en) * 1990-11-24 1992-07-14
JPH051222U (en) * 1991-06-21 1993-01-08 山形日本電気株式会社 Heat treatment equipment
US5819683A (en) * 1995-05-02 1998-10-13 Tokyo Electron Limited Trap apparatus
JP2007099327A (en) * 2005-10-03 2007-04-19 Suzu Pack Co Ltd Food packaging item
JP2007261675A (en) * 2006-03-30 2007-10-11 Orihiro Kk Easily unsealable bag
JPWO2006038700A1 (en) * 2004-10-04 2008-05-15 キョーラク株式会社 Filled package
JP2014227968A (en) * 2013-05-24 2014-12-08 株式会社荏原製作所 Vacuum pump with detoxification function
KR20190042436A (en) * 2017-10-16 2019-04-24 아사히 가세이 가부시키가이샤 Cylindrical packaging body

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0480595U (en) * 1990-11-24 1992-07-14
JPH051222U (en) * 1991-06-21 1993-01-08 山形日本電気株式会社 Heat treatment equipment
US5819683A (en) * 1995-05-02 1998-10-13 Tokyo Electron Limited Trap apparatus
JPWO2006038700A1 (en) * 2004-10-04 2008-05-15 キョーラク株式会社 Filled package
US8142078B2 (en) 2004-10-04 2012-03-27 Kyoraku Co., Ltd. Material-filled package
JP4937754B2 (en) * 2004-10-04 2012-05-23 キョーラク株式会社 Filled package and manufacturing method thereof
JP2007099327A (en) * 2005-10-03 2007-04-19 Suzu Pack Co Ltd Food packaging item
JP2007261675A (en) * 2006-03-30 2007-10-11 Orihiro Kk Easily unsealable bag
JP2014227968A (en) * 2013-05-24 2014-12-08 株式会社荏原製作所 Vacuum pump with detoxification function
US10143964B2 (en) 2013-05-24 2018-12-04 Ebara Corporation Vacuum pump with abatement function
KR20190042436A (en) * 2017-10-16 2019-04-24 아사히 가세이 가부시키가이샤 Cylindrical packaging body

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