JPS6453075A - Vacuum exhaust device - Google Patents
Vacuum exhaust deviceInfo
- Publication number
- JPS6453075A JPS6453075A JP20814787A JP20814787A JPS6453075A JP S6453075 A JPS6453075 A JP S6453075A JP 20814787 A JP20814787 A JP 20814787A JP 20814787 A JP20814787 A JP 20814787A JP S6453075 A JPS6453075 A JP S6453075A
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- heater
- exhaust
- piping
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE:To properly clean exhaust gas by installing a heater for heating the exhaust gas into a piping connected to the exhaust port of an oil-free vacuum pump and installing a gas cooling trap in the posterior stage of the heater. CONSTITUTION:A vacuum exhaust device is used as a dry etching device in the production process for a semiconductor device. A heater 33 is installed into a piping 52 connected to the exhaust port 21B of an oil-free vacuum pump 20 so that exhaust gas is heated. A gas cooling trap 34 is installed in the posterior stage of the heater 33. Thus, the adhesion of the reaction products in the exhaust gas onto the piping can be prevented. Further, the exhaust gas can be properly cleaned by allowing the collection action of a scrubber to be effectively developed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20814787A JPS6453075A (en) | 1987-08-24 | 1987-08-24 | Vacuum exhaust device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20814787A JPS6453075A (en) | 1987-08-24 | 1987-08-24 | Vacuum exhaust device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6453075A true JPS6453075A (en) | 1989-03-01 |
Family
ID=16551415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20814787A Pending JPS6453075A (en) | 1987-08-24 | 1987-08-24 | Vacuum exhaust device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6453075A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0480595U (en) * | 1990-11-24 | 1992-07-14 | ||
JPH051222U (en) * | 1991-06-21 | 1993-01-08 | 山形日本電気株式会社 | Heat treatment equipment |
US5819683A (en) * | 1995-05-02 | 1998-10-13 | Tokyo Electron Limited | Trap apparatus |
JP2007099327A (en) * | 2005-10-03 | 2007-04-19 | Suzu Pack Co Ltd | Food packaging item |
JP2007261675A (en) * | 2006-03-30 | 2007-10-11 | Orihiro Kk | Easily unsealable bag |
JPWO2006038700A1 (en) * | 2004-10-04 | 2008-05-15 | キョーラク株式会社 | Filled package |
JP2014227968A (en) * | 2013-05-24 | 2014-12-08 | 株式会社荏原製作所 | Vacuum pump with detoxification function |
KR20190042436A (en) * | 2017-10-16 | 2019-04-24 | 아사히 가세이 가부시키가이샤 | Cylindrical packaging body |
-
1987
- 1987-08-24 JP JP20814787A patent/JPS6453075A/en active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0480595U (en) * | 1990-11-24 | 1992-07-14 | ||
JPH051222U (en) * | 1991-06-21 | 1993-01-08 | 山形日本電気株式会社 | Heat treatment equipment |
US5819683A (en) * | 1995-05-02 | 1998-10-13 | Tokyo Electron Limited | Trap apparatus |
JPWO2006038700A1 (en) * | 2004-10-04 | 2008-05-15 | キョーラク株式会社 | Filled package |
US8142078B2 (en) | 2004-10-04 | 2012-03-27 | Kyoraku Co., Ltd. | Material-filled package |
JP4937754B2 (en) * | 2004-10-04 | 2012-05-23 | キョーラク株式会社 | Filled package and manufacturing method thereof |
JP2007099327A (en) * | 2005-10-03 | 2007-04-19 | Suzu Pack Co Ltd | Food packaging item |
JP2007261675A (en) * | 2006-03-30 | 2007-10-11 | Orihiro Kk | Easily unsealable bag |
JP2014227968A (en) * | 2013-05-24 | 2014-12-08 | 株式会社荏原製作所 | Vacuum pump with detoxification function |
US10143964B2 (en) | 2013-05-24 | 2018-12-04 | Ebara Corporation | Vacuum pump with abatement function |
KR20190042436A (en) * | 2017-10-16 | 2019-04-24 | 아사히 가세이 가부시키가이샤 | Cylindrical packaging body |
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