JPS6452237A - Manufacture of stamper - Google Patents

Manufacture of stamper

Info

Publication number
JPS6452237A
JPS6452237A JP20950387A JP20950387A JPS6452237A JP S6452237 A JPS6452237 A JP S6452237A JP 20950387 A JP20950387 A JP 20950387A JP 20950387 A JP20950387 A JP 20950387A JP S6452237 A JPS6452237 A JP S6452237A
Authority
JP
Japan
Prior art keywords
central hole
developing
stamper
plane
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20950387A
Other languages
Japanese (ja)
Inventor
Kiyofusa Toshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP20950387A priority Critical patent/JPS6452237A/en
Publication of JPS6452237A publication Critical patent/JPS6452237A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To prevent a spot part with low pit height from being generated and to provide a stamper with a low error rate, by covering a central hole by providing thin films at both sides of a resist irregular plane of a central hole part on a glass master disk at the time of developing and cleaning by demineralized water after developing. CONSTITUTION:In the manufacturing method of the stamper provided with a process to form the irregularity of a resist by applying the resist 2 on the glass master disk 1 having the central hole and performing the developing after exposure by a laser beam, thin film sheets 6 are provided at the both sides of the resist irregular plane of the central hole part on the master disk after applying a cutting process by the laser beam. In such a state, by performing the developing and rotating the disk at high speed after applying cleaning by the demineralized water, water on a pit plane is shaked off, and also, the spout of a developer and cleaning liquid from the central hole part to the pit plane can be prevented. Therefore, it is possible to prevent a spot from being formed on the pit plane and to provide the stamper with the low error rate.
JP20950387A 1987-08-24 1987-08-24 Manufacture of stamper Pending JPS6452237A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20950387A JPS6452237A (en) 1987-08-24 1987-08-24 Manufacture of stamper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20950387A JPS6452237A (en) 1987-08-24 1987-08-24 Manufacture of stamper

Publications (1)

Publication Number Publication Date
JPS6452237A true JPS6452237A (en) 1989-02-28

Family

ID=16573881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20950387A Pending JPS6452237A (en) 1987-08-24 1987-08-24 Manufacture of stamper

Country Status (1)

Country Link
JP (1) JPS6452237A (en)

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