JPS6451625A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6451625A JPS6451625A JP20830487A JP20830487A JPS6451625A JP S6451625 A JPS6451625 A JP S6451625A JP 20830487 A JP20830487 A JP 20830487A JP 20830487 A JP20830487 A JP 20830487A JP S6451625 A JPS6451625 A JP S6451625A
- Authority
- JP
- Japan
- Prior art keywords
- sio2
- layer
- passivation film
- hexamethyldisilazane
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20830487A JPS6451625A (en) | 1987-08-24 | 1987-08-24 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20830487A JPS6451625A (en) | 1987-08-24 | 1987-08-24 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6451625A true JPS6451625A (en) | 1989-02-27 |
Family
ID=16554035
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20830487A Pending JPS6451625A (en) | 1987-08-24 | 1987-08-24 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6451625A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5488015A (en) * | 1994-05-20 | 1996-01-30 | Texas Instruments Incorporated | Method of making an interconnect structure with an integrated low density dielectric |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5433669A (en) * | 1977-08-20 | 1979-03-12 | Fuji Electric Co Ltd | Surface stabilizing process for semiconductor device |
-
1987
- 1987-08-24 JP JP20830487A patent/JPS6451625A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5433669A (en) * | 1977-08-20 | 1979-03-12 | Fuji Electric Co Ltd | Surface stabilizing process for semiconductor device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5488015A (en) * | 1994-05-20 | 1996-01-30 | Texas Instruments Incorporated | Method of making an interconnect structure with an integrated low density dielectric |
US5747880A (en) * | 1994-05-20 | 1998-05-05 | Texas Instruments Incorporated | Interconnect structure with an integrated low density dielectric |
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