JPS5465488A - Semiconductor integrated circuit - Google Patents
Semiconductor integrated circuitInfo
- Publication number
- JPS5465488A JPS5465488A JP13193377A JP13193377A JPS5465488A JP S5465488 A JPS5465488 A JP S5465488A JP 13193377 A JP13193377 A JP 13193377A JP 13193377 A JP13193377 A JP 13193377A JP S5465488 A JPS5465488 A JP S5465488A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- detector
- circuit
- constitution
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: To manufacture a miniature gas detector by forming the gas detector element on one surface of the IC circuit and then covering the IC surface with a protective film.
CONSTITUTION: Element region 8 is formed on semiconductor substrate 7 with insulation coating 9, and then the wiring and junction pad 10 are provided with protective film 11 formed on the surface. Thin film 12 and 11 are formed with ZnO or SnO2 for gas detection used as the fundamental compositions. Film 12 absorbs the inflammable gas and the poisonous gas to change the electric conduction degree, thus the gas leakage being detected. In this constitution, the gas detector element, the detector circuit and the alarm circuit can be unified. Accordingly, the size of the detector can be minimized.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13193377A JPS5465488A (en) | 1977-11-02 | 1977-11-02 | Semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13193377A JPS5465488A (en) | 1977-11-02 | 1977-11-02 | Semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5465488A true JPS5465488A (en) | 1979-05-26 |
Family
ID=15069598
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13193377A Pending JPS5465488A (en) | 1977-11-02 | 1977-11-02 | Semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5465488A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0348754U (en) * | 1989-09-20 | 1991-05-10 |
-
1977
- 1977-11-02 JP JP13193377A patent/JPS5465488A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0348754U (en) * | 1989-09-20 | 1991-05-10 |
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