JPS5465488A - Semiconductor integrated circuit - Google Patents

Semiconductor integrated circuit

Info

Publication number
JPS5465488A
JPS5465488A JP13193377A JP13193377A JPS5465488A JP S5465488 A JPS5465488 A JP S5465488A JP 13193377 A JP13193377 A JP 13193377A JP 13193377 A JP13193377 A JP 13193377A JP S5465488 A JPS5465488 A JP S5465488A
Authority
JP
Japan
Prior art keywords
gas
detector
circuit
constitution
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13193377A
Other languages
Japanese (ja)
Inventor
Koichi Oguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP13193377A priority Critical patent/JPS5465488A/en
Publication of JPS5465488A publication Critical patent/JPS5465488A/en
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: To manufacture a miniature gas detector by forming the gas detector element on one surface of the IC circuit and then covering the IC surface with a protective film.
CONSTITUTION: Element region 8 is formed on semiconductor substrate 7 with insulation coating 9, and then the wiring and junction pad 10 are provided with protective film 11 formed on the surface. Thin film 12 and 11 are formed with ZnO or SnO2 for gas detection used as the fundamental compositions. Film 12 absorbs the inflammable gas and the poisonous gas to change the electric conduction degree, thus the gas leakage being detected. In this constitution, the gas detector element, the detector circuit and the alarm circuit can be unified. Accordingly, the size of the detector can be minimized.
COPYRIGHT: (C)1979,JPO&Japio
JP13193377A 1977-11-02 1977-11-02 Semiconductor integrated circuit Pending JPS5465488A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13193377A JPS5465488A (en) 1977-11-02 1977-11-02 Semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13193377A JPS5465488A (en) 1977-11-02 1977-11-02 Semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS5465488A true JPS5465488A (en) 1979-05-26

Family

ID=15069598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13193377A Pending JPS5465488A (en) 1977-11-02 1977-11-02 Semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5465488A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0348754U (en) * 1989-09-20 1991-05-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0348754U (en) * 1989-09-20 1991-05-10

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