JPS6450932A - Minute-scratch hardness measuring machine - Google Patents
Minute-scratch hardness measuring machineInfo
- Publication number
- JPS6450932A JPS6450932A JP20870987A JP20870987A JPS6450932A JP S6450932 A JPS6450932 A JP S6450932A JP 20870987 A JP20870987 A JP 20870987A JP 20870987 A JP20870987 A JP 20870987A JP S6450932 A JPS6450932 A JP S6450932A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- probe
- driving device
- parallel
- presser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
PURPOSE:To continuously measure the scratch hardness of a sample thin film with high accuracy, by pressing a presser into the sample by a presser driving device and then moving the presser driving device in parallel to the surface of the sample. CONSTITUTION:After a sample 1 is placed onto a receiver plate 3 of an electronic scale 2, a diamond probe 4 is moved closer to the surface of the sample 1 by a piezoelectric actuator 5. When the probe 4 is in touch with the surface of the sample 1 and the load is detected, at that time, the probe 4 is stopped moving. Thereafter, the probe 4 is moved parallel with the surface of the sample by a parallel driving device 6. Simultaneously with this, the actuator 5 is driven by a personal computer 10 to continuously add the load to the probe 4. And the light passing through an optical fiber 9 from a light reflection type displacement measuring device 8 is reflected onto a mirror 7, so that the depth of a scratch on the surface of the sample is measured with high accuracy by the measuring device 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20870987A JPS6450932A (en) | 1987-08-21 | 1987-08-21 | Minute-scratch hardness measuring machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20870987A JPS6450932A (en) | 1987-08-21 | 1987-08-21 | Minute-scratch hardness measuring machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6450932A true JPS6450932A (en) | 1989-02-27 |
Family
ID=16560781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20870987A Pending JPS6450932A (en) | 1987-08-21 | 1987-08-21 | Minute-scratch hardness measuring machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6450932A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104897495A (en) * | 2015-06-17 | 2015-09-09 | 上海工程技术大学 | Scratch hardness test method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5728358A (en) * | 1980-07-29 | 1982-02-16 | Nec Kyushu Ltd | Semiconductor device |
| JPS6091237A (en) * | 1983-10-26 | 1985-05-22 | Hitachi Ltd | Method and apparatus for hardness test of thin film |
| JPS61193047A (en) * | 1985-02-22 | 1986-08-27 | Nec Corp | Microhardness measuring instrument |
-
1987
- 1987-08-21 JP JP20870987A patent/JPS6450932A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5728358A (en) * | 1980-07-29 | 1982-02-16 | Nec Kyushu Ltd | Semiconductor device |
| JPS6091237A (en) * | 1983-10-26 | 1985-05-22 | Hitachi Ltd | Method and apparatus for hardness test of thin film |
| JPS61193047A (en) * | 1985-02-22 | 1986-08-27 | Nec Corp | Microhardness measuring instrument |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104897495A (en) * | 2015-06-17 | 2015-09-09 | 上海工程技术大学 | Scratch hardness test method |
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