JPS6450478A - Semiconductor photodetector - Google Patents
Semiconductor photodetectorInfo
- Publication number
- JPS6450478A JPS6450478A JP62207513A JP20751387A JPS6450478A JP S6450478 A JPS6450478 A JP S6450478A JP 62207513 A JP62207513 A JP 62207513A JP 20751387 A JP20751387 A JP 20751387A JP S6450478 A JPS6450478 A JP S6450478A
- Authority
- JP
- Japan
- Prior art keywords
- photodetector
- substrate
- except
- type semiconductor
- conductivity type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Light Receiving Elements (AREA)
Abstract
PURPOSE:To effectively shield light and to prevent an S/N ratio from deteriorating, by depositing a metal material layer through an oxide film on a reference face except a photodetector part in one conductivity type semiconductor substrate. CONSTITUTION:An oxide film 3 is provided on one conductivity type semiconductor substrate 2, the film 3 at a photodetector forming position on the reference face 2a of the substrate 2 is removed, a reverse conductivity type semiconductor layer 4 is diffused to form a photodetector part 5 on the exposed reference face of the substrate 2. In this case, a metal material layer 7 is deposited through the film 3 on the face 2a except the photodetector part 5 on the substrate 2, a light incidence is completely prevented on the part 6 except the photodetector to suppress a photoelectric effect on the part 6. Thus, it can prevent S/N ratio from deteriorating due to external scattered light.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62207513A JPS6450478A (en) | 1987-08-20 | 1987-08-20 | Semiconductor photodetector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62207513A JPS6450478A (en) | 1987-08-20 | 1987-08-20 | Semiconductor photodetector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6450478A true JPS6450478A (en) | 1989-02-27 |
Family
ID=16540964
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62207513A Pending JPS6450478A (en) | 1987-08-20 | 1987-08-20 | Semiconductor photodetector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6450478A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62152163A (en) * | 1985-12-25 | 1987-07-07 | Res Dev Corp Of Japan | Planar type photoelectric conversion device |
-
1987
- 1987-08-20 JP JP62207513A patent/JPS6450478A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62152163A (en) * | 1985-12-25 | 1987-07-07 | Res Dev Corp Of Japan | Planar type photoelectric conversion device |
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