JPS645033U - - Google Patents

Info

Publication number
JPS645033U
JPS645033U JP9966187U JP9966187U JPS645033U JP S645033 U JPS645033 U JP S645033U JP 9966187 U JP9966187 U JP 9966187U JP 9966187 U JP9966187 U JP 9966187U JP S645033 U JPS645033 U JP S645033U
Authority
JP
Japan
Prior art keywords
clean room
air
air conditioner
bypass pipe
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9966187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354340Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9966187U priority Critical patent/JPH0354340Y2/ja
Publication of JPS645033U publication Critical patent/JPS645033U/ja
Application granted granted Critical
Publication of JPH0354340Y2 publication Critical patent/JPH0354340Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Central Air Conditioning (AREA)
  • Ventilation (AREA)
JP9966187U 1987-06-29 1987-06-29 Expired JPH0354340Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9966187U JPH0354340Y2 (enExample) 1987-06-29 1987-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9966187U JPH0354340Y2 (enExample) 1987-06-29 1987-06-29

Publications (2)

Publication Number Publication Date
JPS645033U true JPS645033U (enExample) 1989-01-12
JPH0354340Y2 JPH0354340Y2 (enExample) 1991-11-29

Family

ID=31327028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9966187U Expired JPH0354340Y2 (enExample) 1987-06-29 1987-06-29

Country Status (1)

Country Link
JP (1) JPH0354340Y2 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498024A (ja) * 1990-08-16 1992-03-30 Takenaka Komuten Co Ltd 空調装置
WO2007043658A1 (ja) * 2005-10-13 2007-04-19 Daikin Industries, Ltd. 滅菌システム
WO2007043655A1 (ja) * 2005-10-13 2007-04-19 Daikin Industries, Ltd. 滅菌装置
WO2018225298A1 (ja) * 2017-06-06 2018-12-13 株式会社日立産機システム ファンフィルタユニット、無菌装置およびクリーンルーム

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4529259B2 (ja) * 2000-09-04 2010-08-25 澁谷工業株式会社 アイソレータ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498024A (ja) * 1990-08-16 1992-03-30 Takenaka Komuten Co Ltd 空調装置
WO2007043658A1 (ja) * 2005-10-13 2007-04-19 Daikin Industries, Ltd. 滅菌システム
WO2007043655A1 (ja) * 2005-10-13 2007-04-19 Daikin Industries, Ltd. 滅菌装置
JP2007130404A (ja) * 2005-10-13 2007-05-31 Daikin Ind Ltd 滅菌システム
WO2018225298A1 (ja) * 2017-06-06 2018-12-13 株式会社日立産機システム ファンフィルタユニット、無菌装置およびクリーンルーム
JP2018204881A (ja) * 2017-06-06 2018-12-27 株式会社日立産機システム ファンフィルタユニット、無菌装置およびクリーンルーム
US11112143B2 (en) 2017-06-06 2021-09-07 Hitachi Industrial Equipment Systems Co., Ltd. Fan filter unit, sterilization apparatus and clean room

Also Published As

Publication number Publication date
JPH0354340Y2 (enExample) 1991-11-29

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