JPS6448442A - Shifter for semiconductor wafer - Google Patents

Shifter for semiconductor wafer

Info

Publication number
JPS6448442A
JPS6448442A JP20538287A JP20538287A JPS6448442A JP S6448442 A JPS6448442 A JP S6448442A JP 20538287 A JP20538287 A JP 20538287A JP 20538287 A JP20538287 A JP 20538287A JP S6448442 A JPS6448442 A JP S6448442A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
wafers
time
spaces
carrier
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20538287A
Inventor
Nobuaki Shigematsu
Original Assignee
Texas Instruments Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE:To treat semiconductor wafers under ideal conditions, and to improve quality by providing a space changing means changing the spaces of a plurality of semiconductor wafers at the time of proceeding and the time of returning to a holding means of a semiconductor-wafer support means. CONSTITUTION:When a plurality of semiconductor wafers are shifted between a first base section (a 'Teflon(R)' carrier) 28 and a second base section (a quartz carrier) 29, a lever 7 is turned, and the spaces of the wafers 30 are altered by a pitch changer 2 at the time of lifting and the time of lowering of a wafer supporter 1. Con sequently, a large number of the wafers 30 are varied to desired spaces at a stroke and can be shifted between the 'Teflon(R)' carrier 28 and the quartz carrier 29. Accordingly, the wafers 30 can be treated at spaces proper for CVD treatment, thus improving the quality of the wafers 30, then quickly shifting the wafers.
JP20538287A 1987-08-19 1987-08-19 Shifter for semiconductor wafer Pending JPS6448442A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20538287A JPS6448442A (en) 1987-08-19 1987-08-19 Shifter for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20538287A JPS6448442A (en) 1987-08-19 1987-08-19 Shifter for semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS6448442A true true JPS6448442A (en) 1989-02-22

Family

ID=16505900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20538287A Pending JPS6448442A (en) 1987-08-19 1987-08-19 Shifter for semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS6448442A (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5374153A (en) * 1990-11-17 1994-12-20 Tokyo Electron Limited Transfer apparatus
JPH072308A (en) * 1993-03-26 1995-01-06 Dainippon Screen Mfg Co Ltd Alignment pitch changing device for substrate
US5501568A (en) * 1993-07-01 1996-03-26 Mitsubishi Denki Kabushiki Kaisha Wafer aligning apparatus
US5505577A (en) * 1990-11-17 1996-04-09 Tokyo Electron Limited Transfer apparatus
US5639203A (en) * 1994-06-03 1997-06-17 Lg Semicon Co., Ltd. Semiconductor device transfer apparatus
US5658123A (en) * 1995-09-15 1997-08-19 Advanced Micro Devices, Inc. Container-less transfer of semiconductor wafers through a barrier between fabrication areas
US5660517A (en) * 1994-04-28 1997-08-26 Semitool, Inc. Semiconductor processing system with wafer container docking and loading station
US5735662A (en) * 1996-05-14 1998-04-07 Micron Technology, Inc. Adjustable wafer transfer machine
US5836736A (en) * 1994-04-28 1998-11-17 Semitool, Inc. Semiconductor processing system with wafer container docking and loading station
US6157866A (en) * 1997-06-19 2000-12-05 Advanced Micro Devices, Inc. Automated material handling system for a manufacturing facility divided into separate fabrication areas
US6203582B1 (en) 1996-07-15 2001-03-20 Semitool, Inc. Modular semiconductor workpiece processing tool
US6645355B2 (en) 1996-07-15 2003-11-11 Semitool, Inc. Semiconductor processing apparatus having lift and tilt mechanism
US6654122B1 (en) 1996-07-15 2003-11-25 Semitool, Inc. Semiconductor processing apparatus having lift and tilt mechanism
US6672820B1 (en) 1996-07-15 2004-01-06 Semitool, Inc. Semiconductor processing apparatus having linear conveyer system
US6833035B1 (en) 1994-04-28 2004-12-21 Semitool, Inc. Semiconductor processing system with wafer container docking and loading station
US7080652B2 (en) 1994-04-28 2006-07-25 Semitool, Inc. Automated semiconductor processing systems

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5374153A (en) * 1990-11-17 1994-12-20 Tokyo Electron Limited Transfer apparatus
US5505577A (en) * 1990-11-17 1996-04-09 Tokyo Electron Limited Transfer apparatus
US5620295A (en) * 1990-11-17 1997-04-15 Tokyo Electron Limited Transfer apparatus
JPH072308A (en) * 1993-03-26 1995-01-06 Dainippon Screen Mfg Co Ltd Alignment pitch changing device for substrate
US5501568A (en) * 1993-07-01 1996-03-26 Mitsubishi Denki Kabushiki Kaisha Wafer aligning apparatus
US6833035B1 (en) 1994-04-28 2004-12-21 Semitool, Inc. Semiconductor processing system with wafer container docking and loading station
US6960257B2 (en) 1994-04-28 2005-11-01 Semitool, Inc. Semiconductor processing system with wafer container docking and loading station
US5660517A (en) * 1994-04-28 1997-08-26 Semitool, Inc. Semiconductor processing system with wafer container docking and loading station
US7080652B2 (en) 1994-04-28 2006-07-25 Semitool, Inc. Automated semiconductor processing systems
US5836736A (en) * 1994-04-28 1998-11-17 Semitool, Inc. Semiconductor processing system with wafer container docking and loading station
US5639203A (en) * 1994-06-03 1997-06-17 Lg Semicon Co., Ltd. Semiconductor device transfer apparatus
US5658123A (en) * 1995-09-15 1997-08-19 Advanced Micro Devices, Inc. Container-less transfer of semiconductor wafers through a barrier between fabrication areas
US5735662A (en) * 1996-05-14 1998-04-07 Micron Technology, Inc. Adjustable wafer transfer machine
US6543982B1 (en) * 1996-05-14 2003-04-08 Micron Technology, Inc. Adjustable wafer transfer machine
US6203582B1 (en) 1996-07-15 2001-03-20 Semitool, Inc. Modular semiconductor workpiece processing tool
US6654122B1 (en) 1996-07-15 2003-11-25 Semitool, Inc. Semiconductor processing apparatus having lift and tilt mechanism
US6672820B1 (en) 1996-07-15 2004-01-06 Semitool, Inc. Semiconductor processing apparatus having linear conveyer system
US6645355B2 (en) 1996-07-15 2003-11-11 Semitool, Inc. Semiconductor processing apparatus having lift and tilt mechanism
US6440178B2 (en) 1996-07-15 2002-08-27 Semitool, Inc. Modular semiconductor workpiece processing tool
US7002698B2 (en) 1996-07-15 2006-02-21 Semitool, Inc. Semiconductor processing apparatus having lift and tilt mechanism
US7074246B2 (en) * 1996-07-15 2006-07-11 Semitool, Inc. Modular semiconductor workpiece processing tool
US6157866A (en) * 1997-06-19 2000-12-05 Advanced Micro Devices, Inc. Automated material handling system for a manufacturing facility divided into separate fabrication areas
US7092779B1 (en) 1997-06-19 2006-08-15 Conboy Michael R Automated material handling system for a manufacturing facility divided into separate fabrication areas

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