JPS6447960A - Method and apparatus for measuring resistivity - Google Patents
Method and apparatus for measuring resistivityInfo
- Publication number
- JPS6447960A JPS6447960A JP62204085A JP20408587A JPS6447960A JP S6447960 A JPS6447960 A JP S6447960A JP 62204085 A JP62204085 A JP 62204085A JP 20408587 A JP20408587 A JP 20408587A JP S6447960 A JPS6447960 A JP S6447960A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- correction factor
- sample
- potential
- resistance value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To enable measurement of a correct resistance value of a sample, by determining a correction factor considering the shape, thickness and measuring position and the like of a sample. CONSTITUTION:Current I flows between external probes 11 and 14 to determine a potential difference V between probes 12 and 13. Potential phi generated in the perimeter of the probe 11 at an inlet of the current I and the probe 14 at an outlet thereof is equal to a potential generated by an electric charge. Then, when the width (a) and the length (b) of the sample, the thickness (t) thereof and coordinates (x0, y0) of the center 15 of the probe are inputted, coordinates of points A-D are determined based on an interval S of the probe. Moreover, an inverse of a correction factor of a rectangular sample is determined to obtain a correction factor from the results. Thus, a resistance value is calculated from the current value I and the potential value phi to be multiplied by the correction factor thereby enabling measurement of a correct surface resistance value.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62204085A JP2833623B2 (en) | 1987-08-19 | 1987-08-19 | Method and apparatus for measuring resistivity |
US07/209,988 US4989154A (en) | 1987-07-13 | 1988-06-22 | Method of measuring resistivity, and apparatus therefor |
KR1019880007741A KR960006868B1 (en) | 1987-07-13 | 1988-06-25 | Method of measuring resistivity, and the apparatus therefor |
DE3851587T DE3851587T2 (en) | 1987-07-13 | 1988-07-13 | Resistance measurement method and apparatus. |
EP88401838A EP0299875B1 (en) | 1987-07-13 | 1988-07-13 | Method of measuring resistivity, and apparatus therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62204085A JP2833623B2 (en) | 1987-08-19 | 1987-08-19 | Method and apparatus for measuring resistivity |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6447960A true JPS6447960A (en) | 1989-02-22 |
JP2833623B2 JP2833623B2 (en) | 1998-12-09 |
Family
ID=16484535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62204085A Expired - Lifetime JP2833623B2 (en) | 1987-07-13 | 1987-08-19 | Method and apparatus for measuring resistivity |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2833623B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017187439A (en) * | 2016-04-08 | 2017-10-12 | 日置電機株式会社 | Processing device, inspection device, and processing method |
JP2019100931A (en) * | 2017-12-06 | 2019-06-24 | 日置電機株式会社 | Processing device and processing method |
WO2023243578A1 (en) * | 2022-06-14 | 2023-12-21 | 日置電機株式会社 | Measurement device, measurement method, and measurement program |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6472664B2 (en) | 2014-04-14 | 2019-02-20 | 日置電機株式会社 | Measuring apparatus and measuring method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5740949A (en) * | 1980-08-23 | 1982-03-06 | Kokusai Electric Co Ltd | Measurement of resistivity of semiconductor |
-
1987
- 1987-08-19 JP JP62204085A patent/JP2833623B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5740949A (en) * | 1980-08-23 | 1982-03-06 | Kokusai Electric Co Ltd | Measurement of resistivity of semiconductor |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017187439A (en) * | 2016-04-08 | 2017-10-12 | 日置電機株式会社 | Processing device, inspection device, and processing method |
JP2019100931A (en) * | 2017-12-06 | 2019-06-24 | 日置電機株式会社 | Processing device and processing method |
WO2023243578A1 (en) * | 2022-06-14 | 2023-12-21 | 日置電機株式会社 | Measurement device, measurement method, and measurement program |
Also Published As
Publication number | Publication date |
---|---|
JP2833623B2 (en) | 1998-12-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS55119162A (en) | Measuring method of electroless plating reaction | |
JPS6447960A (en) | Method and apparatus for measuring resistivity | |
JPS55141653A (en) | Deterioration state deciding method of strong precipitation hardness type iron base alloy | |
JPS56160608A (en) | Method of measuring surface area of object to be plated | |
JPS5543880A (en) | Non-contact measurement of semiconductor carrier concentration and conductivity by capacitance-coupling | |
JPS57160054A (en) | Flaw detector | |
JPS57191566A (en) | Simple measuring method for resistance value | |
SU1388702A1 (en) | Method of measuring square of electrically-conducting object cross-section | |
SU929997A1 (en) | Method of determining part surface area | |
JPS56112602A (en) | Measuring device for thickness of nonmagnetic thin metal plate | |
Burgers et al. | Measurement of the crack length in a metal sheet with an electric potential method | |
Mieluch et al. | Determination of Corrosion Rate by Means of a Two-Dimensional Parallel Arrangement of Two Electrodes Operating Within a Linear Polarization Area | |
TARR | An apparatus for and a method of measuring magnetic effects due to eddy currents(Patent Application) | |
Arkhipov et al. | Experimental investigation of the growth dynamics of brittle cracks | |
JPS56162042A (en) | Liquid resistance compensating circuit in polarization measuring circuit | |
Lipinski et al. | Use of Galerkin's method to symbolize the Fredholm integral equation near the eddy current in material testing samples.). | |
Merle et al. | The Use of Thermoelectric Power in the Study of Precipitation | |
JPS5758176A (en) | Method and device for measuring development characteristics of liquid developer | |
JPS5333691A (en) | Measurement of alternating current corrosion | |
JPS55147357A (en) | Method of testing insulation using asymmetrical ac voltage | |
Kosovskii et al. | Calibration of Eddy Current Meter for Measuring Specific Electric Conductivity Without Use of Samples | |
SU1811296A1 (en) | METHOD FOR DETERMINING THE MAGNETIC SUSTAINABILITY OF IRON ORE MATERIAL AND A DEVICE FOR ITS IMPLEMENTATION | |
JPS5667734A (en) | Judging method for corrosion speed | |
JPS5454093A (en) | Metal corrosion rate meter | |
ESAREY | Continuous measurement by eddy current methods of age hardening in an aluminum alloy(M. S. Thesis) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |