JPS6447960A - Method and apparatus for measuring resistivity - Google Patents

Method and apparatus for measuring resistivity

Info

Publication number
JPS6447960A
JPS6447960A JP62204085A JP20408587A JPS6447960A JP S6447960 A JPS6447960 A JP S6447960A JP 62204085 A JP62204085 A JP 62204085A JP 20408587 A JP20408587 A JP 20408587A JP S6447960 A JPS6447960 A JP S6447960A
Authority
JP
Japan
Prior art keywords
probe
correction factor
sample
potential
resistance value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62204085A
Other languages
Japanese (ja)
Other versions
JP2833623B2 (en
Inventor
Masato Yamashita
Hideo Enjoji
Hiroshi Kurihara
Shoji Yamaguchi
Akio Hashizume
Kosuke Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Petrochemical Co Ltd
Original Assignee
Mitsubishi Petrochemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Petrochemical Co Ltd filed Critical Mitsubishi Petrochemical Co Ltd
Priority to JP62204085A priority Critical patent/JP2833623B2/en
Priority to US07/209,988 priority patent/US4989154A/en
Priority to KR1019880007741A priority patent/KR960006868B1/en
Priority to DE3851587T priority patent/DE3851587T2/en
Priority to EP88401838A priority patent/EP0299875B1/en
Publication of JPS6447960A publication Critical patent/JPS6447960A/en
Application granted granted Critical
Publication of JP2833623B2 publication Critical patent/JP2833623B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To enable measurement of a correct resistance value of a sample, by determining a correction factor considering the shape, thickness and measuring position and the like of a sample. CONSTITUTION:Current I flows between external probes 11 and 14 to determine a potential difference V between probes 12 and 13. Potential phi generated in the perimeter of the probe 11 at an inlet of the current I and the probe 14 at an outlet thereof is equal to a potential generated by an electric charge. Then, when the width (a) and the length (b) of the sample, the thickness (t) thereof and coordinates (x0, y0) of the center 15 of the probe are inputted, coordinates of points A-D are determined based on an interval S of the probe. Moreover, an inverse of a correction factor of a rectangular sample is determined to obtain a correction factor from the results. Thus, a resistance value is calculated from the current value I and the potential value phi to be multiplied by the correction factor thereby enabling measurement of a correct surface resistance value.
JP62204085A 1987-07-13 1987-08-19 Method and apparatus for measuring resistivity Expired - Lifetime JP2833623B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP62204085A JP2833623B2 (en) 1987-08-19 1987-08-19 Method and apparatus for measuring resistivity
US07/209,988 US4989154A (en) 1987-07-13 1988-06-22 Method of measuring resistivity, and apparatus therefor
KR1019880007741A KR960006868B1 (en) 1987-07-13 1988-06-25 Method of measuring resistivity, and the apparatus therefor
DE3851587T DE3851587T2 (en) 1987-07-13 1988-07-13 Resistance measurement method and apparatus.
EP88401838A EP0299875B1 (en) 1987-07-13 1988-07-13 Method of measuring resistivity, and apparatus therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62204085A JP2833623B2 (en) 1987-08-19 1987-08-19 Method and apparatus for measuring resistivity

Publications (2)

Publication Number Publication Date
JPS6447960A true JPS6447960A (en) 1989-02-22
JP2833623B2 JP2833623B2 (en) 1998-12-09

Family

ID=16484535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62204085A Expired - Lifetime JP2833623B2 (en) 1987-07-13 1987-08-19 Method and apparatus for measuring resistivity

Country Status (1)

Country Link
JP (1) JP2833623B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017187439A (en) * 2016-04-08 2017-10-12 日置電機株式会社 Processing device, inspection device, and processing method
JP2019100931A (en) * 2017-12-06 2019-06-24 日置電機株式会社 Processing device and processing method
WO2023243578A1 (en) * 2022-06-14 2023-12-21 日置電機株式会社 Measurement device, measurement method, and measurement program

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6472664B2 (en) 2014-04-14 2019-02-20 日置電機株式会社 Measuring apparatus and measuring method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5740949A (en) * 1980-08-23 1982-03-06 Kokusai Electric Co Ltd Measurement of resistivity of semiconductor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5740949A (en) * 1980-08-23 1982-03-06 Kokusai Electric Co Ltd Measurement of resistivity of semiconductor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017187439A (en) * 2016-04-08 2017-10-12 日置電機株式会社 Processing device, inspection device, and processing method
JP2019100931A (en) * 2017-12-06 2019-06-24 日置電機株式会社 Processing device and processing method
WO2023243578A1 (en) * 2022-06-14 2023-12-21 日置電機株式会社 Measurement device, measurement method, and measurement program

Also Published As

Publication number Publication date
JP2833623B2 (en) 1998-12-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term