JPS6446921A - Heat treatment furnace - Google Patents
Heat treatment furnaceInfo
- Publication number
- JPS6446921A JPS6446921A JP18974788A JP18974788A JPS6446921A JP S6446921 A JPS6446921 A JP S6446921A JP 18974788 A JP18974788 A JP 18974788A JP 18974788 A JP18974788 A JP 18974788A JP S6446921 A JPS6446921 A JP S6446921A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cover body
- inlet
- bodies
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To prevent the roll-in of the air excellently by providing a means controlling two cover body sections so as to block a wafer inlet for the core tube when at least a wafer is thermally treated and a means controlling the opening of the wafer inlet for the core tube regarding the two cover body sections when the wafer is extracted. CONSTITUTION:Each one end of shafts 10a, 10b is fixed respectively at one end section and the other end section of each fitting body 12a, 12b for a lower cover body 11a and an upper cover body 11b composed of plate-shaped quartz glass. The cover bodies 11a, 11b are fastened respectively to the fitting bodies 12a, 12b by machine screws through springs while each one side of the cover body 11a and the cover body 11b is used as spacers at that time, and a throat for a core tube, an inlet for a wafer, is blocked by the two cover bodies 11a and 11b. Gears 13a, 13b separately engaged with the shafts 10a, 10b mutually are installed respectively, the gears 13a, 13b are rotated in the mutually opposite direction by the revolution of the shaft 10a, and the plate-shaped cover bodies 11a, 11b arc opened and closed. Accordingly, the roll-in of the air at a time when the wafer is inserted or extracted from the inlet can be prevented excellently.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18974788A JPS6446921A (en) | 1988-07-29 | 1988-07-29 | Heat treatment furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18974788A JPS6446921A (en) | 1988-07-29 | 1988-07-29 | Heat treatment furnace |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6446921A true JPS6446921A (en) | 1989-02-21 |
Family
ID=16246503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18974788A Pending JPS6446921A (en) | 1988-07-29 | 1988-07-29 | Heat treatment furnace |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6446921A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5092080A (en) * | 1989-09-29 | 1992-03-03 | Kabushiki Kaisha Toshiba | Apparatus for opening and closing core tube |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5750846B2 (en) * | 1978-12-22 | 1982-10-29 | ||
JPS6112230B2 (en) * | 1974-02-13 | 1986-04-07 | Sharp Kk |
-
1988
- 1988-07-29 JP JP18974788A patent/JPS6446921A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6112230B2 (en) * | 1974-02-13 | 1986-04-07 | Sharp Kk | |
JPS5750846B2 (en) * | 1978-12-22 | 1982-10-29 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5092080A (en) * | 1989-09-29 | 1992-03-03 | Kabushiki Kaisha Toshiba | Apparatus for opening and closing core tube |
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