JPS6446921A - Heat treatment furnace - Google Patents

Heat treatment furnace

Info

Publication number
JPS6446921A
JPS6446921A JP18974788A JP18974788A JPS6446921A JP S6446921 A JPS6446921 A JP S6446921A JP 18974788 A JP18974788 A JP 18974788A JP 18974788 A JP18974788 A JP 18974788A JP S6446921 A JPS6446921 A JP S6446921A
Authority
JP
Japan
Prior art keywords
wafer
cover body
inlet
bodies
core tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18974788A
Other languages
Japanese (ja)
Inventor
Akikazu Kokubo
Masao Honma
Seishirou Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Sony Corp
Original Assignee
Tokyo Electron Sagami Ltd
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd, Sony Corp filed Critical Tokyo Electron Sagami Ltd
Priority to JP18974788A priority Critical patent/JPS6446921A/en
Publication of JPS6446921A publication Critical patent/JPS6446921A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent the roll-in of the air excellently by providing a means controlling two cover body sections so as to block a wafer inlet for the core tube when at least a wafer is thermally treated and a means controlling the opening of the wafer inlet for the core tube regarding the two cover body sections when the wafer is extracted. CONSTITUTION:Each one end of shafts 10a, 10b is fixed respectively at one end section and the other end section of each fitting body 12a, 12b for a lower cover body 11a and an upper cover body 11b composed of plate-shaped quartz glass. The cover bodies 11a, 11b are fastened respectively to the fitting bodies 12a, 12b by machine screws through springs while each one side of the cover body 11a and the cover body 11b is used as spacers at that time, and a throat for a core tube, an inlet for a wafer, is blocked by the two cover bodies 11a and 11b. Gears 13a, 13b separately engaged with the shafts 10a, 10b mutually are installed respectively, the gears 13a, 13b are rotated in the mutually opposite direction by the revolution of the shaft 10a, and the plate-shaped cover bodies 11a, 11b arc opened and closed. Accordingly, the roll-in of the air at a time when the wafer is inserted or extracted from the inlet can be prevented excellently.
JP18974788A 1988-07-29 1988-07-29 Heat treatment furnace Pending JPS6446921A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18974788A JPS6446921A (en) 1988-07-29 1988-07-29 Heat treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18974788A JPS6446921A (en) 1988-07-29 1988-07-29 Heat treatment furnace

Publications (1)

Publication Number Publication Date
JPS6446921A true JPS6446921A (en) 1989-02-21

Family

ID=16246503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18974788A Pending JPS6446921A (en) 1988-07-29 1988-07-29 Heat treatment furnace

Country Status (1)

Country Link
JP (1) JPS6446921A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5092080A (en) * 1989-09-29 1992-03-03 Kabushiki Kaisha Toshiba Apparatus for opening and closing core tube

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750846B2 (en) * 1978-12-22 1982-10-29
JPS6112230B2 (en) * 1974-02-13 1986-04-07 Sharp Kk

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6112230B2 (en) * 1974-02-13 1986-04-07 Sharp Kk
JPS5750846B2 (en) * 1978-12-22 1982-10-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5092080A (en) * 1989-09-29 1992-03-03 Kabushiki Kaisha Toshiba Apparatus for opening and closing core tube

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