JPS6444628U - - Google Patents
Info
- Publication number
- JPS6444628U JPS6444628U JP13799387U JP13799387U JPS6444628U JP S6444628 U JPS6444628 U JP S6444628U JP 13799387 U JP13799387 U JP 13799387U JP 13799387 U JP13799387 U JP 13799387U JP S6444628 U JPS6444628 U JP S6444628U
- Authority
- JP
- Japan
- Prior art keywords
- time change
- exposure
- light
- resist
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 238000004611 spectroscopical analysis Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Landscapes
- Control Of Non-Electrical Variables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13799387U JPS6444628U (OSRAM) | 1987-09-09 | 1987-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13799387U JPS6444628U (OSRAM) | 1987-09-09 | 1987-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6444628U true JPS6444628U (OSRAM) | 1989-03-16 |
Family
ID=31399925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13799387U Pending JPS6444628U (OSRAM) | 1987-09-09 | 1987-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6444628U (OSRAM) |
-
1987
- 1987-09-09 JP JP13799387U patent/JPS6444628U/ja active Pending
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