JPS6443070A - Two-dimensional driving device - Google Patents

Two-dimensional driving device

Info

Publication number
JPS6443070A
JPS6443070A JP62197371A JP19737187A JPS6443070A JP S6443070 A JPS6443070 A JP S6443070A JP 62197371 A JP62197371 A JP 62197371A JP 19737187 A JP19737187 A JP 19737187A JP S6443070 A JPS6443070 A JP S6443070A
Authority
JP
Japan
Prior art keywords
substance
slit
oscillating
oscillation
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62197371A
Other languages
Japanese (ja)
Inventor
Noriyuki Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62197371A priority Critical patent/JPS6443070A/en
Publication of JPS6443070A publication Critical patent/JPS6443070A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body

Landscapes

  • Control Of Position Or Direction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To control the magnitude of propulsion by providing a slit for an oscillating substance and a means to rotate it to an end in contact with the plane. CONSTITUTION:A two-dimensional driving unit is constituted of a moving table (moving substance) 1, a stepping motor 10, a gear 11, an enclosure 13, an oscillating substance holder 12, an oscillating substance 15 and etc. A slit 15(a) for the oscillating substance 15 is provided to an end in contact with the plane (floor surface) 5, and amplitude of the oscillation is increased by mechanical composite resonance. Increasing of the amplitude by the slit 15(a) is subject to an angle of the slit 15(a) with the plane 5. Therefore, amplitude size of the oscillation of the oscillating substance 15 can be controlled by rotating the stepping motor 10 and making the angle change. Accordingly, the magnitude of propulsion obtained through the oscillation of the oscillating substance 15 can be controlled.
JP62197371A 1987-08-07 1987-08-07 Two-dimensional driving device Pending JPS6443070A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62197371A JPS6443070A (en) 1987-08-07 1987-08-07 Two-dimensional driving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62197371A JPS6443070A (en) 1987-08-07 1987-08-07 Two-dimensional driving device

Publications (1)

Publication Number Publication Date
JPS6443070A true JPS6443070A (en) 1989-02-15

Family

ID=16373386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62197371A Pending JPS6443070A (en) 1987-08-07 1987-08-07 Two-dimensional driving device

Country Status (1)

Country Link
JP (1) JPS6443070A (en)

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