JPS6443074A - Vibrating type two-dimensional driving device - Google Patents

Vibrating type two-dimensional driving device

Info

Publication number
JPS6443074A
JPS6443074A JP62197375A JP19737587A JPS6443074A JP S6443074 A JPS6443074 A JP S6443074A JP 62197375 A JP62197375 A JP 62197375A JP 19737587 A JP19737587 A JP 19737587A JP S6443074 A JPS6443074 A JP S6443074A
Authority
JP
Japan
Prior art keywords
vibration
vibrator
making
piezo
disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62197375A
Other languages
Japanese (ja)
Inventor
Yuichiro Yoshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62197375A priority Critical patent/JPS6443074A/en
Publication of JPS6443074A publication Critical patent/JPS6443074A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023—Inchworm motors

Landscapes

  • Control Of Position Or Direction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To miniaturize and to make lightweight the title device at low cost by providing first and second rotors and making them vibration drive by a reverse phase. CONSTITUTION:A vibrating type two-dimensional driving unit has a disc-like moving table 1, and a driving source 3 as the piezo-electric elements (vibrator) assembling substance is assembled fixedly thereunder through a columnar center bearing member 2. The first vibrator 4 among the piezo-electric elements consisting of the driving source 3 makes a shape of disc, and its resonant atti tude is a longitudinal vibration vibrating lengthwise under the surface parallel with the plane 8. The other second vibrations 5-7 vibrate in the vertical direc tion with the plane 8, and its vibration attitude is constituted so as to be vertical direction vibration and longitudinal vibration (perpendicular vibration). According ly, the moving table 1 can be moved by making vibration drive of the vibrator 5 by same phase for the vibrator 4 producing the longitudinal vibration and making vibration drive of the vibrators 6-7 by reverse phase on the other hand.
JP62197375A 1987-08-07 1987-08-07 Vibrating type two-dimensional driving device Pending JPS6443074A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62197375A JPS6443074A (en) 1987-08-07 1987-08-07 Vibrating type two-dimensional driving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62197375A JPS6443074A (en) 1987-08-07 1987-08-07 Vibrating type two-dimensional driving device

Publications (1)

Publication Number Publication Date
JPS6443074A true JPS6443074A (en) 1989-02-15

Family

ID=16373458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62197375A Pending JPS6443074A (en) 1987-08-07 1987-08-07 Vibrating type two-dimensional driving device

Country Status (1)

Country Link
JP (1) JPS6443074A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5828158A (en) * 1996-02-29 1998-10-27 Figest Bv Traveling wave piezoelectric motor
WO2005067072A1 (en) * 2004-01-08 2005-07-21 Thorlabs, Inc. Piezoelectric positioner

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5828158A (en) * 1996-02-29 1998-10-27 Figest Bv Traveling wave piezoelectric motor
WO2005067072A1 (en) * 2004-01-08 2005-07-21 Thorlabs, Inc. Piezoelectric positioner
JP2007518089A (en) * 2004-01-08 2007-07-05 トーラブズ・インコーポレーテッド Piezoelectric positioning device

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