JPH01214271A - Ultrasonic motor - Google Patents

Ultrasonic motor

Info

Publication number
JPH01214271A
JPH01214271A JP63038154A JP3815488A JPH01214271A JP H01214271 A JPH01214271 A JP H01214271A JP 63038154 A JP63038154 A JP 63038154A JP 3815488 A JP3815488 A JP 3815488A JP H01214271 A JPH01214271 A JP H01214271A
Authority
JP
Japan
Prior art keywords
ultrasonic motor
vibrating
annular
elastic
movable body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63038154A
Other languages
Japanese (ja)
Inventor
Hiroshi Ekusa
洋 江草
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63038154A priority Critical patent/JPH01214271A/en
Publication of JPH01214271A publication Critical patent/JPH01214271A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163Motors with ring stator

Abstract

PURPOSE:To enhance the torque and efficiency of an ultrasonic motor by alternately disposing in series two or more vibrators and a movable body. CONSTITUTION:In an annular ultrasonic motor, vibrators 3, 10 are so disposed in series as to hold a movable body 7. The vibration 3 is composed by adhering an annular piezoelectric element 2 to an annular elastic element 1. Similarly, the vibrator 10 is composed by adhering an annular piezoelectric element 9 to an annular elastic element 8. The body 7 is composed by adhering wear resistant frictional materials 4, 6 and an elastic element 5, and brought into contact through frictional materials 4, 6 with the vibrators 3, 10. Thus, the vibrators 3, 10 and the body 7 are alternately composed in series with arbitrary numbers, thereby providing a motor having a large output and large torque weight ratio.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は圧電体を用いて駆動力を発生する超音波モータ
に間する。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an ultrasonic motor that generates driving force using a piezoelectric material.

従来の技術 近年圧電セラミック等の圧電体を用いた振動体に例えば
数10KHzの駆動電圧加えて弾性振動を励振し、この
振動体を伸縮撮動又は厚み撮動させ、この撮動を駆動力
としてロータ等の被駆動体(移動体)を押圧駆動するこ
とにより、移動体を回転又は直線運動させるようにした
超音波モータが注目されている。
BACKGROUND OF THE INVENTION In recent years, a driving voltage of several tens of KHz is applied to a vibrating body using a piezoelectric body such as a piezoelectric ceramic to excite elastic vibration, and the vibrating body is caused to move in an elastic motion or in a thickness motion, and this motion is used as a driving force. 2. Description of the Related Art Ultrasonic motors that rotate or linearly move a driven body (moving body) such as a rotor by pressing and driving the body are attracting attention.

以下、図面を参照しながら超音波モータの従来技術につ
いて説明を行う。
Hereinafter, the conventional technology of an ultrasonic motor will be explained with reference to the drawings.

第5図は円環型超音波モータの斜視図であり、円環型の
弾性体54に円環型圧電体55を貼り合わせて振動体5
8を構成している。53は耐摩耗性材料の摩擦材、52
は弾性体であり、互いに貼り合わせられて移動体57を
構成している。移動体57は摩擦材53を介して振動体
58と接触している。圧電体55に電圧を印加すると振
動体58の周方向に曲げ撮動が励起され、これが進行波
となることにより、移動体57を駆動する。尚、同図中
の振動体58には、機械出力取り出し用の突起体56が
設置されている。
FIG. 5 is a perspective view of a toroidal ultrasonic motor, in which a toroidal piezoelectric body 55 is bonded to a toroidal elastic body 54 to form a vibrating body 5.
8. 53 is a friction material made of wear-resistant material; 52
are elastic bodies, and are pasted together to form the moving body 57. The moving body 57 is in contact with the vibrating body 58 via the friction material 53. When a voltage is applied to the piezoelectric body 55, bending motion is excited in the circumferential direction of the vibrating body 58, which becomes a traveling wave, thereby driving the movable body 57. Note that a protrusion 56 for extracting mechanical output is installed on the vibrating body 58 in the figure.

第6図は第5図の超音波モータに使用した圧電体55の
電極構造の一例を示している。同図では円周方向に9個
の弾性波がのるように構成されている。同図において、
AおよびBはそれぞれ2分の1波長相当の小領域から成
る電極群で、Cは4分の3波長、Dは4分の1波長相当
の電極である。
FIG. 6 shows an example of the electrode structure of the piezoelectric body 55 used in the ultrasonic motor of FIG. In the figure, the structure is such that nine elastic waves are placed in the circumferential direction. In the same figure,
A and B are electrode groups each consisting of a small region corresponding to a half wavelength, C is an electrode group corresponding to a three-quarter wavelength, and D is an electrode group corresponding to a quarter wavelength.

電極CおよびDは電極群AとBに位置的に4分の1波長
く=90°)の位相差を作っている。電極AとB内の隣
合う小電極部は圧電体55を分極する際に用いる電極で
、圧電体55の弾性体54との接着面は、第6図に示さ
れた面と反対の面であり、その面の電極は全面平面電極
である。使用時には、電極群AおよびBは第6図の斜線
で示されたように、それぞれ短絡して用いられる。
Electrodes C and D create a positional phase difference of 1/4 wave length (90°) between electrode groups A and B. Adjacent small electrode parts in electrodes A and B are electrodes used when polarizing the piezoelectric body 55, and the adhesive surface of the piezoelectric body 55 with the elastic body 54 is the opposite side to the surface shown in FIG. The electrodes on that surface are flat electrodes. During use, electrode groups A and B are short-circuited, as indicated by diagonal lines in FIG. 6.

以−ヒのように構成された超音波モータの圧電体。A piezoelectric body of an ultrasonic motor configured as shown in FIG.

55の電極AおよびBに vl=vo ・5in(ωD        −−−(
1)V2=VO−CO3((,1t)        
−−−(2)ただし、vO:電圧の瞬時値 ω:角周波数 t :時間 で表される電圧■1およびv2をそれぞれ印加すれば、
振動体には ξ:ξ0◆(cos(ωt)◆cos(kX)+5in
(ωt) 命5in(kX)):ξO−C03((J 
t−kX)      −−−(3)ただし、ξ :曲
げ振動の振幅値 ξ0:曲げ振動の瞬時値 に:波数(2π/λ) 入 :波長 X:位置 て表せる、円周方向に進行する曲げ振動が励起される。
55 electrodes A and B with vl=vo ・5in(ωD ---(
1) V2=VO-CO3((,1t)
---(2) However, vO: Instantaneous value of voltage ω: Angular frequency t: Voltage expressed in time If ■1 and v2 are respectively applied,
The vibrating body has ξ:ξ0◆(cos(ωt)◆cos(kX)+5in
(ωt) Life 5in (kX)):ξO-C03((J
t-k Vibrations are excited.

第7図は振動体58の表面のA点が進行波の励起によっ
て、長軸2讐、短軸2Uの楕円運動をし、振動体58上
に加圧して設置された移動体57が、楕円の頂点近傍で
接触することにより、摩擦力により波の進行方向とは逆
方向に■:ωxUの回転速度で運動する様子を示してい
る。また、この速度は振動体58と移動体57の間にス
ベリがあるときは、上記のVより小さくなる。同図の矢
印Bは、移動体57の進行方向を示し、矢印Cは、この
進行波の進行方向を示す。また、上記した移動体57の
速度Vは、この曲げ振動の瞬時値ξOに比例する。
FIG. 7 shows that point A on the surface of the vibrating body 58 moves in an ellipse with the major axis 2 and the minor axis 2 U due to the excitation of the traveling wave, and the movable body 57 placed under pressure on the vibrating body 58 moves in an elliptical motion. When the waves come into contact near the apex of the wave, the frictional force causes the wave to move in the opposite direction to the direction of wave movement at a rotational speed of ω:ωxU. Moreover, this speed becomes smaller than the above-mentioned V when there is slippage between the vibrating body 58 and the moving body 57. Arrow B in the figure indicates the traveling direction of the moving body 57, and arrow C indicates the traveling direction of this traveling wave. Further, the speed V of the moving body 57 described above is proportional to the instantaneous value ξO of this bending vibration.

発明が解決しようとする課題 ところで上記のように構成された超音波モータは、トル
ク重量比が高いのにもかかわらず、ロボット等の分野で
は依然小出力のため使用することが困難であった。また
、複数の超音波モータを合わせて1つの運動のために用
いようとすると各超音波モータの特性上のばらつきのた
め高効率で制御性のよい動作は得られにくくかつ重たく
なってしまうという問題があった。
Problems to be Solved by the Invention Although the ultrasonic motor configured as described above has a high torque-to-weight ratio, it has still been difficult to use in the field of robots and the like due to its low output. Another problem is that when multiple ultrasonic motors are used together for one movement, it is difficult to achieve highly efficient and controllable movement due to variations in the characteristics of each ultrasonic motor, and the weight becomes heavy. was there.

本発明はかかる点に鑑み、高効率で大出力の超音波モー
タを提供することを目的とする。
In view of the above, an object of the present invention is to provide an ultrasonic motor with high efficiency and high output.

課題を解決するための手段 本発明は、圧電体と弾性体とから成る少なくとも2つ以
上の振動体と、前記振動体間に面接触し前記振動体が起
こす弾性進行波によって移動運動を受ける移動体と、前
記各接触面が略均等の押し付け圧を受けるべく前記振動
体と前記移動体を交互に直列に配置し、前記移動体の両
側に配置された前記各振動体の前記弾性進行波の位相を
、略180度ずれるように構成されている。
Means for Solving the Problems The present invention provides a mobile device that includes at least two vibrating bodies each consisting of a piezoelectric body and an elastic body, and a mobile device that receives a moving motion by an elastic traveling wave generated by the vibrating bodies that is in surface contact between the vibrating bodies. The vibrating body and the movable body are alternately arranged in series so that the body and each of the contact surfaces receive substantially equal pressing pressure, and the elastic traveling waves of the vibrating bodies disposed on both sides of the movable body are The phase is shifted by approximately 180 degrees.

作用 本発明は前記した構成により、超音波モータの両端から
押し付け圧を与える時、圧力は押し付け方向に略均等に
なるように伝達していく。そのため各振動体と移動体と
の間の接触面には、略均等かつ均一の押し付け圧がかか
る。
Function: With the above-described configuration, when pressing pressure is applied from both ends of the ultrasonic motor, the pressure is transmitted substantially evenly in the pressing direction. Therefore, substantially equal and uniform pressing pressure is applied to the contact surfaces between each vibrating body and the movable body.

また、移動体の両側の振動体から該移動体へ起こる力の
大きざと方向は、振動体の起こす弾性進行波が略180
度1位相がずれているため、移動体のどの点をとっても
等しく反対である。したがって内圧電体がいかに強くS
動しようとも、移動体での合力は略Oとなる。よって移
動体は振動せず、圧電体相互の干渉振動が起きない。
In addition, the magnitude and direction of the force generated from the vibrating bodies on both sides of the movable body to the movable body is such that the elastic traveling waves generated by the vibrating body are approximately 180
Since the phase is shifted by one degree, the angles are equal and opposite at any point on the moving body. Therefore, how strong is the internal piezoelectric body?
Even if it moves, the resultant force on the moving body will be approximately O. Therefore, the moving body does not vibrate, and interference vibrations between the piezoelectric bodies do not occur.

以上の作用により、大トルクかつ高効率の超音波モータ
が実現する。
Through the above-mentioned effects, an ultrasonic motor with large torque and high efficiency is realized.

実施例 以下、図面に従って本発明の実施例について詳細な説明
を行う。
EXAMPLES Hereinafter, examples of the present invention will be described in detail with reference to the drawings.

第1図は本発明の円環型超音波モータの基本構成を説明
するための分解斜視図である。第1図において、振動体
3.10が移動体7を挟むように直列に配置されている
。このように配置することにより、振動体と移動体の間
の接触面には略均等の押し付け圧がかかる。振動体3は
円環型の弾性体1に円環型圧電体2を貼り合わせて構成
している。同様に振動体10は円環型の弾性体8に円環
型圧電体9を貼り合わせて構成している。4.6は耐摩
耗性材料の摩擦材、5は弾性体であり、互いに貼り合わ
せられて移動体7を構成している。
FIG. 1 is an exploded perspective view for explaining the basic configuration of the annular ultrasonic motor of the present invention. In FIG. 1, vibrating bodies 3.10 are arranged in series so as to sandwich a movable body 7 therebetween. With this arrangement, substantially uniform pressing pressure is applied to the contact surfaces between the vibrating body and the movable body. The vibrating body 3 is constructed by bonding an annular piezoelectric body 2 to an annular elastic body 1. Similarly, the vibrating body 10 is constructed by bonding an annular piezoelectric body 9 to an annular elastic body 8. Numeral 4.6 denotes a friction material made of wear-resistant material, and 5 denotes an elastic body, which are pasted together to form the moving body 7.

移動体7は摩擦材4.6を介して振動体3.10と接触
している。
The moving body 7 is in contact with the vibrating body 3.10 via the friction material 4.6.

第2図は第1図のように構成された超音波モータにおい
て、移動体が両側の振動体が起こす弾性進行波によって
運動している様子を示している。
FIG. 2 shows how, in the ultrasonic motor configured as shown in FIG. 1, a movable body is moved by elastic traveling waves generated by vibrating bodies on both sides.

2つの振動体の表面が弾性進行波をおこすことにより、
移動体は摩擦力により波の進行方向とは逆方向に運動す
る。同図の矢印Bは、移動体7の進行方向を示し、矢印
Cは、進行波の進行方向を示す。振動体3.10の位相
を180度ずらす方法は両I辰動体の圧電体を180度
ずらせて貼れはよい。そうすることによって間圧電体が
いかに強く振動しようとも、移動体での合力は略0とな
る。
When the surfaces of the two vibrating bodies generate elastic traveling waves,
The moving body moves in the opposite direction to the direction of wave propagation due to frictional force. Arrow B in the figure indicates the traveling direction of the moving body 7, and arrow C indicates the traveling direction of the traveling wave. A method for shifting the phase of the vibrating body 3.10 by 180 degrees is to attach the piezoelectric bodies of both I-oscillating bodies to a phase shift of 180 degrees. By doing so, no matter how strongly the piezoelectric body vibrates, the resultant force on the moving body becomes approximately zero.

よって移動体は振動せず、圧電体相互の干渉振動が起き
ない。
Therefore, the moving body does not vibrate, and interference vibrations between the piezoelectric bodies do not occur.

第3図は本発明の他の実施例で、より高トルク化した円
環型超音波モータの分解斜視図である。
FIG. 3 is an exploded perspective view of an annular ultrasonic motor with higher torque, which is another embodiment of the present invention.

振動体34の下に移動体35が、移動体35の下に振動
体36が、振動体36の下に移動体37が、移動体37
の下に振動体38が直列に配置された超音波モータの実
施例である。振動体34は円環W’4の弾性体22に円
環型圧電体21を貼り合わせて構成している。同様に振
動体38は円環型の弾性体32に円環型圧電体33を貼
り合わせて構成している。23.25は耐摩耗性材料の
摩擦材、24は弾性体であり、互いに貼り合わせられて
移動体35を構成している。同様に29.31は耐摩耗
性材料の摩擦材、30は弾性体であり、互いに貼り合わ
せられて移動体37を構成している。
A movable body 35 is below the vibrating body 34, a vibrating body 36 is below the movable body 35, a movable body 37 is below the vibrating body 36, a movable body 37
This is an embodiment of an ultrasonic motor in which a vibrating body 38 is arranged in series below. The vibrating body 34 is constructed by bonding the annular piezoelectric body 21 to the elastic body 22 of the annular ring W'4. Similarly, the vibrating body 38 is constructed by bonding an annular piezoelectric body 33 to an annular elastic body 32. Numerals 23 and 25 are friction materials made of wear-resistant materials, and 24 is an elastic body, which are pasted together to form a moving body 35. Similarly, 29 and 31 are friction materials made of wear-resistant materials, and 30 is an elastic body, which are pasted together to form a moving body 37.

振動体36は圧電体27の両側に弾性体26.27を配
置して構成している。
The vibrating body 36 is constructed by arranging elastic bodies 26 and 27 on both sides of a piezoelectric body 27.

第4図は、第3図を基に実現した超音波モータである。FIG. 4 shows an ultrasonic motor realized based on FIG. 3.

最下部の防振台51と振動体50と軸43を一体化した
ステータの上に移動体49が賞かれ、移動体49の上に
回転方向のみトルクが伝達されるようにキー41を設は
振動体48を配置し、振動体48の上に移動体47が責
かれ、移動体47の上に回転方向のみトルクが伝達され
るようにキー42を設は振動体46と防振台45を一体
化したステータを配置して構成されている。軸43はナ
ツト44で締められている。トルクはピン40を介して
合トルクとなって伝達部39へ伝わる。
A movable body 49 is mounted on a stator that integrates a vibration isolating table 51, a vibrating body 50, and a shaft 43 at the bottom, and a key 41 is installed on the movable body 49 so that torque is transmitted only in the rotational direction. The vibrating body 48 is placed, the movable body 47 is placed on top of the vibrating body 48, and the key 42 is installed so that the torque is transmitted only in the rotational direction onto the movable body 47. It is constructed by arranging an integrated stator. The shaft 43 is tightened with a nut 44. The torque becomes a combined torque and is transmitted to the transmission section 39 via the pin 40.

以上の実施例より、振動体と移動体を交互に直列に任意
の枚数を構成して超音波モータができることがわかる。
From the above embodiments, it can be seen that an ultrasonic motor can be produced by configuring an arbitrary number of vibrating bodies and movable bodies alternately in series.

発明の詳細 な説明したように、本発明によれば、大出力でトルク重
量比の高い超音波モータが構成できるので実用的効果は
大きい。また、接触面が受ける押し付け圧は、略均等な
ので各振動体の特性上のばらつきも少なく効率もよい。
As described in detail, according to the present invention, an ultrasonic motor having a large output and a high torque-to-weight ratio can be constructed, so that the practical effects are great. Further, since the pressing pressure applied to the contact surface is approximately equal, there is little variation in the characteristics of each vibrating body, and efficiency is high.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明における一実施例の超音波モータ基本構
成を説明するための一部切り欠き分解斜視図、第2図は
実施例の超音波モータの動作原理図、第3図は本発明に
おける他の実施例の超音波モータの一部切り欠き分解斜
視図、第4図は第3図の実施例の超音波モータの構成を
示す図、第5図は従来の円環型超音波モータの一部切り
欠き斜視図、第6図は第5図の超音波モータに用いた圧
電体の形状と電極構造を示す平面図、第7図は超音波モ
ータの動作原理図である。 1・5・8・22・24・26・28・30・32・5
2・54・・・弾性体、2・9・21・27−33・5
5・・・圧電体、3・10・34・36・38・46・
48・50・58・・・振動体、 4・6・23・25
・29・31 ・53・・・摩擦材、7・35・37・
47・49・57・・・移動体、56・・・突起体、4
5・51・・・防賑台、41−42・・・キー、40・
・・ビン、39・・・伝達部、43・・・軸、44・・
・ナツト。 代理人の氏名 弁理士 中尾敏男 はか1名第1図 第 2 因 第3図
Fig. 1 is a partially cutaway exploded perspective view for explaining the basic configuration of an ultrasonic motor according to an embodiment of the present invention, Fig. 2 is a diagram of the operating principle of the ultrasonic motor according to the embodiment, and Fig. 3 is a diagram of the present invention. FIG. 4 is a diagram showing the configuration of the ultrasonic motor of the embodiment of FIG. 3, and FIG. 5 is a conventional annular ultrasonic motor. FIG. 6 is a plan view showing the shape and electrode structure of the piezoelectric body used in the ultrasonic motor of FIG. 5, and FIG. 7 is a diagram of the operating principle of the ultrasonic motor. 1.5.8.22.24.26.28.30.32.5
2.54...Elastic body, 2.9.21.27-33.5
5...Piezoelectric body, 3.10.34.36.38.46.
48, 50, 58... vibrating body, 4, 6, 23, 25
・29・31 ・53...Friction material, 7.35.37.
47・49・57... Moving body, 56... Projection body, 4
5.51...Boujindai, 41-42...Key, 40.
...Bin, 39...Transmission part, 43...Shaft, 44...
・Natsuto. Name of agent: Patent attorney Toshio Nakao (1 person) Figure 1 Figure 2 Figure 3

Claims (1)

【特許請求の範囲】[Claims]  圧電体と弾性体とから成る少なくとも2つ以上の振動
体と、前記振動体間に面接触し前記振動体に励振される
弾性進行波によって移動運動を受ける移動体と、前記各
接触面が略均等の押し付け圧を受けるべく前記振動体と
前記移動体が交互に直列に配置され、かつ前記移動体の
両側に配置された各振動体の弾性進行波の位相が、略1
80度ずれるように構成されたことを特徴とする超音波
モータ。
at least two or more vibrating bodies consisting of a piezoelectric body and an elastic body; a movable body that is in surface contact between the vibrating bodies and receives moving motion by an elastic traveling wave excited in the vibrating bodies; and each of the contact surfaces is approximately The vibrating bodies and the movable body are alternately arranged in series to receive equal pressing pressure, and the phase of the elastic traveling wave of each vibrating body disposed on both sides of the movable body is approximately 1.
An ultrasonic motor characterized in that it is configured to be shifted by 80 degrees.
JP63038154A 1988-02-19 1988-02-19 Ultrasonic motor Pending JPH01214271A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63038154A JPH01214271A (en) 1988-02-19 1988-02-19 Ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63038154A JPH01214271A (en) 1988-02-19 1988-02-19 Ultrasonic motor

Publications (1)

Publication Number Publication Date
JPH01214271A true JPH01214271A (en) 1989-08-28

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Family Applications (1)

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JP63038154A Pending JPH01214271A (en) 1988-02-19 1988-02-19 Ultrasonic motor

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Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0637123A1 (en) * 1993-07-30 1995-02-01 CROUZET Automatismes Surface acoustic wave motor
JP2003047267A (en) * 2001-08-01 2003-02-14 Toyama Shigeki Laminated sandwich-type ultrasonic motor with improved torque

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0637123A1 (en) * 1993-07-30 1995-02-01 CROUZET Automatismes Surface acoustic wave motor
FR2708790A1 (en) * 1993-07-30 1995-02-10 Crouzet Automatismes Surface acoustic wave motor.
US5493164A (en) * 1993-07-30 1996-02-20 Crouzet Automatismes S.A. Surface acoustic wave motor
JP2003047267A (en) * 2001-08-01 2003-02-14 Toyama Shigeki Laminated sandwich-type ultrasonic motor with improved torque

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