JPS6443072A - Two-dimensional driving device - Google Patents

Two-dimensional driving device

Info

Publication number
JPS6443072A
JPS6443072A JP62197373A JP19737387A JPS6443072A JP S6443072 A JPS6443072 A JP S6443072A JP 62197373 A JP62197373 A JP 62197373A JP 19737387 A JP19737387 A JP 19737387A JP S6443072 A JPS6443072 A JP S6443072A
Authority
JP
Japan
Prior art keywords
driving source
driving
moving
desired direction
moving table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62197373A
Other languages
Japanese (ja)
Inventor
Shigeki Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62197373A priority Critical patent/JPS6443072A/en
Publication of JPS6443072A publication Critical patent/JPS6443072A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body

Landscapes

  • Control Of Position Or Direction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To advance a moving substance in the desired direction optionally by holding a driving source rotatably in the direction paralled with the plane and controlling its rotation. CONSTITUTION:A two-dimensional driving unit holds a driving source 6 rotatably around an axis of the vertical direction with respect to the plane 5, and the above mentioned axis is placed in the singular in the vicinity of the center position of gravity of the moving substance (moving table) 1. And, control rotating drive of the rotatable rotary table 9 is made through forward and reverse by a motor 10. Accordingly, when control over an advanced direc tion of the moving table 1 is made, the moving table 1 can be easily advanced in the desired direction by making the rotating control over a direction of the driving source 6 and driving the driving source 6 so that the driving force is generated in the desired direction.
JP62197373A 1987-08-07 1987-08-07 Two-dimensional driving device Pending JPS6443072A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62197373A JPS6443072A (en) 1987-08-07 1987-08-07 Two-dimensional driving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62197373A JPS6443072A (en) 1987-08-07 1987-08-07 Two-dimensional driving device

Publications (1)

Publication Number Publication Date
JPS6443072A true JPS6443072A (en) 1989-02-15

Family

ID=16373422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62197373A Pending JPS6443072A (en) 1987-08-07 1987-08-07 Two-dimensional driving device

Country Status (1)

Country Link
JP (1) JPS6443072A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011122436A1 (en) * 2010-03-30 2011-10-06 Ntn株式会社 Microinjection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011122436A1 (en) * 2010-03-30 2011-10-06 Ntn株式会社 Microinjection device

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