JPS6442101A - Thin-film resistor for strain gauge - Google Patents

Thin-film resistor for strain gauge

Info

Publication number
JPS6442101A
JPS6442101A JP19889687A JP19889687A JPS6442101A JP S6442101 A JPS6442101 A JP S6442101A JP 19889687 A JP19889687 A JP 19889687A JP 19889687 A JP19889687 A JP 19889687A JP S6442101 A JPS6442101 A JP S6442101A
Authority
JP
Japan
Prior art keywords
resistor
thin
film resistor
metal oxide
centered cubic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19889687A
Other languages
Japanese (ja)
Other versions
JP2562610B2 (en
Inventor
Hideya Yamadera
Yasunori Taga
Katsuhiko Ariga
Kimiaki Yamaguchi
Yoshihiko Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc, NipponDenso Co Ltd filed Critical Toyota Central R&D Labs Inc
Priority to JP62198896A priority Critical patent/JP2562610B2/en
Publication of JPS6442101A publication Critical patent/JPS6442101A/en
Application granted granted Critical
Publication of JP2562610B2 publication Critical patent/JP2562610B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Adjustable Resistors (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE:To obtain a resistor exceillng in a strain resistance characteristic and a resistance temperature characteristic by a method wherein one part of a crystal structure is constituted by chromium having an A-15 type face-centered cubic structure and by a metal oxide. CONSTITUTION:One part of a crystal structure is constituted by Cr having an A-15 type face-centered cubic structure and by a metal oxide. Because the Cr constituting this thin-film resistor for strain gauge use contains an A-15 type structure of the face-centered cubic structure, Poisson's ratio of this resistor is large and a gauge factor of this resistor is high. In addition, the linearity of a starin resistance characteristic is excellent. If a mixture ratio of the Cr and the metal oxide for this thin-film resistor is controlled properly, a mean free path of conduction electrons of the Cr can be controlled and a resistance temperature coefficient can be reduced.
JP62198896A 1987-08-08 1987-08-08 Thin film resistor for strain gauge Expired - Lifetime JP2562610B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62198896A JP2562610B2 (en) 1987-08-08 1987-08-08 Thin film resistor for strain gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62198896A JP2562610B2 (en) 1987-08-08 1987-08-08 Thin film resistor for strain gauge

Publications (2)

Publication Number Publication Date
JPS6442101A true JPS6442101A (en) 1989-02-14
JP2562610B2 JP2562610B2 (en) 1996-12-11

Family

ID=16398741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62198896A Expired - Lifetime JP2562610B2 (en) 1987-08-08 1987-08-08 Thin film resistor for strain gauge

Country Status (1)

Country Link
JP (1) JP2562610B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10270201A (en) * 1997-03-21 1998-10-09 Res Inst Electric Magnetic Alloys Cr-n-based strained resistance film, manufacture therefor and strain sensor
JP2014183248A (en) * 2013-03-21 2014-09-29 Toshiba Corp Semiconductor device and strain monitoring device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10270201A (en) * 1997-03-21 1998-10-09 Res Inst Electric Magnetic Alloys Cr-n-based strained resistance film, manufacture therefor and strain sensor
JP2014183248A (en) * 2013-03-21 2014-09-29 Toshiba Corp Semiconductor device and strain monitoring device

Also Published As

Publication number Publication date
JP2562610B2 (en) 1996-12-11

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