JPS6441877A - Inspector for variations in needle of probe card - Google Patents

Inspector for variations in needle of probe card

Info

Publication number
JPS6441877A
JPS6441877A JP62198673A JP19867387A JPS6441877A JP S6441877 A JPS6441877 A JP S6441877A JP 62198673 A JP62198673 A JP 62198673A JP 19867387 A JP19867387 A JP 19867387A JP S6441877 A JPS6441877 A JP S6441877A
Authority
JP
Japan
Prior art keywords
probe
needles
universal
probe card
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62198673A
Other languages
Japanese (ja)
Inventor
Hiroyuki Takeoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62198673A priority Critical patent/JPS6441877A/en
Publication of JPS6441877A publication Critical patent/JPS6441877A/en
Pending legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE:To facilitate ready inspection in the course of testing an IC wafer as well as the resumption of the original test, by providing a universal tester and a universal probe with a specified function for automatic inspection of variations in needles of a probe card. CONSTITUTION:An IC wafer 3 is set on a universal probe 9. Then, a universal tester 8 and the universal probe 9 are started up to send a test start signal through a communication cable 10 from the general probe 9. The universal tester 8 transmits an electrical signal for testing contact to needles of a probe card 4 through a signal cable 2 and a connector 5. When the IC wafer 3 is grounded, a PMU of the universal tester 8 judges whether the needles of the probe card 4 get in contact with the IC wafer 3: if they do, a special communication signal A is set for 'L'; otherwise, it is set for 'H'. All needles of the probe card 4 are judged sequentially and after the completion of the measurement of all needles, a special communication signal B is set for 'H'.
JP62198673A 1987-08-07 1987-08-07 Inspector for variations in needle of probe card Pending JPS6441877A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62198673A JPS6441877A (en) 1987-08-07 1987-08-07 Inspector for variations in needle of probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62198673A JPS6441877A (en) 1987-08-07 1987-08-07 Inspector for variations in needle of probe card

Publications (1)

Publication Number Publication Date
JPS6441877A true JPS6441877A (en) 1989-02-14

Family

ID=16395144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62198673A Pending JPS6441877A (en) 1987-08-07 1987-08-07 Inspector for variations in needle of probe card

Country Status (1)

Country Link
JP (1) JPS6441877A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010051557A (en) * 1999-11-10 2001-06-25 히가시 데쓰로 Data communication method and data communication system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010051557A (en) * 1999-11-10 2001-06-25 히가시 데쓰로 Data communication method and data communication system

Similar Documents

Publication Publication Date Title
EP0309956A3 (en) Method of testing semiconductor elements and apparatus for testing the same
DE3773645D1 (en) DEVICE AND METHOD FOR MEASURING THE BATTERY STATE.
EP0840131A3 (en) Loaded-board guided-probe test fixture
MY111843A (en) Automatic testing system and method for semiconductor devices
EP0840130A3 (en) Standard- and limited-access hybrid test fixture
EP0165865A3 (en) Method and apparatus for testing integrated circuits
ATE253731T1 (en) TEST PIN FOR A DEVICE FOR TESTING CIRCUIT BOARDS
HK58894A (en) Probe for an adapter for a device for testing printed circuit boards
GB8825319D0 (en) Apparatus for testing input pin leakage current of device under test
JPS6441877A (en) Inspector for variations in needle of probe card
JPS5666768A (en) Tool for in-circuit tester
JPS5427755A (en) Circuit testing equipment
JPS55158573A (en) Ic testing system
CN221039309U (en) Wafer testing device and semiconductor machine
JPS54112174A (en) Testing method for semiconductor device
JPS56116637A (en) Detector for semiconductor device
JPS5510231A (en) Test system for data transmission system
JPS6482540A (en) Prober
GB2268277B (en) Improvements in or relating to electronic circuit test apparatus
JPS5683045A (en) Wafer probe
JPS5750444A (en) Inspection device for semiconductor wafer
JPS574556A (en) Automatic tester for printed board
JPS5679268A (en) Inspection apparatus for integrated circuit
JPS53142259A (en) Threshold condition testing system
JPS5661659A (en) Device for testing and evaluation of semiconductor integrated circuit