JPS6441877A - Inspector for variations in needle of probe card - Google Patents
Inspector for variations in needle of probe cardInfo
- Publication number
- JPS6441877A JPS6441877A JP62198673A JP19867387A JPS6441877A JP S6441877 A JPS6441877 A JP S6441877A JP 62198673 A JP62198673 A JP 62198673A JP 19867387 A JP19867387 A JP 19867387A JP S6441877 A JPS6441877 A JP S6441877A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- needles
- universal
- probe card
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
PURPOSE:To facilitate ready inspection in the course of testing an IC wafer as well as the resumption of the original test, by providing a universal tester and a universal probe with a specified function for automatic inspection of variations in needles of a probe card. CONSTITUTION:An IC wafer 3 is set on a universal probe 9. Then, a universal tester 8 and the universal probe 9 are started up to send a test start signal through a communication cable 10 from the general probe 9. The universal tester 8 transmits an electrical signal for testing contact to needles of a probe card 4 through a signal cable 2 and a connector 5. When the IC wafer 3 is grounded, a PMU of the universal tester 8 judges whether the needles of the probe card 4 get in contact with the IC wafer 3: if they do, a special communication signal A is set for 'L'; otherwise, it is set for 'H'. All needles of the probe card 4 are judged sequentially and after the completion of the measurement of all needles, a special communication signal B is set for 'H'.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62198673A JPS6441877A (en) | 1987-08-07 | 1987-08-07 | Inspector for variations in needle of probe card |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62198673A JPS6441877A (en) | 1987-08-07 | 1987-08-07 | Inspector for variations in needle of probe card |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6441877A true JPS6441877A (en) | 1989-02-14 |
Family
ID=16395144
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62198673A Pending JPS6441877A (en) | 1987-08-07 | 1987-08-07 | Inspector for variations in needle of probe card |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6441877A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010051557A (en) * | 1999-11-10 | 2001-06-25 | 히가시 데쓰로 | Data communication method and data communication system |
-
1987
- 1987-08-07 JP JP62198673A patent/JPS6441877A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010051557A (en) * | 1999-11-10 | 2001-06-25 | 히가시 데쓰로 | Data communication method and data communication system |
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