JPS64417A - Optical encoder - Google Patents

Optical encoder

Info

Publication number
JPS64417A
JPS64417A JP4101288A JP4101288A JPS64417A JP S64417 A JPS64417 A JP S64417A JP 4101288 A JP4101288 A JP 4101288A JP 4101288 A JP4101288 A JP 4101288A JP S64417 A JPS64417 A JP S64417A
Authority
JP
Japan
Prior art keywords
grating
scanning
plate
photodetecting
gratings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4101288A
Other languages
English (en)
Other versions
JPH0760100B2 (ja
JPH01417A (ja
Inventor
Shunsui Kawasaki
Masato Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentax Corp
Original Assignee
Asahi Kogaku Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kogaku Kogyo Co Ltd filed Critical Asahi Kogaku Kogyo Co Ltd
Priority to JP63041012A priority Critical patent/JPH0760100B2/ja
Publication of JPH01417A publication Critical patent/JPH01417A/ja
Publication of JPS64417A publication Critical patent/JPS64417A/ja
Publication of JPH0760100B2 publication Critical patent/JPH0760100B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
JP63041012A 1987-02-25 1988-02-24 光学式エンコーダ Expired - Fee Related JPH0760100B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63041012A JPH0760100B2 (ja) 1987-02-25 1988-02-24 光学式エンコーダ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP62-42109 1987-02-25
JP4210987 1987-02-25
JP63041012A JPH0760100B2 (ja) 1987-02-25 1988-02-24 光学式エンコーダ

Publications (3)

Publication Number Publication Date
JPH01417A JPH01417A (ja) 1989-01-05
JPS64417A true JPS64417A (en) 1989-01-05
JPH0760100B2 JPH0760100B2 (ja) 1995-06-28

Family

ID=26380537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63041012A Expired - Fee Related JPH0760100B2 (ja) 1987-02-25 1988-02-24 光学式エンコーダ

Country Status (1)

Country Link
JP (1) JPH0760100B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5661295A (en) * 1994-07-28 1997-08-26 Matsushita Electric Industrial Co., Ltd. Optical encoder with dual diffraction gratings
JP2007271421A (ja) * 2006-03-31 2007-10-18 Noritsu Koki Co Ltd 光学式ロータリエンコーダ
CN110031029A (zh) * 2019-04-24 2019-07-19 广东工业大学 一种绝对式编码器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224317U (ja) * 1985-07-30 1987-02-14
JPS62174613A (ja) * 1985-08-23 1987-07-31 Matsushita Electric Ind Co Ltd 位置検出装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224317U (ja) * 1985-07-30 1987-02-14
JPS62174613A (ja) * 1985-08-23 1987-07-31 Matsushita Electric Ind Co Ltd 位置検出装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5661295A (en) * 1994-07-28 1997-08-26 Matsushita Electric Industrial Co., Ltd. Optical encoder with dual diffraction gratings
US5696373A (en) * 1994-07-28 1997-12-09 Matsushita Electric Industrial Co., Ltd. Optical encoder with dual diffraction grating
US5696374A (en) * 1994-07-28 1997-12-09 Matsushita Electric Industrial Co., Ltd. Optical encoder using doubled diffraction angle based on first and second diffraction gratings
JP2007271421A (ja) * 2006-03-31 2007-10-18 Noritsu Koki Co Ltd 光学式ロータリエンコーダ
CN110031029A (zh) * 2019-04-24 2019-07-19 广东工业大学 一种绝对式编码器
CN110031029B (zh) * 2019-04-24 2021-03-26 广东工业大学 一种绝对式编码器

Also Published As

Publication number Publication date
JPH0760100B2 (ja) 1995-06-28

Similar Documents

Publication Publication Date Title
US4943716A (en) Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations
US4907847A (en) Optical pickup and hologram therefor
DE3682675D1 (de) Interferometrische maskensubstratausrichtung.
JPS60260813A (ja) 変位測定方法及びその装置
JPH073344B2 (ja) エンコ−ダ−
EP1111433A3 (en) Light beam scanning apparatus
ES8601460A1 (es) Aparato de medicion de desplazamiento para medir el desplazamiento relativo entre dos elementos
CA2084324A1 (en) Optical pickup apparatus and a hologram element used for same
KR900006921A (ko) 광픽업장치
JPH06194123A (ja) 変位検出装置
ATE104792T1 (de) Optische abtastvorrichtung.
EP0402123A3 (en) Optical head device
EP0669519A3 (de) Positionsmessvorrichtung.
JPS5764139A (en) Interferometer
JPS64417A (en) Optical encoder
GB1525049A (en) Displacement-indicating apparatus
ATE122456T1 (de) Winkelmesseinrichtung.
JPS5618709A (en) Method of measuring minute angle
JPS6474414A (en) Optical displacement detector
JPH01176914A (ja) レーザー干渉式エンコーダ
JPH0638048B2 (ja) 反射型エンコーダ
JPS57190202A (en) Device for reading optical scale
SU1080054A1 (ru) Способ измерени фокусного рассто ни объективов и устройство дл его реализации
JPS5782815A (en) Optical beam scanner
SU1778732A1 (ru) Способ записи голограммных дифракционных решеток

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees