JPS6441792U - - Google Patents

Info

Publication number
JPS6441792U
JPS6441792U JP13664087U JP13664087U JPS6441792U JP S6441792 U JPS6441792 U JP S6441792U JP 13664087 U JP13664087 U JP 13664087U JP 13664087 U JP13664087 U JP 13664087U JP S6441792 U JPS6441792 U JP S6441792U
Authority
JP
Japan
Prior art keywords
annular space
space
atmosphere
exhaust pipe
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13664087U
Other languages
Japanese (ja)
Other versions
JPH0543349Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987136640U priority Critical patent/JPH0543349Y2/ja
Publication of JPS6441792U publication Critical patent/JPS6441792U/ja
Application granted granted Critical
Publication of JPH0543349Y2 publication Critical patent/JPH0543349Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Joints Allowing Movement (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図a(平面図)、b(正面断面図)は本考
案の回転真空継手の図。第2図はこの回転真空継
手の使用状況を示す図。第3図a(平面図)、b
(正面断面図)は従来の真空継手の図。第4図は
この真空継手の使用状況を示す図。 1……真空容器の壁部、2,8……Oリング、
3……排気筒、4……大気遮断ケース、5……軸
受、6,7……止め輪、9……回転真空継手、1
0,12……真空容器、11……蝶番ひんじ、1
3……排気口、14……真空継手、15……ベロ
ーズ。
Figures 1a (top view) and 1b (front sectional view) are views of the rotary vacuum joint of the present invention. FIG. 2 is a diagram showing how this rotary vacuum joint is used. Figure 3 a (plan view), b
(Front sectional view) is a diagram of a conventional vacuum joint. FIG. 4 is a diagram showing how this vacuum joint is used. 1... Wall of vacuum container, 2, 8... O-ring,
3... Exhaust pipe, 4... Atmospheric isolation case, 5... Bearing, 6, 7... Retaining ring, 9... Rotating vacuum joint, 1
0,12...Vacuum container, 11...Hinge, 1
3...Exhaust port, 14...Vacuum joint, 15...Bellows.

Claims (1)

【実用新案登録請求の範囲】 排気口を半径方向に突出し該排気口に連通する
環状空間部を備える大気遮断ケースと、 該大気遮断ケースの該環状空間内に挿入される
排気筒であつて、その筒内空間を前記環状空間部
に開放する開口窓を備えるものと、 の二者を含んでなり、 該大気遮断ケースは該排気筒のまわりに気密且
つ回転自在に軸支され、該排気筒は真空容器の壁
部に該筒内空間を該真空容器内空間に連通させて
固定されていることを特徴とする回転真空継手。
[Scope of Claim for Utility Model Registration] An atmosphere shielding case comprising an annular space with an exhaust port projecting in the radial direction and communicating with the exhaust port, an exhaust pipe inserted into the annular space of the atmosphere shielding case, comprising: an opening window that opens the internal space of the cylinder to the annular space; and the atmosphere blocking case is rotatably and airtightly supported around the exhaust pipe, and A rotary vacuum joint, characterized in that it is fixed to a wall of a vacuum container so that the cylindrical space communicates with the vacuum container internal space.
JP1987136640U 1987-09-07 1987-09-07 Expired - Lifetime JPH0543349Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987136640U JPH0543349Y2 (en) 1987-09-07 1987-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987136640U JPH0543349Y2 (en) 1987-09-07 1987-09-07

Publications (2)

Publication Number Publication Date
JPS6441792U true JPS6441792U (en) 1989-03-13
JPH0543349Y2 JPH0543349Y2 (en) 1993-11-01

Family

ID=31397334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987136640U Expired - Lifetime JPH0543349Y2 (en) 1987-09-07 1987-09-07

Country Status (1)

Country Link
JP (1) JPH0543349Y2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139783U (en) * 1981-02-26 1982-09-01
JPS624685U (en) * 1985-06-25 1987-01-12
JPS6217478A (en) * 1985-07-15 1987-01-26 Kooyoo:Kk Needle valve

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5651705A (en) * 1979-10-03 1981-05-09 Olympus Optical Co Ltd Focus detector

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139783U (en) * 1981-02-26 1982-09-01
JPS624685U (en) * 1985-06-25 1987-01-12
JPS6217478A (en) * 1985-07-15 1987-01-26 Kooyoo:Kk Needle valve

Also Published As

Publication number Publication date
JPH0543349Y2 (en) 1993-11-01

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