JPS6441792U - - Google Patents
Info
- Publication number
- JPS6441792U JPS6441792U JP13664087U JP13664087U JPS6441792U JP S6441792 U JPS6441792 U JP S6441792U JP 13664087 U JP13664087 U JP 13664087U JP 13664087 U JP13664087 U JP 13664087U JP S6441792 U JPS6441792 U JP S6441792U
- Authority
- JP
- Japan
- Prior art keywords
- annular space
- space
- atmosphere
- exhaust pipe
- vacuum container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 1
Landscapes
- Joints Allowing Movement (AREA)
Description
第1図a(平面図)、b(正面断面図)は本考
案の回転真空継手の図。第2図はこの回転真空継
手の使用状況を示す図。第3図a(平面図)、b
(正面断面図)は従来の真空継手の図。第4図は
この真空継手の使用状況を示す図。
1……真空容器の壁部、2,8……Oリング、
3……排気筒、4……大気遮断ケース、5……軸
受、6,7……止め輪、9……回転真空継手、1
0,12……真空容器、11……蝶番ひんじ、1
3……排気口、14……真空継手、15……ベロ
ーズ。
Figures 1a (top view) and 1b (front sectional view) are views of the rotary vacuum joint of the present invention. FIG. 2 is a diagram showing how this rotary vacuum joint is used. Figure 3 a (plan view), b
(Front sectional view) is a diagram of a conventional vacuum joint. FIG. 4 is a diagram showing how this vacuum joint is used. 1... Wall of vacuum container, 2, 8... O-ring,
3... Exhaust pipe, 4... Atmospheric isolation case, 5... Bearing, 6, 7... Retaining ring, 9... Rotating vacuum joint, 1
0,12...Vacuum container, 11...Hinge, 1
3...Exhaust port, 14...Vacuum joint, 15...Bellows.
Claims (1)
環状空間部を備える大気遮断ケースと、 該大気遮断ケースの該環状空間内に挿入される
排気筒であつて、その筒内空間を前記環状空間部
に開放する開口窓を備えるものと、 の二者を含んでなり、 該大気遮断ケースは該排気筒のまわりに気密且
つ回転自在に軸支され、該排気筒は真空容器の壁
部に該筒内空間を該真空容器内空間に連通させて
固定されていることを特徴とする回転真空継手。[Scope of Claim for Utility Model Registration] An atmosphere shielding case comprising an annular space with an exhaust port projecting in the radial direction and communicating with the exhaust port, an exhaust pipe inserted into the annular space of the atmosphere shielding case, comprising: an opening window that opens the internal space of the cylinder to the annular space; and the atmosphere blocking case is rotatably and airtightly supported around the exhaust pipe, and A rotary vacuum joint, characterized in that it is fixed to a wall of a vacuum container so that the cylindrical space communicates with the vacuum container internal space.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987136640U JPH0543349Y2 (en) | 1987-09-07 | 1987-09-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987136640U JPH0543349Y2 (en) | 1987-09-07 | 1987-09-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6441792U true JPS6441792U (en) | 1989-03-13 |
JPH0543349Y2 JPH0543349Y2 (en) | 1993-11-01 |
Family
ID=31397334
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987136640U Expired - Lifetime JPH0543349Y2 (en) | 1987-09-07 | 1987-09-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0543349Y2 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57139783U (en) * | 1981-02-26 | 1982-09-01 | ||
JPS624685U (en) * | 1985-06-25 | 1987-01-12 | ||
JPS6217478A (en) * | 1985-07-15 | 1987-01-26 | Kooyoo:Kk | Needle valve |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5651705A (en) * | 1979-10-03 | 1981-05-09 | Olympus Optical Co Ltd | Focus detector |
-
1987
- 1987-09-07 JP JP1987136640U patent/JPH0543349Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57139783U (en) * | 1981-02-26 | 1982-09-01 | ||
JPS624685U (en) * | 1985-06-25 | 1987-01-12 | ||
JPS6217478A (en) * | 1985-07-15 | 1987-01-26 | Kooyoo:Kk | Needle valve |
Also Published As
Publication number | Publication date |
---|---|
JPH0543349Y2 (en) | 1993-11-01 |