JPS6445159U - - Google Patents
Info
- Publication number
- JPS6445159U JPS6445159U JP13850187U JP13850187U JPS6445159U JP S6445159 U JPS6445159 U JP S6445159U JP 13850187 U JP13850187 U JP 13850187U JP 13850187 U JP13850187 U JP 13850187U JP S6445159 U JPS6445159 U JP S6445159U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- rings
- vacuum
- exhaust pipe
- door
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例の真空装置の正面
図、第２図はその扉部分の断面図である。第３図
は従来の真空蒸着装置を示す断面図、第４図はそ
の真空ベルジヤの斜視図、第５図は第４図に示す
真空ベルジヤの扉部分の断面図である。
２１……真空装置（真空蒸着装置）、２２……
真空ベルジヤ、２２ａ……開口、２３……扉、２
５……排気系、２６……Ｏリング間用の排気管、
２７……真空ベルジヤ用の排気管、３４，３５…
…Ｏリング。
FIG. 1 is a front view of a vacuum device according to an embodiment of the invention, and FIG. 2 is a sectional view of the door portion thereof. 3 is a sectional view showing a conventional vacuum evaporation apparatus, FIG. 4 is a perspective view of the vacuum bellgear, and FIG. 5 is a sectional view of the door portion of the vacuum bellgear shown in FIG. 4. 21... Vacuum device (vacuum evaporation device), 22...
Vacuum bell gear, 22a...Opening, 23...Door, 2
5...Exhaust system, 26...Exhaust pipe between O-rings,
27... Exhaust pipe for vacuum bell gear, 34, 35...
...O-ring.
Claims (1)
る同心状の二重のＯリングによるシール構造とし
、このＯリング間に形成される空間に連通する排
気管を設けたことを特徴とする真空装置。 A vacuum device characterized in that the door that closes the opening of the vacuum chamber has a sealing structure with double concentric O-rings surrounding the opening, and an exhaust pipe is provided that communicates with the space formed between the O-rings. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13850187U JPS6445159U (en) | 1987-09-09 | 1987-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13850187U JPS6445159U (en) | 1987-09-09 | 1987-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445159U true JPS6445159U (en) | 1989-03-17 |
Family
ID=31400895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13850187U Pending JPS6445159U (en) | 1987-09-09 | 1987-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445159U (en) |
-
1987
- 1987-09-09 JP JP13850187U patent/JPS6445159U/ja active Pending