JPS644091Y2 - - Google Patents

Info

Publication number
JPS644091Y2
JPS644091Y2 JP7179881U JP7179881U JPS644091Y2 JP S644091 Y2 JPS644091 Y2 JP S644091Y2 JP 7179881 U JP7179881 U JP 7179881U JP 7179881 U JP7179881 U JP 7179881U JP S644091 Y2 JPS644091 Y2 JP S644091Y2
Authority
JP
Japan
Prior art keywords
movable part
mechanical vibrator
coil pattern
contraction
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7179881U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57183515U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7179881U priority Critical patent/JPS644091Y2/ja
Publication of JPS57183515U publication Critical patent/JPS57183515U/ja
Application granted granted Critical
Publication of JPS644091Y2 publication Critical patent/JPS644091Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP7179881U 1981-05-18 1981-05-18 Expired JPS644091Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7179881U JPS644091Y2 (enrdf_load_stackoverflow) 1981-05-18 1981-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7179881U JPS644091Y2 (enrdf_load_stackoverflow) 1981-05-18 1981-05-18

Publications (2)

Publication Number Publication Date
JPS57183515U JPS57183515U (enrdf_load_stackoverflow) 1982-11-20
JPS644091Y2 true JPS644091Y2 (enrdf_load_stackoverflow) 1989-02-02

Family

ID=29867588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7179881U Expired JPS644091Y2 (enrdf_load_stackoverflow) 1981-05-18 1981-05-18

Country Status (1)

Country Link
JP (1) JPS644091Y2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4776779B2 (ja) * 1998-09-02 2011-09-21 カイロス・インク 捩り撓みヒンジで連結されて相対的に回転する微細加工部材
US6315423B1 (en) * 1999-07-13 2001-11-13 Input/Output, Inc. Micro machined mirror
WO2004049035A1 (ja) * 2002-11-26 2004-06-10 Brother Kogyo Kabushiki Kaisha 光走査装置および画像形成装置
JP4581847B2 (ja) * 2005-05-27 2010-11-17 セイコーエプソン株式会社 アクチュエータ
JP2011027973A (ja) * 2009-07-24 2011-02-10 Fujitsu Ltd マイクロ素子

Also Published As

Publication number Publication date
JPS57183515U (enrdf_load_stackoverflow) 1982-11-20

Similar Documents

Publication Publication Date Title
US3998092A (en) Simple systems for light beam modulation by acoustic surface waves
JP3003429B2 (ja) ねじり振動子および光偏向子
US7830577B2 (en) Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same
JP3902622B2 (ja) 周波数変調可能な共振型スキャナー
US5170089A (en) Two-axis motion apparatus utilizing piezoelectric material
JPS644091Y2 (enrdf_load_stackoverflow)
US3518460A (en) Ultrasonic transducer employing suspended piezoelectric plate
CN110207818B (zh) 一种偏振红外线探测器结构
JPH08334723A (ja) 光偏向素子
JPH04211217A (ja) 光偏向子
JPH10123449A (ja) 光スキャナ
US3508814A (en) Flexure mode transducer for optical beam scanning
JPH0219783Y2 (enrdf_load_stackoverflow)
JP4409894B2 (ja) 光走査装置、光書込装置および画像形成装置
JPS5819200B2 (ja) ム−ビングコイル形カ−トリッジ
JP2004354719A (ja) スキャン装置
US3636810A (en) Tuning forks and oscillators embodying the same
EP1616212A2 (en) Oscillating mirror having a plurality of eigenmodes
JP2022176027A (ja) アクチュエータ装置
JP6148055B2 (ja) プレーナ型アクチュエータ
JPH03150733A (ja) 回転鏡装置
JPH0219784Y2 (enrdf_load_stackoverflow)
JPH06284752A (ja) 超音波モータ
JP2000019446A (ja) 光走査装置
CN216052575U (zh) 致动器和投影设备