JPS644091Y2 - - Google Patents

Info

Publication number
JPS644091Y2
JPS644091Y2 JP7179881U JP7179881U JPS644091Y2 JP S644091 Y2 JPS644091 Y2 JP S644091Y2 JP 7179881 U JP7179881 U JP 7179881U JP 7179881 U JP7179881 U JP 7179881U JP S644091 Y2 JPS644091 Y2 JP S644091Y2
Authority
JP
Japan
Prior art keywords
movable part
mechanical vibrator
coil pattern
contraction
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7179881U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57183515U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7179881U priority Critical patent/JPS644091Y2/ja
Publication of JPS57183515U publication Critical patent/JPS57183515U/ja
Application granted granted Critical
Publication of JPS644091Y2 publication Critical patent/JPS644091Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP7179881U 1981-05-18 1981-05-18 Expired JPS644091Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7179881U JPS644091Y2 (enrdf_load_stackoverflow) 1981-05-18 1981-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7179881U JPS644091Y2 (enrdf_load_stackoverflow) 1981-05-18 1981-05-18

Publications (2)

Publication Number Publication Date
JPS57183515U JPS57183515U (enrdf_load_stackoverflow) 1982-11-20
JPS644091Y2 true JPS644091Y2 (enrdf_load_stackoverflow) 1989-02-02

Family

ID=29867588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7179881U Expired JPS644091Y2 (enrdf_load_stackoverflow) 1981-05-18 1981-05-18

Country Status (1)

Country Link
JP (1) JPS644091Y2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4776779B2 (ja) * 1998-09-02 2011-09-21 カイロス・インク 捩り撓みヒンジで連結されて相対的に回転する微細加工部材
US6315423B1 (en) * 1999-07-13 2001-11-13 Input/Output, Inc. Micro machined mirror
EP1586933A4 (en) * 2002-11-26 2006-02-22 Brother Ind Ltd LIGHT SCANNER AND PICTURE GENERATOR
JP4581847B2 (ja) * 2005-05-27 2010-11-17 セイコーエプソン株式会社 アクチュエータ
JP2011027973A (ja) * 2009-07-24 2011-02-10 Fujitsu Ltd マイクロ素子

Also Published As

Publication number Publication date
JPS57183515U (enrdf_load_stackoverflow) 1982-11-20

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