JPS644091Y2 - - Google Patents

Description

[Detailed explanation of the invention] This invention uses a resonator that resonates at a specific frequency,
a filter with frequency selectivity; a light deflector that deflects the light beam in opposition to the magnitude of the input signal;
This invention relates to a mechanical vibrator that can be used as a detection element for various physical quantities such as force, pressure, density, and viscosity.

Figure 1 shows the patent application filed in 1983 by the inventors
This is a perspective view showing an example of the mechanical oscillator of this kind proposed in No. 44383, in which an optical deflector is shown.

This optical deflector has a frame 1 supporting a movable part 2 via narrow spring parts 31 and 32, and a reflecting mirror 4 and a coil pattern 5 formed on the movable part 2. The frame 1, the movable part 2, and the spring parts 31, 32 have a thickness of, for example, 5x10 ^-5 m.
These shapes, reflecting mirrors, and coil patterns are created using photolithography and etching techniques.

The optical deflector configured in this manner is constructed by placing the coil pattern 5 in a magnetic field in the direction of the arrow shown in the figure (a magnetic field in the same direction as the planar direction of the substrate), and by passing a current through the coil pattern, the movable part 2 is deflected about the spring parts 31 and 32, and the light beam incident on the reflecting mirror 4 can be polarized.

Incidentally, an optical deflector with such a configuration has the advantage of being able to produce a large number of high-performance, uniform-quality elements at once, but on the other hand, when a large current is passed through the coil pattern, the resistance of the coil pattern causes a There was a problem in that the area around the coil pattern expanded due to the heat generated, and the movable part 2 warped as shown in FIG. If the movable part 2 is warped as shown in FIG. 2, the reflecting mirror will be tilted and the polarized beam will no longer be reflected in the correct direction.

Here, the present invention has been made for the purpose of solving the problems caused by the warpage of the movable part.

The mechanical vibrator according to the present invention has a structure as shown in FIG.
A unique feature of the structure is that it is fixed to the frame via a spring section that absorbs expansion and contraction.

3 and 4 are perspective views of the mechanical vibrator according to the present invention, each illustrating a case where an optical deflector is constructed.

In the embodiment shown in FIG. 3, spring parts 31 and 32 that support the movable part 2 are fixed to both sides of the frame 1 via spring parts 38 and 39 for absorbing expansion and contraction, which are parallel to the upper and lower sides of the frame 1. This is how it was done.

The embodiment shown in FIG. 4 shows a spring part 3 having a movable part 2.
1 and 32 are provided with rectangular expansion/contraction absorbing springs 38 and 39 whose inner sides are punched out. Note that here, rectangular springs 38, 3
9 shows two sets of rectangular springs connected above and below the movable part 2, but the number of rectangular springs may be even larger.

According to the mechanical vibrator configured in this manner, expansion and contraction due to Joule heat of the current flowing through the coil pattern 5 of the movable part is absorbed by the expansion and contraction of the spring parts 38 and 39.
Since it has a flexible structure in the direction of expansion and contraction of the movable portion 2, it deforms as shown in FIG. 5 or FIG. 6, and can effectively absorb this expansion.

FIG. 7 is a diagram showing the relationship between power consumption and polarization angle (warp angle) in the coil pattern 5 in a mechanical vibrator having the structure shown in FIG. 4. Yes, B indicates not applicable.

As is clear from this experimental data, by applying the present invention, the warping of the movable part due to Joule heat was improved to an almost negligible extent.

In addition, in the present invention, the expansion/contraction absorbing spring portion 3
8 and 39 can be formed together with the springs 31 and 32 and the frame 1 from one insulating substrate in the same process by using photolithography technology and etching technology, so the manufacturing process may become complicated. Nothing happens.

As explained above, according to the present invention, it is possible to effectively absorb the warpage of the movable part made by Jul, etc., and realize a high-performance mechanical vibrator.

[Brief explanation of the drawing]

Fig. 1 is a perspective view of the configuration of an example of a mechanical vibrator previously proposed by the present inventors, Fig. 2 is a side view for explaining the problems, and Figs. 3 and 4 are based on the present invention. A perspective view of the structure of such a mechanical vibrator, FIGS. 5 and 6 are explanatory diagrams of main parts for explaining its operation, and FIG. 7 is a diagram showing an example of experimental results for explaining the effects of the present invention. It is. 1...Frame, 2...Movable part, 31, 32...
...Spring part, 4... Reflector, 5... Coil pattern, 38, 39... Expansion/contraction absorbing spring part.

Claims (1)

[Claims for Utility Model Registration] (1) A frame and a movable part supported by the frame via a spring part are formed by one insulating substrate, and a coil pattern is formed on the movable part, In a mechanical vibrator that applies a magnetic field in the same direction as the insulating substrate and causes a current to flow through the coil pattern to vibrate the movable part, the spring part is provided with a spring part for absorbing expansion and contraction. Characteristic mechanical vibrator. (2) The mechanical vibrator according to claim 1, wherein the spring portion for absorbing expansion and contraction is formed in a rectangular shape with a punched inner side.