JPS6439780A - Manufacture of solar cell - Google Patents
Manufacture of solar cellInfo
- Publication number
- JPS6439780A JPS6439780A JP62197189A JP19718987A JPS6439780A JP S6439780 A JPS6439780 A JP S6439780A JP 62197189 A JP62197189 A JP 62197189A JP 19718987 A JP19718987 A JP 19718987A JP S6439780 A JPS6439780 A JP S6439780A
- Authority
- JP
- Japan
- Prior art keywords
- diffused layer
- electrode
- plasma discharging
- substrate
- hydrogen plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
Abstract
PURPOSE:To improve the sensitivity in the short wavelength side for reducing the contact resistance of electrode to the surface of a diffused layer by a method wherein a silicon substrate with a diffused layer and a surface electrode previously formed thereon is processed in a plasma discharging device to make the diffused layer shallower excluding the part immediately below the electrode. CONSTITUTION:POCl3 is diffused on the surface of a silicon single crystal substrate 1 to form a diffused layer in thickness of around 0.3mum. Successively, electrodes 4 and 5 are formed by printbaking and baking process using Ag-Al parts respectively on the surface and the rear side. The substrate 1 in such a state is mounted on a lower electrode 13 provided inside a vacuum vessel 11 of a hydrogen plasma discharging device to be heated by a heater 14 below the lower electrode 13 maintaining the temperature of the substrate 1 at 300 deg.C performing hydrogen plasma discharging process for one hour. Consequently, the diffused layer is provided with the thickness of around 0.2mum. Through these procedures, hydrogen plasma discharging process, the curvature can be notably improved so that the conversion efficiency may be increased from 3.1% before the processing to 12.7% after the processing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62197189A JPS6439780A (en) | 1987-08-06 | 1987-08-06 | Manufacture of solar cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62197189A JPS6439780A (en) | 1987-08-06 | 1987-08-06 | Manufacture of solar cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6439780A true JPS6439780A (en) | 1989-02-10 |
Family
ID=16370288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62197189A Pending JPS6439780A (en) | 1987-08-06 | 1987-08-06 | Manufacture of solar cell |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6439780A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003101055A (en) * | 2001-09-27 | 2003-04-04 | Mitsubishi Electric Corp | Method for manufacturing solar battery |
| WO2013069324A1 (en) * | 2011-11-10 | 2013-05-16 | 三菱電機株式会社 | Solar cell, method for manufacturing same, and solar cell module |
-
1987
- 1987-08-06 JP JP62197189A patent/JPS6439780A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003101055A (en) * | 2001-09-27 | 2003-04-04 | Mitsubishi Electric Corp | Method for manufacturing solar battery |
| WO2013069324A1 (en) * | 2011-11-10 | 2013-05-16 | 三菱電機株式会社 | Solar cell, method for manufacturing same, and solar cell module |
| JPWO2013069324A1 (en) * | 2011-11-10 | 2015-04-02 | 三菱電機株式会社 | SOLAR CELL, ITS MANUFACTURING METHOD, SOLAR CELL MODULE |
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