JPS6439634U - - Google Patents
Info
- Publication number
- JPS6439634U JPS6439634U JP13355087U JP13355087U JPS6439634U JP S6439634 U JPS6439634 U JP S6439634U JP 13355087 U JP13355087 U JP 13355087U JP 13355087 U JP13355087 U JP 13355087U JP S6439634 U JPS6439634 U JP S6439634U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- susceptor
- processing
- semiconductor wafer
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000012545 processing Methods 0.000 claims 4
- 238000012993 chemical processing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987133550U JPH064585Y2 (ja) | 1987-09-01 | 1987-09-01 | 半導体ウエハの処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987133550U JPH064585Y2 (ja) | 1987-09-01 | 1987-09-01 | 半導体ウエハの処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6439634U true JPS6439634U (US07923587-20110412-C00022.png) | 1989-03-09 |
| JPH064585Y2 JPH064585Y2 (ja) | 1994-02-02 |
Family
ID=31391514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987133550U Expired - Lifetime JPH064585Y2 (ja) | 1987-09-01 | 1987-09-01 | 半導体ウエハの処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064585Y2 (US07923587-20110412-C00022.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009182177A (ja) * | 2008-01-31 | 2009-08-13 | Tokyo Electron Ltd | プラズマ処理システム |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57211246A (en) * | 1981-06-23 | 1982-12-25 | Kokusai Electric Co Ltd | Automatic supply and taking out device for wafer |
| JPS594039A (ja) * | 1982-06-30 | 1984-01-10 | Hitachi Ltd | ウエ−ハ搬送装置 |
| JPS6130237U (ja) * | 1984-07-26 | 1986-02-24 | 日立電子エンジニアリング株式会社 | ウエハ処理装置のウエハロ−ド機構 |
-
1987
- 1987-09-01 JP JP1987133550U patent/JPH064585Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57211246A (en) * | 1981-06-23 | 1982-12-25 | Kokusai Electric Co Ltd | Automatic supply and taking out device for wafer |
| JPS594039A (ja) * | 1982-06-30 | 1984-01-10 | Hitachi Ltd | ウエ−ハ搬送装置 |
| JPS6130237U (ja) * | 1984-07-26 | 1986-02-24 | 日立電子エンジニアリング株式会社 | ウエハ処理装置のウエハロ−ド機構 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009182177A (ja) * | 2008-01-31 | 2009-08-13 | Tokyo Electron Ltd | プラズマ処理システム |
| JP4515507B2 (ja) * | 2008-01-31 | 2010-08-04 | 東京エレクトロン株式会社 | プラズマ処理システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH064585Y2 (ja) | 1994-02-02 |
