JPS6437037A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6437037A JPS6437037A JP19395687A JP19395687A JPS6437037A JP S6437037 A JPS6437037 A JP S6437037A JP 19395687 A JP19395687 A JP 19395687A JP 19395687 A JP19395687 A JP 19395687A JP S6437037 A JPS6437037 A JP S6437037A
- Authority
- JP
- Japan
- Prior art keywords
- contact hole
- conductive layer
- silicide film
- film
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To prevent an upper conductive layer from disconnection at a contact hole by a method wherein the contact hole is filled with silicide film. CONSTITUTION:An interlayer insulating film 2 is formed on a lower conductive layer 1. A contact hole 2a is provided to expose a part of the lower conductive layer 1, with a photoresist film serving as a mask. A silicide film 4 is then formed on the interlayer insulating film 2 and on the hole-provided lower conductive layer 1. A process follows wherein a photoresist 5 is applied to the silicide film 4, and then the photoresist 5 and the silicide film 4 are removed, with a portion of the silicide film 4 retained in the contact hole 2a. An upper conducting wire 6 is formed flat on the flattened surface of the interlayer insulating film 2. This design prevents disconnection involving the contact hole 2a.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19395687A JPS6437037A (en) | 1987-08-03 | 1987-08-03 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19395687A JPS6437037A (en) | 1987-08-03 | 1987-08-03 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6437037A true JPS6437037A (en) | 1989-02-07 |
Family
ID=16316554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19395687A Pending JPS6437037A (en) | 1987-08-03 | 1987-08-03 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6437037A (en) |
-
1987
- 1987-08-03 JP JP19395687A patent/JPS6437037A/en active Pending
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