JPS6437019A - Plasma processor - Google Patents
Plasma processorInfo
- Publication number
- JPS6437019A JPS6437019A JP19395187A JP19395187A JPS6437019A JP S6437019 A JPS6437019 A JP S6437019A JP 19395187 A JP19395187 A JP 19395187A JP 19395187 A JP19395187 A JP 19395187A JP S6437019 A JPS6437019 A JP S6437019A
- Authority
- JP
- Japan
- Prior art keywords
- phase
- output control
- inputted
- alternate current
- processor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To enable the title processor to be constituted at low cost by a method wherein three phase alternate current is inputted; the phase of this three phase alternate current is detected; and on.off of respective phase currents are controlled by output control signals conforming to the detected phase. CONSTITUTION:When star connection three phase alternate current with neutral point thereof grounded is inputted to a turning magnetic field generating power supply 6 from input terminals u, v, w, a phase detection circuit 7 detects the minus side of respective phases to convert it into one shot pulse (a) as a phase signal. The one shot pulse (a) is inputted to an output control circuit 8 to toggle- transmit on.off signals controlling power switching elements 9 so that output control signals b, c may be outputted from the output control circuit 8. Through these procedures, the cost of this processor can be cut down.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19395187A JPS6437019A (en) | 1987-08-03 | 1987-08-03 | Plasma processor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19395187A JPS6437019A (en) | 1987-08-03 | 1987-08-03 | Plasma processor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6437019A true JPS6437019A (en) | 1989-02-07 |
Family
ID=16316471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19395187A Pending JPS6437019A (en) | 1987-08-03 | 1987-08-03 | Plasma processor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6437019A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03120258U (en) * | 1990-03-22 | 1991-12-10 | ||
JP2008210890A (en) * | 2007-02-23 | 2008-09-11 | Nichicon Corp | Chip type electronic component |
-
1987
- 1987-08-03 JP JP19395187A patent/JPS6437019A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03120258U (en) * | 1990-03-22 | 1991-12-10 | ||
JP2008210890A (en) * | 2007-02-23 | 2008-09-11 | Nichicon Corp | Chip type electronic component |
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