JPS6435913A - Method and device for correcting defect of device - Google Patents

Method and device for correcting defect of device

Info

Publication number
JPS6435913A
JPS6435913A JP19002987A JP19002987A JPS6435913A JP S6435913 A JPS6435913 A JP S6435913A JP 19002987 A JP19002987 A JP 19002987A JP 19002987 A JP19002987 A JP 19002987A JP S6435913 A JPS6435913 A JP S6435913A
Authority
JP
Japan
Prior art keywords
ion
processing
processed
ion species
conductivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19002987A
Other languages
English (en)
Inventor
Toru Ishitani
Yoshimi Kawanami
Takeshi Onishi
Kaoru Umemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP19002987A priority Critical patent/JPS6435913A/ja
Publication of JPS6435913A publication Critical patent/JPS6435913A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Drying Of Semiconductors (AREA)
JP19002987A 1987-07-31 1987-07-31 Method and device for correcting defect of device Pending JPS6435913A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19002987A JPS6435913A (en) 1987-07-31 1987-07-31 Method and device for correcting defect of device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19002987A JPS6435913A (en) 1987-07-31 1987-07-31 Method and device for correcting defect of device

Publications (1)

Publication Number Publication Date
JPS6435913A true JPS6435913A (en) 1989-02-07

Family

ID=16251184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19002987A Pending JPS6435913A (en) 1987-07-31 1987-07-31 Method and device for correcting defect of device

Country Status (1)

Country Link
JP (1) JPS6435913A (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58164135A (ja) * 1982-03-25 1983-09-29 Agency Of Ind Science & Technol 収束イオンビ−ムを用いた半導体加工装置
JPS59135726A (ja) * 1983-01-24 1984-08-04 Hitachi Ltd 低温吸着を利用した光によるパタ−ン形成方法
JPS60217635A (ja) * 1984-04-12 1985-10-31 Mitsubishi Electric Corp 半導体装置の製造方法
JPS61245164A (ja) * 1985-04-23 1986-10-31 Seiko Instr & Electronics Ltd パタ−ン修正装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58164135A (ja) * 1982-03-25 1983-09-29 Agency Of Ind Science & Technol 収束イオンビ−ムを用いた半導体加工装置
JPS59135726A (ja) * 1983-01-24 1984-08-04 Hitachi Ltd 低温吸着を利用した光によるパタ−ン形成方法
JPS60217635A (ja) * 1984-04-12 1985-10-31 Mitsubishi Electric Corp 半導体装置の製造方法
JPS61245164A (ja) * 1985-04-23 1986-10-31 Seiko Instr & Electronics Ltd パタ−ン修正装置

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