JPS6435300A - Transfer of fine pattern - Google Patents
Transfer of fine patternInfo
- Publication number
- JPS6435300A JPS6435300A JP62188953A JP18895387A JPS6435300A JP S6435300 A JPS6435300 A JP S6435300A JP 62188953 A JP62188953 A JP 62188953A JP 18895387 A JP18895387 A JP 18895387A JP S6435300 A JPS6435300 A JP S6435300A
- Authority
- JP
- Japan
- Prior art keywords
- counter
- output
- current
- zone
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62188953A JPS6435300A (en) | 1987-07-30 | 1987-07-30 | Transfer of fine pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62188953A JPS6435300A (en) | 1987-07-30 | 1987-07-30 | Transfer of fine pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6435300A true JPS6435300A (en) | 1989-02-06 |
Family
ID=16232810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62188953A Pending JPS6435300A (en) | 1987-07-30 | 1987-07-30 | Transfer of fine pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6435300A (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6417427A (en) * | 1987-07-13 | 1989-01-20 | Nippon Telegraph & Telephone | Fine pattern transferring device |
-
1987
- 1987-07-30 JP JP62188953A patent/JPS6435300A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6417427A (en) * | 1987-07-13 | 1989-01-20 | Nippon Telegraph & Telephone | Fine pattern transferring device |
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