JPS6417427A - Fine pattern transferring device - Google Patents
Fine pattern transferring deviceInfo
- Publication number
- JPS6417427A JPS6417427A JP62173076A JP17307687A JPS6417427A JP S6417427 A JPS6417427 A JP S6417427A JP 62173076 A JP62173076 A JP 62173076A JP 17307687 A JP17307687 A JP 17307687A JP S6417427 A JPS6417427 A JP S6417427A
- Authority
- JP
- Japan
- Prior art keywords
- light
- current
- sor
- variation
- intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To make light energy density constant on a sample surface and to prevent exposure irregularity between wafers from occurring due to variation in intensity of light, by changing a motion speed of a light irradiated region in accordance with variation in intensity of synchrotron radiant light. CONSTITUTION:A current booster 1 outputs a rocking magnet exciting current IM according to an input voltage VM. Since a rocking magnet mounted on an accumulation ring is excited by this current IM, an orbit of an electron current accumulated in the accumulation ring is rocked by changing this current, and so a region irradiated with synchrotron radiant light SOR from there is shifted. Further, a means, which is disposed between an SOR light source and a sample and used to selectively screen the SOR light, is operated synchronizing with the shift of the irradiated region. Since energy density of the SOR light on the sample surface can be hence made constant, exposure irregularity between wafers can be prevented from occurring due to variation in intensity of light. Exposure regulation by a shading means is performed without the exposure irregularity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62173076A JP2628045B2 (en) | 1987-07-13 | 1987-07-13 | Fine pattern transfer device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62173076A JP2628045B2 (en) | 1987-07-13 | 1987-07-13 | Fine pattern transfer device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6417427A true JPS6417427A (en) | 1989-01-20 |
JP2628045B2 JP2628045B2 (en) | 1997-07-09 |
Family
ID=15953763
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62173076A Expired - Lifetime JP2628045B2 (en) | 1987-07-13 | 1987-07-13 | Fine pattern transfer device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2628045B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6435300A (en) * | 1987-07-30 | 1989-02-06 | Nippon Telegraph & Telephone | Transfer of fine pattern |
JPH0276213A (en) * | 1988-09-13 | 1990-03-15 | Canon Inc | Exposure device |
EP0697295A2 (en) | 1994-07-18 | 1996-02-21 | Toppan Printing Co., Ltd. | Printed decorative paper having a three dimensional pattern and a process for the production thereof |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62141721A (en) * | 1985-12-17 | 1987-06-25 | Mitsubishi Electric Corp | Charged particle device |
-
1987
- 1987-07-13 JP JP62173076A patent/JP2628045B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62141721A (en) * | 1985-12-17 | 1987-06-25 | Mitsubishi Electric Corp | Charged particle device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6435300A (en) * | 1987-07-30 | 1989-02-06 | Nippon Telegraph & Telephone | Transfer of fine pattern |
JPH0276213A (en) * | 1988-09-13 | 1990-03-15 | Canon Inc | Exposure device |
EP0697295A2 (en) | 1994-07-18 | 1996-02-21 | Toppan Printing Co., Ltd. | Printed decorative paper having a three dimensional pattern and a process for the production thereof |
Also Published As
Publication number | Publication date |
---|---|
JP2628045B2 (en) | 1997-07-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080418 Year of fee payment: 11 |