JPS6435175A - Semiconductor processing device - Google Patents
Semiconductor processing deviceInfo
- Publication number
- JPS6435175A JPS6435175A JP19321887A JP19321887A JPS6435175A JP S6435175 A JPS6435175 A JP S6435175A JP 19321887 A JP19321887 A JP 19321887A JP 19321887 A JP19321887 A JP 19321887A JP S6435175 A JPS6435175 A JP S6435175A
- Authority
- JP
- Japan
- Prior art keywords
- ring
- vacuum side
- gas
- processing device
- semiconductor processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To prevent generation of dust due to corrosion of an O-ring by providing a protector for preventing the O-ring from making contact with gas. on the vacuum side of the O-ring. CONSTITUTION:An O-ring 13 and an elastomer material which has resiliency, high rigidity and high corrosion resistance against gas to be handled, and which is positioned on the vacuum side 14 of the O-ring 13, are fitted in a groove 12 formed in one outer surface part of a bottom plate 11, and are arrange to be squeezed simultaneously by a seal part of a vacuum container 16. Further, a part of an elastomer material 15 is arranged to be exposed to the vacuum side. Accordingly it is possible to prevent the O-ring 13 from making contact with the gas which is treated on the vacuum side and which corrodes the O-ring 13.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19321887A JPS6435175A (en) | 1987-07-31 | 1987-07-31 | Semiconductor processing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19321887A JPS6435175A (en) | 1987-07-31 | 1987-07-31 | Semiconductor processing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6435175A true JPS6435175A (en) | 1989-02-06 |
Family
ID=16304275
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19321887A Pending JPS6435175A (en) | 1987-07-31 | 1987-07-31 | Semiconductor processing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6435175A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001060558A (en) * | 1999-07-01 | 2001-03-06 | Applied Materials Inc | Inert barrier for high-cleanliness epitaxial deposition system |
SG85213A1 (en) * | 1999-09-27 | 2001-12-19 | Greene Tweed Inc | Seal and protective shield |
JP2009500580A (en) * | 2005-07-07 | 2009-01-08 | マットソン テクノロジー インコーポレイテッド | Sealing apparatus and method with corrosion barrier |
WO2018131487A1 (en) * | 2017-01-16 | 2018-07-19 | アイシン・エィ・ダブリュ株式会社 | Seal structure and transmission equipped with same |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59190578A (en) * | 1983-04-11 | 1984-10-29 | Eagle Ind Co Ltd | Sealing device |
-
1987
- 1987-07-31 JP JP19321887A patent/JPS6435175A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59190578A (en) * | 1983-04-11 | 1984-10-29 | Eagle Ind Co Ltd | Sealing device |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001060558A (en) * | 1999-07-01 | 2001-03-06 | Applied Materials Inc | Inert barrier for high-cleanliness epitaxial deposition system |
SG85213A1 (en) * | 1999-09-27 | 2001-12-19 | Greene Tweed Inc | Seal and protective shield |
JP2009500580A (en) * | 2005-07-07 | 2009-01-08 | マットソン テクノロジー インコーポレイテッド | Sealing apparatus and method with corrosion barrier |
WO2018131487A1 (en) * | 2017-01-16 | 2018-07-19 | アイシン・エィ・ダブリュ株式会社 | Seal structure and transmission equipped with same |
US11162588B2 (en) | 2017-01-16 | 2021-11-02 | Aisin Aw Co., Ltd. | Seal structure and transmission including the same |
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