JPS6431484A - Short pulse excimer laser - Google Patents

Short pulse excimer laser

Info

Publication number
JPS6431484A
JPS6431484A JP18797987A JP18797987A JPS6431484A JP S6431484 A JPS6431484 A JP S6431484A JP 18797987 A JP18797987 A JP 18797987A JP 18797987 A JP18797987 A JP 18797987A JP S6431484 A JPS6431484 A JP S6431484A
Authority
JP
Japan
Prior art keywords
discharge
short pulse
capacitor
electrode
uniform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18797987A
Other languages
Japanese (ja)
Other versions
JPH0252430B2 (en
Inventor
Kazumasa Yamadaya
Kensou Miyazaki
Hisafumi Hazama
Takuzo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP18797987A priority Critical patent/JPS6431484A/en
Publication of JPS6431484A publication Critical patent/JPS6431484A/en
Publication of JPH0252430B2 publication Critical patent/JPH0252430B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To minimize the dimensions around an electrode, to reduce the inductance and to acquire uniform and strong short pulse discharge by sealding a capacitor in a main discharge circuit in a discharge tube integrally with a discharge electrode and by providing corona-type spare ionization equipment to obtain uniform discharge in contact with the surface of discharge cathode. CONSTITUTION:A plate capacitor 1 which constitutes plume line circuit is sealded in a laser discharge tube 3 high in breakdown strength to minimize the size around a discharge electrode and to realize strong short pulse discharge. The plate capacitor 1 is composed by inserting a dielectric with metal plate. Furthermore, the capacitor and electrodes are integrated with each other by processing the edge of metal plate to discharge electrodes 4 and 5. Insulated corona-type spare ionization equipment is arranged in contact with a cathode surface. Uniform and strong short pulse discharge can be thus easily obtained even at a high gas pressure.
JP18797987A 1987-07-28 1987-07-28 Short pulse excimer laser Granted JPS6431484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18797987A JPS6431484A (en) 1987-07-28 1987-07-28 Short pulse excimer laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18797987A JPS6431484A (en) 1987-07-28 1987-07-28 Short pulse excimer laser

Publications (2)

Publication Number Publication Date
JPS6431484A true JPS6431484A (en) 1989-02-01
JPH0252430B2 JPH0252430B2 (en) 1990-11-13

Family

ID=16215489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18797987A Granted JPS6431484A (en) 1987-07-28 1987-07-28 Short pulse excimer laser

Country Status (1)

Country Link
JP (1) JPS6431484A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015199079A1 (en) * 2014-06-26 2015-12-30 ギガフォトン株式会社 Gas laser device and condenser

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015199079A1 (en) * 2014-06-26 2015-12-30 ギガフォトン株式会社 Gas laser device and condenser
WO2015198457A1 (en) * 2014-06-26 2015-12-30 ギガフォトン株式会社 Gas laser device and capacitor
US20170033527A1 (en) * 2014-06-26 2017-02-02 Gigaphoton Inc. Gas laser device and condenser
JPWO2015199079A1 (en) * 2014-06-26 2017-04-20 ギガフォトン株式会社 Gas laser device and capacitor
US10096966B2 (en) 2014-06-26 2018-10-09 Gigaphoton Inc. Gas laser device and condenser

Also Published As

Publication number Publication date
JPH0252430B2 (en) 1990-11-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term