JPS6431431A - Conveying method - Google Patents
Conveying methodInfo
- Publication number
- JPS6431431A JPS6431431A JP18659187A JP18659187A JPS6431431A JP S6431431 A JPS6431431 A JP S6431431A JP 18659187 A JP18659187 A JP 18659187A JP 18659187 A JP18659187 A JP 18659187A JP S6431431 A JPS6431431 A JP S6431431A
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- arm
- stopped
- limit position
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18659187A JP2506379B2 (ja) | 1987-07-28 | 1987-07-28 | 搬送方法及び搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18659187A JP2506379B2 (ja) | 1987-07-28 | 1987-07-28 | 搬送方法及び搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6431431A true JPS6431431A (en) | 1989-02-01 |
JP2506379B2 JP2506379B2 (ja) | 1996-06-12 |
Family
ID=16191229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18659187A Expired - Lifetime JP2506379B2 (ja) | 1987-07-28 | 1987-07-28 | 搬送方法及び搬送装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2506379B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU622893B2 (en) * | 1988-03-29 | 1992-04-30 | Toray Silicone Co. Ltd. | Transparent flame-retardant silicone rubber compositions |
JPH0677245U (ja) * | 1994-04-22 | 1994-10-28 | 大日本スクリーン製造株式会社 | 半導体製造装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145326A (en) * | 1980-12-29 | 1982-09-08 | Censor Patent Versuch | Method and device for forming pattern on wafer by photosensing semiconductor wafer |
JPS5895636U (ja) * | 1981-12-22 | 1983-06-29 | キヤノン株式会社 | ウエハ等の搬出入装置 |
JPS61188331A (ja) * | 1985-02-15 | 1986-08-22 | Nippon Texas Instr Kk | 物体取出装置 |
-
1987
- 1987-07-28 JP JP18659187A patent/JP2506379B2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145326A (en) * | 1980-12-29 | 1982-09-08 | Censor Patent Versuch | Method and device for forming pattern on wafer by photosensing semiconductor wafer |
JPS5895636U (ja) * | 1981-12-22 | 1983-06-29 | キヤノン株式会社 | ウエハ等の搬出入装置 |
JPS61188331A (ja) * | 1985-02-15 | 1986-08-22 | Nippon Texas Instr Kk | 物体取出装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU622893B2 (en) * | 1988-03-29 | 1992-04-30 | Toray Silicone Co. Ltd. | Transparent flame-retardant silicone rubber compositions |
JPH0677245U (ja) * | 1994-04-22 | 1994-10-28 | 大日本スクリーン製造株式会社 | 半導体製造装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2506379B2 (ja) | 1996-06-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080402 Year of fee payment: 12 |